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http://dx.doi.org/10.4313/JKEM.2017.30.7.447

Fabrication of Li2MnSiO4 Cathode Thin Films by RF Sputtering for Thin Film Li-ion Secondary Batteries and Their Electrochemical Properties  

Chae, Suman (Department of Materials Science and Engineering, Kunsan National University)
Shim, Joongpyo (Department of Nano and Chemical Engineering, Kunsan National University)
Sun, Ho-Jung (Department of Materials Science and Engineering, Kunsan National University)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.30, no.7, 2017 , pp. 447-453 More about this Journal
Abstract
In this study, $Li_2MnSiO_4$ cathode material and LiPON solid electrolyte were manufactured into thin films, and the possibility of their use in thin-film batteries was researched. When the RTP treatment was performed after $Li_2MnSiO_4$ cathode thin-film deposition on the SUS substrate by a sputtering method, a ${\beta}-Li_2MnSiO_4$ cathode thin film was successfully manufactured. The LiPON solid electrolyte was prepared by a reactive sputtering method using a $Li_3PO_4$ target and $N_2$ gas, and a homogeneous and flat thin film was deposited on a $Li_2MnSiO_4$ cathode thin film. In order to evaluate the electrochemical properties of the $Li_2MnSiO_4$ cathode thin films, coin cells using only a liquid electrolyte were prepared and the charge/discharge test was conducted. As a result, the amorphous thin film of RTP treated at $600^{\circ}C$ showed the highest initial discharge capacity of about $60{\mu}Ah/cm^2$. In cases of coin cells using liquid/solid double electrolyte, the discharge capacities of the $Li_2MnSiO_4$ cathode thin films were comparable to those without solid LiPON electrolyte. It was revealed that $Li_2MnSiO_4$ cathode thin films with LiPON solid electrolyte were applicable in thin film batteries.
Keywords
$Li_2MnSiO_4$; Cathode; Thin film; Thin film battery; Sputtering;
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