Resolution Improvement of AFM using the mechanical vibration measurement of an XY-axis VCM fine stage (XY-axis VCM fine stage 의 진동 측정을 이용한 AFM 의 분해능 향상)
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- Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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- 2009.10a
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- pp.324-325
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- 2009