• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1447-1450
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• 2006

The high speed and sensitivity array test system has been developed and utilized for massproduction of advanced LTPS displays including SOG and OLED. It realizes fast enough TACT enabling 100% inspection with better than 1fF sensitivity. The result of actual measurement shows its superior TACT and sensitivity, and also shows MURA detection of OLED panel.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1353-1356
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• 2004

In recent year, OLED(organic light emitted display) is used as the next generation device of FPD. OLED have been replacing the flat panel display device such as LCD, STN-LCD and TFT because this device is more efficient, economic and simple than those FPD devices, and this need not backlight system for visualization. The performance and efficiency of OLED is related with surface defect of ITO coated glass substrate. The typical surface defect of glass substrate is nonuniformity and bad surface roughness. ITO coated glass substrate is destroied for inspection about surface roughness and non-uniformity. Generally detection of the defects in the surface for ITO coated glass substrate is dependent on operator's experience. In this research, relationship between working parameter and surface non-uniformity is studied using regression analysis.

• 한국멀티미디어학회논문지
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• 제13권8호
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• pp.1115-1127
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• 2010

TFT-LCD 생산 과정에서 발생하는 결함을 정확하게 분류하여 결함 유형에 따라 폐기, 사용가능 등의 의사결정을 적절하게 내리는 것은 수율 증가 및 생산성 향상에 필수적인 요소이다. 본 논문에서는 TFT-LCD 생산 라인에서 획득한 결함 영상에 대하여 명암도 분포(intensity distribution) 및 결함 영상의 형태 특징(shape feature)을 분석하여 효과적으로 필름 결함 유형을 분류하는 기법을 제시한다. 본 연구에서는 먼저 필름 결함 영상을 결함 영역과 결함이 아닌 배경 영역으로 이진화하고, 결함 영역에서 결함의 선형성(linearity), 명암도 분포를 고려한 형태 특징 등의 여러 가지 특징을 분석하여 기준 영상(referential image) 데이터베이스를 구축하였으며, 분류하고자 하는 결함 영상과 데이터베이스에 저장된 기준 영상과의 매칭 비용 함수(matching cost function)를 정의하여 적절히 매칭시킴으로써 결함의 유형을 결정하였다. 제시한 기법의 성능을 검증하기 위하여 실제 TFT-LCD 생산 라인에서 획득한 결함 영상들을 대상으로 분류 실험을 수행하였으며, 실험 결과 생산 라인에서 이용할 수 있을 정도의 상당한 수준의 분류 정확도를 달성하였음을 보여주었다.

• 제어로봇시스템학회논문지
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• 제15권8호
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• pp.761-771
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• 2009

Detecting defects on FPD (Flat Panel Display) color filter before the full panel is made is important to reduce the manufacturing cost. Among many types of defects, the low contrast blemish such as Suzi Mura is difficult to detect using standard CCD cameras. Even skilled inspectors in the inspection line can hardly identify such defects using bare eyes. To overcome this difficulty, point spectrometer has been used to analyze the spectrum to differentiate such defects from normal color filters. However, scanning ever increasing-size color filters by a point spectrometer takes too long time to be used in real production line. We propose a system using a spectral camera which can be viewed as a line scan camera composed of an array of point spectrometers. Three types of lighting system that exhibit different illumination spectrums are devised together with a calibration method of the proposed spectral camera system. To visualize the defect areas, various processing algorithms to identify and to enhance the small differences in spectrum between defective and normal areas are developed. Experiments shows 85% successful visualization. of real samples using the proposed system.

• 한국산업정보학회논문지
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• 제12권3호
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• pp.116-123
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• 2007

평판 디스플레이 부품시장 및 관련 개발장비 시장의 확대에 따른 백라이트 생산업체들의 수가 크게 증가했음에도 불구하고 LCD부품의 색재현에 좋지 못한 영향을 끼치는 백라이트 표면의 이물이나 백점, 스크래치와 같은 결함검사는 여전히 작업자의 육안에 의존하고 있는 실정이다. 그러나 육안검사에서는 작업자의 신체상태나 작업능력에 따라 검사정밀도와 검사속도 등이 달라질 수 있기 때문에 검사품질의 일관성을 유지시키기 어려울 뿐만 아니라 전체 공정의 효율도 저하시킨다. 본 연구에서는 백라이트 표시면치육안 결함검사를 자동화할 수 있는 백라이트 표면결함 검사시스템 개발에 관해 연구하였으며, 이를 위해 컴퓨터비젼시스템을 구성하고 검사공정을 위한 운용프로그램과 검사작업에 필요한 작업자 인터페이스 그리고 결함정보 추출을 위한 영상처리모듈을 구현하였다 또한, 이진화된 결함화소들 간의 연결구조로부터 고립된 결함영역을 추출하기 위해 레이블 테이블과 결함 인덱스를 사용한 레이블링 알고리즘을 고안하였다. 본 검사시스템의 검사성능을 평가하기 위한 실험결과, 시각적으로 식별가능 한 모든 결함영역이 검사시스템에 의해 검출됨에 따라 본 연구의 검사시스템이 작업자의 육안검사를 대체하기에 만족할만한 성능을 보임을 착인 할 수 있었다.

• 제어로봇시스템학회논문지
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• 제14권4호
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• pp.336-341
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• 2008

Recently, research on a flat panel display(FPD) has focused on organic light-emitting display(OLED) which has wide angle of view, high contrast ratio and low power consumption. ITO(Indium-Tin-Oxide) films are the most widely used material as a transparent electrode of OLED and also in many other display devices like LCD or PDP. The performance and efficiency of OLED is related to the surface condition of ITO coated glass substrate. The typical surface defect of glass substrate is measured for electric characteristics and physical condition for transmittance and roughness. Since ITO coated glass substrate can be destroyed for inspection about surface roughness, sheet resistance, film thickness and transmittance, precise fabrication condition should be made based on the estimated relationship. In this paper, ITO films were prepared on the commercial glass substrate by the Ion-Plating method changing the partial pressure of gas(Ar, 02) and the chamber temperature between $200^{\circ}C$ and $300^{\circ}C$. The characteristics of films were examined by the 4-point probe, supersonic thickness measurement, transmittance measurement and AFM. We estimated the relationship between processing parameters(Ar gas, O2 gas, Temperature) and properties of ITO films (Sheet Resistance, Film Thickness, Transmittance, Surface Roughness).

• 한국정밀공학회지
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• 제31권9호
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• pp.831-838
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• 2014

Chip on glass (COG) bonding using anisotropic conductive film (ACF) is a key technology to assemble a driver IC onto a LCD glass panel. In this paper, an experimental investigation was conducted to investigate the correlation between contact resistance and characteristics of image taken by machine vision based inspection system. The results show that the contact resistance was strongly influenced by the contrast ratio of conductive particle rather than the number of conductive particles. Also, number of conductive particles whose contrast ratio is below 0.75 is crucial for determining the quality of the assembled samples. On the other hand, in the result of high temperature high humidity storage test, the contrast ratio of samples was increased. However, in the case of open-circuit samples after temperature humidity storage test, the number of conductive particles whose contrast ratio is above 0.75 was more than that of the closed-circuit samples.

• 제어로봇시스템학회논문지
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• 제14권6호
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.