• 한국진공학회지
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• 제19권4호
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• pp.256-264
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• 2010

본 논문에서는 고진공용 터보분자펌프의 비접촉 고속회전을 위한 자기베어링 시스템의 디지털 제어시스템의 설계에 대하여 소개하였으며, 실례로 800 l/s급의 고진공 펌프에 대하여 축 유연모드의 후방향 위험속도를 넘는 최대 40,000 rpm까지의 회전실험 결과를 나타내었다. 제안된 제어시스템은 기본적으로 PID 기반의 직접궤환 제어기와 자이로스코픽 모멘트 효과를 제어하기 위한 교차궤환기, 유연모우드 감쇄를 위한 리드필터와 동기진동 저감을 위한 노치필터 등으로 구성되어 있으며, 이러한 제어기는 자기부상형 터보분자펌프 외에 고속 플라이휠과 같은 자기베어링에 적용될 수 있다.

• 한국지하수토양환경학회:학술대회논문집
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• 한국지하수토양환경학회 2003년도 추계학술발표회
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• pp.282-284
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• 2003

Multi-phase extraction of LNAPLs not only floating on groundwater but also captured in soil pores was studied in a simulated soil system. The extraction rate of LNAPL under the MPE conditions was much higher than the rate under usual hydraulic gradient conditions. The WE might be especially useful for recovery of oils in fine-textured soils such as clay-dominant soils. The vacuum-enhanced transport of LNAPL in soils also depended on the properties of LNAPL such as viscosity and density as well as soil textures.

• Tribology and Lubricants
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• 제38권4호
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• pp.121-127
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• 2022

This study presents the development of an integrated oil purification system consisting of moisture removal, oil flushing, and oil filtering devices. In this system, the oil flushing device is combined with a micro-bubble generator. Oil purification is necessary for ensuring the high performance of the lubricant through the efficient removal of contaminants and thus enables good maintenance of mechanical systems. The developed purification system removes moisture, varnish, and solid particles. Moreover, during oil purification, the oil flushing device separates foreign materials and contaminants remaining in the lubricating oil piping or mechanical systems. The microbubble generator, which is combined with the oil flushing device, can separate harmful contaminants, such as sludge, wear particles, and rust, from piping or lubrication systems through the cavitation effect. Moisture is removed using a double high-vacuum chamber, while sludge and varnish are removed via electro-absorption using a high-voltage generator. Additionally, the total maintenance cost of the system is reduced through the use of domestically fabricated cartridge filters composed of glass fiber and cellulose. The heater, which maintains the temperature of the lubricant at 60℃, can process 41,000 L of lubricant simultaneously. Multiple tests confirmed that the proposed integrated purification system exhibits good performance in oil flushing and removal of water and varnish.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.18-18
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• 2010

Methods of the characteristics evaluation of turbo-molecular pumps (TMP) are well-defined in the international measurement standards such as ISO, PNEUROP, DIN, JIS, and AVS. The Vacuum Center in the Korea Research Institute of Standards and Science has recently designed, constructed, and established the integrated characteristics evaluation system of TMPs based on the international documents by continuously pursuing and acquiring the reliable international credibility through measurement perfection. The measurement of TMP pumping speed is normally performed with the throughput and orifice methods dependent on the mass flow regions. However, in the UHV range of the molecular flow region, the high uncertainties of the gauges, mass flow rates, and conductance are too critical to precisely accumulate reliable data. With UHV gauges of uncertainties less than 15% and a calculated conductance of the orifice, about 35% of pumping speed uncertainties are experimentally derived in the pressure range of less than $10^{-6}$ mbar. In order to solve the uncertainty problems of pumping speeds in the UHV range, we introduced an SRG with 1% accuracy and a constant volume flow meter (CVFM) to measure the finite mass flow rates down to $10^{-3}$ mbar-L/s with 3% uncertainty for the throughput method. In this way we have performed the measurement of pumping speed down to less than $10^{-6}$ mbar with an uncertainty of 6% for a 1000 L/s TMP. In this article we suggest that the CVFM has an ability to measure the conductance of the orifice experimentally with flowing the known mass through the orifice chambers, so that we may overcome the discontinuity problem encountering during introducing two measurement methods in one pumping speed evaluation sequence.

• Applied Science and Convergence Technology
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• 제25권6호
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• pp.108-115
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• 2016

Even if ion pumps are widely and mostly used in ultra-high vacuum (UHV) conditions, virtually every existing ion pump has its maximum pumping speed around 1E-6 mbar (1E-4 Pa). Discharge intensity in the ion pump Penning cell is defined as the current divided by pressure (I/P). This quantity reflects the rate of cathode bombardment by ions, which underlies all of the various pumping mechanisms that occur in ion pumps (chemisorption on sputtered material, ion burial, etc.), and therefore is an indication of pumping speed. A study has been performed to evaluate the influence of magnetic fields and cell dimensions on the ion pump discharge intensity and consequently on the pumping speed at different pressures. As a result, a combination of parameters has been developed in order to design and build an ion pump with the pumping speed peak shifted towards lower pressures. Experimental results with several different test set-ups are presented and a prototype of a new 200 l/s ion pump with the maximum pumping speed in the 1E-8 mbar (1E-6 Pa) is described. A model of the system has also been developed to provide a framework for understanding the experimental observations.

• 분석과학
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• 제34권1호
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• pp.23-35
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• 2021

In order to measure the volatile organic compounds (VOCs) of a sample which is too large to use commercially available chamber, a stainless steel vacuum chamber (VC) (with an internal diameter of 205 mm and a height of 50 mm) was manufactured and the temperature of the chamber was controlled using an oven. After concentrating the volatiles of the sample in the chamber by helium gas, it was made possible to remove residual volatile substances present in the chamber under reduced pressure ((2 ± 1) × 10-2 mmHg). The chamber was connected to a purge & trap (P&T) using a 6 port valve to concentrate the VOCs, which were analyzed by gas chromatography-mass spectrometry (GC-MS) after thermal desorption (VC-P&T-GC-MS). Using toluene, the toluene recovery rate of this device was 85 ± 2 %, reproducibility was 5 ± 2 %, and the detection limit was 0.01 ng L-1. The method of removing VOCs remaining in the chamber with helium and the method of removing those with reduced pressure was compared using Korean drinking water regulation (KDWR) VOC Mix A (5 μL of 100 ㎍ mL-1) and butylated hydroxytoluene (BHT, 2 μL of 500 ㎍ mL-1). In case of using helium, which requires a large amount of gas and time, reduced pressure ((2 ± 1) × 10-2 mmHg) only during the GC-MS running time, could remove VOCs and BHT to less than 0.1 % of the original injection concentration. As a result of analyzing volatile substances using VC-P&T-GC-MS of six types of cell phone case, BHT was detected in four types and quantitatively analyzed. Maintaining the chamber at reduced pressure during the GC-MS analysis time eliminated memory effect and did not affect the next sample analysis. The volatile substances in a cell phone case were also analyzed by dynamic headspace (HT3) and GC-MS, and the results of the analysis were compared with those of VC-P&T-GC-MS. Considering the chamber volume and sample weight, the VC-P&T configuration was able to collect volatile substances more efficiently than the HT3. The VC-P&T-GC-MS system is believed to be useful for VOCs measurement of inhomogeneous large sample or devices used inside clean rooms.

• 생태와환경
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• 제54권4호
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• pp.272-279
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• 2021

필터의 손상 없이 포집할 수 있는 필터케이스를 적용하고, 전압 제어와 압력 제어를 각각 할 수 있는 펌프 방식의 eDNA 포집 및 채수 시스템을 개발하여 집수매거 취수원을 대상으로 종래의 진공압 방식의 포집 및 추출 실험과 eDNA 농도를 비교함으로써 개발 시스템의 필터링 성능을 평가하였다. 개발된 시스템은 전압제어(Manual pump system) 방식과 압력제어(Automatic pump system) 방식으로 구분하여 필터링 시 필터기 내부 압력을 측정하고 각 시스템의 압력 변화를 비교하였다. 전압제어 방식은 필터링 초기에 65 [KPa]로 시작하여 필터링 시간이 경과함에 따라 필터에 축적되는 여과물의 양이 증가하므로 압력이 점진적으로 증가하였다. 압력제어 방식은 설계된 알고리즘에 따라 일정 압력을 유지하도록 제어한 결과, 압력 센서의 피드백 시간에 따라 필터링 과정에서 압력 변동의 폭은 차이가 있으나 목표 압력에 수렴하는 것을 확인하였다. 개발된 시스템의 필터링 성능을 확인하기 위해 eDNA 농도를 측정하고 전압제어 방식과 압력제어 방식을 대조군과 비교하였다. 전압제어 방식은 대조군과 유사한 결과를 얻을 수 있었으나 압력제어 방식은 대조군에 비해 낮게 나타났다. 압력제어 방식의 경우 필터링 시 압력 편차가 크고, 필터링 과정에서 일정한 압력을 유지하기 때문에 나타난 결과로 사료된다. 따라서 필터링 시에는 일정한 압력을 유지하는 것보다 필터링 시간 경과와 함께 여과물의 증가에 따라 압력이 점진적으로 증가하는 전압제어 방식이 eDNA를 포집하는데 적합함을 확인하였다. 정수역과 유수역의 eDNA 평균농도를 대조군으로 비교한 결과, 각각 96.2 [ng µL^-1], 88.4 [ng µL^-1]로 나타났으며, 펌프 방식으로 eDNA 평균농도를 비교한 결과는 각각 90.7 [ng µL^-1], 74.8 [ng µL^-1]로 정수역에서 필터링한 시료에서 높게 나타났다. 정수역에서 eDNA 농도가 높게 나타난 것은 잔존하는 eDNA를 비롯한 미세 유기물의 영향으로 사료된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.369-369
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• 2011

In the current work, we demonstrate the gas phase plasma synthesis of ultrafine boron nanoparticles by decomposing boron trichloride (BCl3) gas in an argon-hydrogen thermal plasma and quenching the hot plasma by expansion through a ceramic nozzle, driving the homogeneous nucleation of nanoparticles. It is shown that ultrafine nanoparticles can be produced from the experiments. We also show the characterization results regarding the oxidation of boron nanoparticles at room temperature using X-ray Photoelectron Spectroscopy (XPS) and the combined Scanning Transmission Electron Microscope (STEM) and Electron Energy Loss Spectroscopy (EELS).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.131-134
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• 1998

This work was carried out to develop a pattern on the nanometer scale using plasma polymerization and plasma etching. This study is also aimed at developing a resist for the nano process and a vacuum lithography process. The thin films of plasma polymerization were fabricated by the plasma po1ymerization of inter-electrode capacitively coupled gas flow system. After delineating the pattern at accelerating voltage of 30[kV]. ranging the dose of 1∼500[${\mu}$C/$\textrm{cm}^2$], the pattern was developed with dry tree and formed by plasma etching. By analysing of the molecule structure using FT-lR, it was confirmed that the thin films of PPMST contains the functional radicals of the MST monomer. The thin films of PPMST had a highly crosslinked structure resulting in a higher molecule weight than the conventional resist.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.311.2-311.2
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• 2013

Transmutation characteristics of minor actinides in a transmutation reactor based on a Low Aspect Ratio (LAR) tokamak are investigated. One-dimensional neutron transport and burn-up calculation coupled with the tokamak systems analysis were performed to find the optimal system parameters. The dependence of the transmutation characteristics such as neutron multiplication factor, produced power and transmutation rate on an aspect ratio A in the range of 1.5 to 2.0 was investigated. By adding Pu239 in the transmutation blanket as a neutron multiplication material, it was shown that the one unit of the transmutation reactor based on the LAR tokamak producing fusion power of 150 MWth can destroy the minor actinides contained in the spent fuels produced from more than 19 units of l GWe PWRs with production of the power being in the range of 0.9 - 3.4 GWth.