Removal of residual VOCs in a collection chamber using decompression for analysis of large volatile sample |
Lee, In-Ho
(Department of Applied Chemistry, Daejeon University)
Byun, Chang Kyu (Department of Applied Chemistry, Daejeon University) Eum, Chul Hun (Geochemical Analysis Center, Korea Institute of Geoscience and Mineral Resources) Kim, Taewook (Department of Civil, Safety and Environmental Engineering, Hankyong National University) Lee, Sam-Keun (Department of Applied Chemistry, Daejeon University) |
1 | IEST-RP-CC031, Institute of Environmental Sciences and Technology, (2004). |
2 | EPA database, https://www.epa.gov/indoor-air-qualityiaq/technical-overview-volatile-organic-compounds#8. |
3 | W. Den, H. Bai and Y. Kang, J. Electrochem. Soc., 153(2), G149-G159 (2006). DOI |
4 | T. Hattori, AIP Conf. Proc., 550, 275-284 (2001). |
5 | J. H. Higley and A. J. Michael, Solid State Technology, 39(7), 211-213 (1996). DOI |
6 | SEMI Standard F21-95, Semiconductor Equipment and Materials International, Mountain View, CA (1996). |
7 | C. J. Salim, H. Liu and J. F. Kennedy, Carbohydr. Polym., 81(3), 640-644 (2010). DOI |
8 | T. Staaf and C. Ostman, J. Environ. Monit., 7, 883-887 (2005). DOI |
9 | A. Sjodin, H. Carlsson, K. Thuresson, S. Sjolin, A. Bergman and C. Ostman, Environ. Sci. Technol., 35, 448-454 (2001). DOI |
10 | M. Garcia, I. Rodriguez and R. Cela, Anal. Chim. Acta, 590, 17-25 (2007). DOI |
11 | O. B. Jonsson and U. L. Nilsson, Anal. Bioanal. Chem., 377, 182-188 (2003). DOI |
12 | H. Carlsson, U. Nilsson, G. Becker and C. Ostman, Environ. Sci. Technol., 31, 2931-2936 (1997). DOI |
13 | H. Carlsson, U. Nilsson and C. Ostman, Environ. Sci. Technol., 34, 3885-3889 (2000). DOI |
14 | M. Tamaoki, K. Nishiki, A. Shimazaki, Y. Sasaki and S. Yanagi, Proceedings of the Advanced Semiconductor Manufacturing Conference and Workshop, Cambridge, MA, 322-326 (1995). |
15 | C. K. Yang, H. S. Cha, S. J. Yang, J. H. Kang, J. H. Ahn and K. S. Nam, 27th International Symposium on Photomask Technology, Monterey, CA, 67301D (2007). |
16 | Y. Kang, W. Den, H. Bai and F.-H. Ko, J. Chromatogr. A, 1070, 137-145 (2005). DOI |
17 | C. J. Salim, H. Liu and J. F. Kennedy, Carbohydr. Polym., 81(3), 640-644 (2010). DOI |
18 | M. Tamaoki, K. Nishiki, A. Shimazaki, Y. Sasaki and S. Yanagi, The effect of airborne contaminants in the cleanroom for ULSI manufacturing process, in: Proceedings of the Advanced Semiconductor Manufacturing Conference and Workshop, 322-326 (1995). |
19 | A. Marklund, B. Andersson and P. Haglund, Chemosphere, 53(9), 1137-1146 (2003). DOI |
20 | A. Marklund, B. Andersson and P. Haglund, Chemosphere, 53(9), 1137-1146 (2003). DOI |
21 | N. B. Rana, P. Raghu, E. Sharo and F. Shadman, Appl. Surf. Sci., 205, 160-175 (2003). DOI |
22 | H. P. Witschi, Food Chem. Toxicol., 24(10-11), 1127-1130 (1986). DOI |
23 | G. Wang, Y. Li, N. Guo, C. Han, D. Liu, D. Li, M. Yang, Y. Peng, Y. Liu, K. Yu and C. Wang, J. Pharm. Biomed. Anal., 167(15) , 30-37 (2019). DOI |
24 | T. Otake, J. Yoshinaga and Y. Yanagishiwa, Environ. Sci. Technol., 35, 3099-3102 (2001). DOI |
25 | S. Tlili, N. Hayeck, S. Gligorovski and H. Wortham, Ind. Eng. Chem. Res., 51, 14665-14672 (2012). DOI |
26 | L. I. Nieto-Gligorovski, S. Gligorovski, S. Tlili, X. Fu, B. Temime-Roussel and H. Wortham, J. Electrochem. Soc., 156(4), H290-H297 (2009). |
27 | S. M. Thornburg, D. C. McIntyre, A. Y. Liang, S. F. Bender, and R. D. Lujan, Technology Transfer Report 9402208A-XFR, Sematech (1994). |
28 | P. Aragon, J. Atienza, and M. D. Climent, Crit. Rev. Anal. Chem., 30, 121-151 (2000). DOI |
29 | N. Hayeck, S. Gligorovski, I. Poulet and H. Wortham, Talanta, 122, 63-69 (2014). DOI |
30 | H. Toda, K. Sako, Y. Yagome and T. Nakamura, Anal. Chim. Acta, 519, 213-218 (2004). DOI |
31 | P. A. Clausen, V. Hansen, L. Gunnarsen, A. Afshari and P. Wolkoff, Environ. Sci. Technol., 38, 2531-2537 (2004). DOI |
32 | A. R. Mastrogiacomo, E. Pierini and L. Sampaolo, Chromatographia, 41, 599-604 (1995). DOI |
33 | S. Wi, S. J. Chang, S.-G. Jeong, J. Lee, T. Kim, K.-W. Park, D. R. Lee and S. Kim, Materials, 10, 853, 1-11; doi:10.3390/ma10080853 (2017). DOI |
34 | H. K. Yu, J. C. Park and E.-K. Rhee, J. Architect. Institute of Korea Planning and Design, 21(7), 141-148 (2005). |
35 | N. S. Chary, A. R. Fernandez-Alba, Trends Anal. Chem., 32, 60-75 (2012). DOI |
36 | H. Guo, F. Murray and S. Wilkinson, J. Air & Waste Manage. Assoc. 50, 199-206 (2010). |
37 | H. Choi, J. C. Choi, I.-A. Bae, S.-J. Park and M. K. Kim, J. Food. Hyg. Saf., 32(5), 424-433 (2017). DOI |
38 | A. M. Malkinson, Cancer Investig., 3(2), 209-211 (1985). DOI |
![]() |