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http://dx.doi.org/10.5757/JKVS.2010.19.4.256

Digital Linear Control System for a Magnetic Bearing System of a High Vacuum Turbomolecular Pump  

Ro, Seung-Kook (Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Kyung, Jin-Ho (Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Park, Jong-Kweon (Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Nam, Woo-Ho (Jeil Vacuum Corp.)
Koh, Deug-Yong (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials)
Publication Information
Journal of the Korean Vacuum Society / v.19, no.4, 2010 , pp. 256-264 More about this Journal
Abstract
In this paper, a digital controller of magnetic bearing system for a high vacuum turbomolecular pump (TMP) is designed and examined. For stabilizing and providing damping in magnetic bearing, the digital PID controller is applied for each 5 control axes, and the inter-axis cross feedback controller is also applied to suppress low frequency vibration caused by gyroscopic moment of the rotor at high speed of rotation. The fabricated rotor-shaft has its first flexible natural frequency lower than maximum speed, about 614Hz, so the two lead filters are applied to increase damping of flexible mode. Notch filters with rotating frequency were selected to reduce vibration of the pump housing caused by unbalance load. The implemented controllers are verified by examination of frequency response and rotating test up to 40,000 rpm, which is higher than critical speed of backward flexible mode.
Keywords
Turbomolecular pump; Magnetic bearing system; Digital control; Cross feedback; Flexible mode control;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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