Digital Linear Control System for a Magnetic Bearing System of a High Vacuum Turbomolecular Pump |
Ro, Seung-Kook
(Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials)
Kyung, Jin-Ho (Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) Park, Jong-Kweon (Nano-Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials) Nam, Woo-Ho (Jeil Vacuum Corp.) Koh, Deug-Yong (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) |
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