• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.16 no.9 s.100
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• pp.872-882
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• 2005

In this paper, we examined the operating principle of a passive tag antenna for RFID system in UHF band. Based on the study, we proposed a novel RFID tag antenna which adopts the inductively coupled feeding structure to match antenna impedance to a capacitively loaded commercial tag chip. The proposed tag antenna consists of microstrip lines on a thin PET substrate for low-cost fabrication. The detail structure of the tag antenna were optimized using a full electromagnetic wave simulator of IE3D in conjunction with a Pareto genetic algorithm and the size of the tag antenna can be reduced up to kr=0.27($2 cm^2$). We built some sample antennas and measured the antenna characteristics such as a return loss, an efficiency, and radiation patterns. The readable range of the tag antenna with a commercial RFID system showed about 1 to 3 m.

• ETRI Journal
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• v.42 no.5
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• pp.669-685
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• 2020

5G AgiLe and fLexible integration of SaTellite And cellulaR (5G-ALLSTAR) is a Korea-Europe (KR-EU) collaborative project for developing multi-connectivity (MC) technologies that integrate cellular and satellite networks to provide seamless, reliable, and ubiquitous broadband communication services and improve service continuity for 5G and beyond. The main scope of this project entails the prototype development of a millimeter-wave 5G New Radio (NR)-based cellular system, an investigation of the feasibility of an NR-based satellite system and its integration with cellular systems, and a study of spectrum sharing and interference management techniques for MC. This article reviews recent research activities and presents preliminary results and a plan for the proof of concept (PoC) of three representative use cases (UCs) and one joint KR-EU UC. The feasibility of each UC and superiority of the developed technologies will be validated with key performance indicators using corresponding PoC platforms. The final achievements of the project are expected to eventually contribute to the technical evolution of 5G, which will pave the road for next-generation communications.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.8
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• pp.134-139
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• 2000

In order to understand the removal mechanism and seek the optimal conditions. KrF excimer laser ablation of Cr films on glass substrates is investigated. The surface morphology of the laser-irradiated spot is examined by SEM. The measured single-shot ablation rate is found to be about two times the result of numerical analysis based on a surface vaporization model and heat conduction theory. Surface morphology examination indicates that the Cr film is removed by the sequence of melting-surface vaporization-,melt expulsion by plasma recoil and that the outmost ripple of the diffraction pattern gives a strong effect on the morphology of molten Cr during the melting and vaporization processes. To seek the optimal process parameters for micro patterning morphological investigation is carried out experimentally on samples having different chromium film thicknesses. Optimal processing conditions are determined to enhance the accuracy and quality of thin film removal for micro patterning.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2453-2458
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• 2007

The performance of polysilicon thin film transistor (p-Si TFT) has an important role in the operation of active matrix liquid crystal displays. To fabricate the p-Si TFTs that have uniform characteristics, understanding of the recrystallization mechanism of silicon is crucial. Especially, the analysis of the transient temperature variation and the liquid-solid interface motion is required to find the mechanism. The thermal conductivity is one of the most important parameters to understand the mechanism. In this work, a KrF eximer laser beam was irradiated to amorphous silicon thin films. We measured the transient reflectivity at the wavelength of 633 nm. We carried out the numerical simulation of one dimension conduction equation so that we determined the most well-fitted thermal conductivity by comparing the numerically obtained transient reflectivity with the experimentally measured one. The experimentally determined thermal conductivity of amorphous silicon thin films is 1.5 W/mK.

• Laser Solutions
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• v.6 no.1
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• pp.33-40
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• 2003

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2000.11a
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• pp.33.1-35
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• 2000

Na-K-Nb system showed a number of ferroelectric phases in bulk ceramic. [001]-axis oriented single-phase $Na_{0.5}/K_{0.5}NbO_3$(NKN) thin film have been grown on $LaA1O_3$substrates using KrF excimer laser. X-ray diffraction $\theta$-2$\theta$ scan, rocking curves, and $\varphi$ scan data evidence highly c-axis oriented along the [001] direction.

• Journal of Advanced Marine Engineering and Technology
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• v.26 no.3
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• pp.362-374
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• 2002

For the purpose of development of a GDI engine, the in-cylinder phenomena, such as the spray behaviors, fuel distributions, unburned fuel, and flame characteristics were investigated in a single cylinder GDI engine. The GDI engine was equipped with a swirl type electronic injector and SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used far the measurements of fuel distributions. The effects of the injector specifications, such as the spray cone angle and the offset angle on the in-cylinder phenomena were investigated. As a result, it was found that the injected fuel collided with the bottom of the bowl and moved upward along the exhaust side wall of piston bowl. This fuel vapor played an important role in the instance of spark ignition. The unburned fuel and flame characteristics were greatly influenced by the injector specifications.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.81-85
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• 2007

반도체 공정에서 식각 공정을 위한 패턴 형성 시, 현상을 위해 포토레지스트를 도포한다. 이 포토레지스트는 일정한 두께로 도포 되어야 하기 때문에 고도의 정밀성이 요구되는 공정이며, 공정 불량이 빈번하게 발생한다. 이러한 공정 불량 발생 시 현재 양산에서는 매엽식 장비로 애싱 전 처리 한 후, 약액 처리를 위해 낱장의 웨이퍼를 일정량 모아서 배치식 장비로 처리한다. 이렇게 되면 공정 불량 발생시, 약액의 소모를 줄이기 위해서는 일정량 모아질 때까지 대기하여 처리하여 시간 소모가 커지며, 시간 소모를 줄이기 위해서는 낱장으로 처리하여야 하기 때문에 약액 손실이 커져 비경제적일 수 밖에 없다. 따라서 본 연구에서는 이러한 문제점을 해결하기 위해, 매엽식 장비로 무기 용제를 이용하여 효율적으로 포토레지스트를 제거하는 방법에 대해서 평가를 실시하였다. 평가 결과 krF 포토 레지스트 웨이퍼에 대해서 완전 박리하는 결과를 얻었으며, 160nm 기준 파티클 50개 미만의 결과를 얻었다.

• Journal of Advanced Marine Engineering and Technology
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• v.27 no.2
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• pp.260-271
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• 2003

For the Purpose of understanding the mixing phenomena of a GDI(Gasoline Direct Injection) engine, the spray behaviors and fuel distributions were investigated in a single cylinder transparent GDI engine. The experimental engine is a swirl type GDI engine with a SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used for the measurement of the fuel distributions. The effects of SCV opening angles and the injector specifications on the fuel distribution characteristics were investigated. As a result, it was found that the SCV opening angle had a great effect on the fuel distributions in the late stage of compression process by changing the flow fields in the combustion chamber.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1344-1348
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• 2003

It is generally known to be difficult to etch a surface of a transparent material such as fused silica by conventional laser ablation in which the surface is simply irradiated with a laser beam. A lot of studies have been done to provide a method capable of efficiently etching transparent materials without defects such as cracks. One of the promising methods or the micro-machining of optically transparent materials is laser induced etching. In this study, micro-drilling of fused silica by laser induced wet etching was conducted. KrF excimer and YAG laser were used as light sources. Acetone solution pyrene and ethanol solution of rhodamine were used as etchant.