• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.730-733
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• 1996

This paper presents the kinematic and dynamic analysis of parallel manipulators with redundant limbs, obtained by putting additional limbs to an existing parallel manipulator. We develop the kinematic and dynamic models of a parallel, manipulator with redundant limbs. The redundancy in parallelism due to the increased number of limbs and the redundancy in actuation due to the increased number of active joints are considered in the modeling. Based on the derived models, we define the kinematic and dynamic manipulabilities of a parallel manipulator with redundant limbs. The effect of the redundant limbs on the performance of parallel manipulators is analyzed in terms of kinematic and dynamic manipulabilities.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.39-39
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• 2003

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.29-38
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• 2003

As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.

• Transactions of the Korean Society of Mechanical Engineers
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• v.19 no.4
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• pp.1023-1032
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• 1995

The multiple cooperating robot system plays an important role in the research of modern manufacturing system as the emphasis of production automation is more on the side of flexibility than before. While the kinematic and dynamic analysis of a single robot is performed as an open-loop chain, the dynamic formulation of robot in a multiple cooperating robot system differs from that of a single robot when the multiple cooperating robots form a closed kinematic chain holding an object simultaneously. The object may be any type from a rigid body to a multi-joint linkage. The mobility of the system depends on the kinematic configuration of the closed kinematic chain formed by robots and object, which also decides the number of independent input parameters. Since the mobility is not the same as the number of robot joints, proper constraint condition is sought. The constraints may be such that : the number of active robot joints is kept the same as mobility, all robot joints are active and have interrelations between each joint forces/torques, two robots have master-slave relation, or so on. The dynamic formulation of system is obtained. The formulation is based on recursive dual-number screw-calculus Newton-Eulerian approach which has been used for single robot analysis. This new scheme is recursive and compact symbolically and may facilitate the consideration of the object in real time.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.371-374
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• 1996

This paper presents the kinematic and dynamic analysis of parallel manipulators with redundant joints, obtained by putting additional active joints to an existing parallel manipulator. We develop the kinematic and dynamic models of a parallel manipulator with redundant joints. The redundancy in serial chain, due to the increased number of joints per limb, is considered in the modeling. Based oh the derived models, we define the kinematic and dynamic manipulabilities of a parallel manipulator with redundant joints. The effect of the redundant joints on the performance of parallel manipulators is analyzed in terms of kinematic and dynamic manipulabilities.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.535-538
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• 1996

This paper presents the kinematic and dynamic analysis of parallel manipulators with actuation redundancy, obtained by replacing the passive joints of an existing parallel manipulator with the active ones. We develop the kinematic and dynamic models of a parallel manipulator with actuation redundancy. The multiplicity in selecting the controllable active joints among the increased number of active joints is considered in the modeling. Based on the derived models, we define the kinematic and dynamic manipulabilities of a parallel manipulator with actuation redundancy. The effect of the actuation, redundancy on the performance of parallel manipulators is analyzed in terms of kinematic and dynamic manipulabilities.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.4 s.97
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• pp.205-212
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• 1999

A three dimensional binary parallel robot manipulator uses actuators which have only two stable states and its structure is variable geometry truss. As a result, it has a finite number of states and fault tolerant mechanism because of kinematic redundancy. This kind of robot manipulator has some advantages compared to a traditional one. Feedback control is not required, task repeatability can be very high, and finite state actuators are generally inexpensive. Because the number of states of a binary robot manipulator grows exponentially with the number of actuators it is very difficult to solve and inverse kinematic problem. The goal of this paper is to develop an efficient algorithm to solve an inverse kinematic problem of three dimensional binary parallel robot manipulator using a backbone curve when the number of actuators are too much. We first derive the coordinate transformations associated with a three degree of freedom in-parallel actuated robot manipulator. The backbone curve is generated optimally by considering the maximum roll and pitch angles of the robot manipulator configuration and length of link. Then, the robot manipulator is fitted along the backbone curve with some criterion.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.174-179
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• 1999

A binary parallel robot manipulator uses actuators which have only two stable states and is structure is variable geometry truss. As a result, it has a finite number of states and fault tolerant mechanism because of kinematic redundancy. This kind of robot manipulator has the following advantages compared to a traditional one. Feedback control is not required, task repeatability can be very high, and finite state actuators are generally inexpensive. Because the number of states of a binary robot manipulator grows exponentially with the number of actuators, it is very difficult to solve an inverse kinematic problem. The goal of this paper is to develop an efficient algorithm to solve an inverse kinematic problem when the number of actuators are too much or the target position is located outside of workspace. The backbone curve is generated optimally by considering the curvature of the robot manipulator configuration and length of link. Then, the robot manipulator is fitted along the backbone curve with some criteria.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.3
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• pp.565-572
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• 1994

A method for the classification of kinematic chains according to the similarity in their structures is proposed. Classifcation code is defined from the contracted graph of the kinematic chain. This method of classifying kinematic chains can be effectively used for the systematic enumeration of structurally distinct kinematic chains given the number of links and degrees of freedom of the kinematic chains. Two separate steps for the enumeration are developed in the study. The first step is to generated all the possible classification codes and the next step is to generate individual kinematic chains belonging to each classification code generated. Using this two step procedure, kinematic chains up to 12 links are successfully enumerated in the present study. It is concluded that the two step method can be efficiently used for the type synthesis of mechanisms.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.396-399
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• 1995

This paper presents a new formulation of the kinematics of closed-chain mechanisms and its applications to obtaining the kinematic solutions and analyzing the singularities. Closed-chain mechanisms under consideration may have the redundancy in the number of joints. A closed-chain mechanism can be treated as the parallel connection of two open-chains with respect to a point of interest. The kinematics of a closed-chain mechanism is then obtained by imposing the kinematic constraints of the closed-chain on the kinematics of the two open-chains. First, we formulate the kinematics of a closed-chain mechanism using the kinematic constraint between the controllable active joints and the rest of joints, instead of the kinematic constraint between the two open-chains. The kinematic formulation presented in this paper is valid for closed-chain mechanisms with and without the redundancy. Next, based on the derived kinematics of a closed-chain mechanism, we provide the kinematic solutions which are more physically meaningful and less sensitive to numerical instability, and also suggest an effective way to analyze the singularities. Finally, the computational cost associated with the kinematic formulation is analyzed.