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Velocity and Friction Force Distribution in Rotary CMP Equipment  

김형재 (부산대학교 정밀기계공학과)
정해도 (부산대학교 정밀정형 및 금형가공 연구소)
이응숙 (한국기계연구원)
신영재 (한국기계연구원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.5, 2003 , pp. 29-38 More about this Journal
Abstract
As the design rules in semiconductor manufacturing process become more and more stringent, the higher degree of planarization of device surface is required for a following lithography process. Also, it is great challenge for chemical mechanical polishing to achieve global planarization of 12” wafer or beyond. To meet such requirements, it is essential to understand the CMP equipment and process itself. In this paper, authors suggest the velocity distribution on the wafer, direction of friction force and the uniformity of velocity distribution of conventional rotary CMP equipment in an analytical method for an intuitive understanding of variation of kinematic variables. To this end, a novel dimensionless variable defined as “kinematic number” is derived. Also, it is shown that the kinematic number could consistently express the velocity distribution and other kinematic characteristics of rotary CMP equipment.
Keywords
Chemical Mechanical Polishing (CMP); Kinematic Analysis; Velocity distribution; Direction of friction force; Uniformity of velocity; Kinematic number;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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