• Title/Summary/Keyword: Kim Taek-yeong

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Effect of Deposition and Heat Treatment Conditions on the Electrical and Optical Properties of AZO/Cu/AZO Thin Film (증착 및 열처리 조건에 따른 AZO/Cu/AZO 박막의 전기적·광학적 특성 평가)

  • Chan-Young Kim;Ha-Eun Lim;Gaeun Yang;Sukjeang Kwon;Chan-Hee Kang;Sang-Chul Lim;Taek Yeong Lee
    • Korean Journal of Materials Research
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    • v.33 no.4
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    • pp.142-150
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    • 2023
  • AZO/Cu/AZO thin films were deposited on glass by RF magnetron sputtering. The specimens showed the preferred orientation of (0002) AZO and (111) Cu. The Cu crystal sizes increased from about 3.7 nm to about 8.5 nm with increasing Cu thickness, and from about 6.3 nm to about 9.5 nm with increasing heat treatment temperatures. The sizes of AZO crystals were almost independent of the Cu thickness, and increased slightly with heat treatment temperature. The residual stress of AZO after heat treatment also increased compressively from -4.6 GPa to -5.6 GPa with increasing heat treatment temperature. The increase in crystal size resulted from grain growth, and the increase in stress resulted from the decrease in defects that accompanied grain growth, and the thermal stress during cooling from heat treatment temperature to room temperature. From the PL spectra, the decrease in defects during heat treatment resulted in the increased intensity. The electrical resistivities of the 4 nm Cu film were 5.9×10-4 Ω·cm and about 1.0×10-4 Ω·cm for thicker Cu films. The resistivity decreased as the temperature of heat treatment increased. As the Cu thickness increased, an increase in carrier concentration resulted, as the fraction of AZO/Cu/AZO metal film increased. And the increase in carrier concentration with increasing heat treatment temperature might result from the diffusion of Cu ions into AZO. Transmittance decreased with increasing Cu thicknesses, and reached a maximum near the 500 nm wavelength after being heat treated at 200 ℃.

A New Black Seed Coat Soybean Cultivar, 'Daeheug' with Lodging Tolerance, and Large Seed Size (검정콩 대립 내도복 신품종 '대흑')

  • Han, Won-Young;Baek, In-Youl;Ko, Jong-Min;Kim, Hyun-Tae;Oh, Ki-Won;Shin, Sang-Ouk;Park, Keum-Yong;Ha, Tae-Jung;Shin, Doo-Chull;Chung, Myung-Gun;Kang, Sung-Taek;Yun, Hong-Tae;Oh, Young-Jin;Kim, Je-Kyu;Kim, Ho-Yeong;Choi, Jae-Keun;Lee, Seong-Su;Son, Chang-Ki;Kim, Yong-Duk
    • Korean Journal of Breeding Science
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    • v.42 no.3
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    • pp.267-271
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    • 2010
  • A new black seed coat soybean cultivar, 'Daeheug', was developed at the National Institute of Crop Science (NICS) in 2007. The breeding goal for black seed coat soybean is to develop the cultivar with large seed size, high yield, lodging tolerance, and resistance to disease such as soybean mosaic virus (SMV), and bacterial pustule. 'Daeheug' was selected from the cross between 'Daehwang' which had yellow seed coat, large seed size, and late maturity, and 'Milyang 79' which was lodging tolerant, and SMV resistant with medium seed size, black seed coat, and yellow cotyledon. The preliminary, advanced and regional yield trials for evaluation and selection of this cultivar were carried out from 2003 to 2007. It has determinate growth habit, purple flower, brown pubescence, brown pod color, black seed coat, yellow cotyledon, spherical flattened seed shape, oval leaf shape and large seed size (34.3 g/100 seeds). In maturity, 'Daeheug' was 2 days later than the check cultivar 'Ilpumgeomjeongkong'. In the seed quality such as isoflavone contents ($635{\mu}g/g$), and anthocyanin contents ($11.2m{\ell}/g$ of seed coat), 'Daeheug' was better than the check cultivar. It has good adaptability for cooking with rice in ratio of water absorption and seed hardness. Specially, it has good processability for soybean tea with 2.13 absorbance at 530 nm, scavenge activity of DPPH radical was high, and contents of total phenolics was $1,263{\mu}g/m{\ell}$. The average yield of 'Daeheug' was 2.26 ton per hectare in the regional yield trials (RYT) carried out in six locations of Korea from 2005 to 2007.

Efficient Red-Color Emission of InGaN/GaN Double Hetero-Structure Formed on Nano-Pyramid Structure

  • Go, Yeong-Ho;Kim, Je-Hyeong;Gong, Su-Hyeon;Kim, Ju-Seong;Kim, Taek;Jo, Yong-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.174-175
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    • 2012
  • (In, Ga) N-based III-nitride semiconductor materials have been viewed as the most promising materials for the applications of blue and green light emitting devices such as light-emitting diodes (LEDs) and laser diodes. Although the InGaN alloy can have wide range of visible wavelength by changing the In composition, it is very hard to grow high quality epilayers of In-rich InGaN because of the thermal instability as well as the large lattice and thermal mismatches. In order to avoid phase separation of InGaN, various kinds of structures of InGaN have been studied. If high-quality In-rich InGaN/GaN multiple quantum well (MQW) structures are available, it is expected to achieve highly efficient phosphor-free white LEDs. In this study, we proposed a novel InGaN double hetero-structure grown on GaN nano-pyramids to generate broad-band red-color emission with high quantum efficiency. In this work, we systematically studied the optical properties of the InGaN pyramid structures. The nano-sized hexagonal pyramid structures were grown on the n-type GaN template by metalorganic chemical vapor deposition. SiNx mask was formed on the n-type GaN template with uniformly patterned circle pattern by laser holography. GaN pyramid structures were selectively grown on the opening area of mask by lateral over-growth followed by growth of InGaN/GaN double hetero-structure. The bird's eye-view scanning electron microscope (SEM) image shows that uniform hexagonal pyramid structures are well arranged. We showed that the pyramid structures have high crystal quality and the thickness of InGaN is varied along the height of pyramids via transmission electron microscope. Because the InGaN/GaN double hetero-structure was grown on the nano-pyramid GaN and on the planar GaN, simultaneously, we investigated the comparative study of the optical properties. Photoluminescence (PL) spectra of nano-pyramid sample and planar sample measured at 10 K. Although the growth condition were exactly the same for two samples, the nano-pyramid sample have much lower energy emission centered at 615 nm, compared to 438 nm for planar sample. Moreover, nano-pyramid sample shows broad-band spectrum, which is originate from structural properties of nano-pyramid structure. To study thermal activation energy and potential fluctuation, we measured PL with changing temperature from 10 K to 300 K. We also measured PL with changing the excitation power from 48 ${\mu}W$ to 48 mW. We can discriminate the origin of the broad-band spectra from the defect-related yellow luminescence of GaN by carrying out PL excitation experiments. The nano-pyramid structure provided highly efficient broad-band red-color emission for the future applications of phosphor-free white LEDs.

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A Study of the Relationship of Nurses' Personality Type and Job Satisfaction Level, according to the Career (근무경력별 간호사의 성격유형과 직무만족도와의 관련성(MBTI이용))

  • Park Young Sook;Park Kyung Min;Park Jeong Sook;Koh Hyo Jung;Kwon Young Sook;Kim Myung Ae;Kim Chung Nam;Park Cheong Ja;Shin Yeong Hee;Lee Kyung Hee;Lee Byung Sook
    • Journal of Korean Public Health Nursing
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    • v.15 no.2
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    • pp.301-313
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    • 2001
  • This study was to explore the relationship between nurses' personality type and their job satisfaction level. The subjects of the study were the 364 nurses who were serving at the general surgical department, psychiatric department, pediatric department and emergency room. The hospitals for which they were working were four university hospitals in Daegu and Busan, and six other university hospitals in Seoul were selected as sample hospitals. For data collection, questionnaires were self-reported to the subjects, under their agreement, from May to June, 2000. The following two instruments were used in the study: One was MBTI Test whose Korean version designed and verified to reliability and validity by Kim Jung Taek and Shim Hae Sook(1990): the other was the Nursing Job Satisfaction Instrument, 'The Index of Work Satisfaction' developed by Slavitt, et al.., (1978). The data were analyzed by frequency, t-test, one-way variance analysis, scheffe's post hoc contrast, and Pearson correlation coefficient with SPSS Win 10.0 program. The results this study were as follows ; 1. As a result of testing nurse's personality type by function at each career, it's found that the most personality type was expressed by the ST-type$(37.3\%)$ at 1-5 years, the SF-type$(29.4\%)$ at 6-10 years, the ST-type$(43.3\%)$ at more than 11 years. 2. As a result of testing the disparity in job satisfaction according to career, it appeared that the 6-10 years group showed higher job satisfaction, followed by the 6-10 years$(119.6\%),\;1-5 years(118.6\%)\;and\;more\;than\; 11 years(117.7\%)$ groups. 3. As a result of testing job satisfaction level according to nurse's personality type by function at each career, it's found that the most job satisfaction was expressed by the SF-type(F=8.50, p=0.00l) at 1-5 years. the ST-type(F=30.61, p=0.001) at 6-10 years. the SF-type(F=4.98, p=0.003) at more than 11 years groups. 4. As a result of testing a significant correlation between nurse's personality type by function and job satisfaction level. the SF(r=0.279, p=0.001) and ST(r=0.222, p=0.001) types showed significant positive correlation. and the NF(r=-0.201, p=0.001) and NT(r=-0.402, p=0.001) types revealed significant negative correlation. The nursing management is likely to be done more effectively, if managers in charge of nursing administration carefully reflect nurses' personal opinions in posting and personnel management, keeping in mind that there is a specific personality type that serves to raise job satisfaction at a specific career.

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THE EFFECT OF RISPERIDONE ON SALIVARY GLAND CELLS (리스페리돈이 타액선 세포에 미치는 영향)

  • Lee, Yeon-Joo;Kim, Yeong-Jae;Kim, Jung-Wook;Jang, Ki-Taek;Kim, Chong-Chul;Hahn, Se-Hyun;Lee, Sang-Hoon
    • Journal of the korean academy of Pediatric Dentistry
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    • v.35 no.1
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    • pp.47-56
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    • 2008
  • Risperidone is a widely prescribed atypical antipsychotic agent. Approved by the FDA as the first drug to treat irritability associated with autism in children, it is also used to treat tic disorder and Tourette's syndrome. Its adverse reactions related to dentistry include dry mouth, the mechanism of which is yet to be identified. The aim of this study is to identify, at the cellular level, how and to what extent risperidone affects intracellular free calcium concentration ($[Ca^{2+}]_i$), an primary intracellular factor in the regulation of fluid secretion in salivary gland cells. The human salivary gland cell line (HSG) was grown in MEM supplemented with 10% BCS. In order to measure $[Ca^{2+}]_i$, Fura-2/AM was loaded in the HSG, and fluorescence at 340 nm/380 nm excitation was measured in the 500 nm emission ratio. After every experiment, a calibration experiment was conducted in order to readjust the ratio to the actual $[Ca^{2+}]_i$. Changes in $[Ca^{2+}]_i$ were measured in the presence of carbachol, ATP and histamine. The researcher then explored how the pretreatment of risperidone affected such changes. Findings of this study include: 1. In HSG, $[Ca^{2+}]_i$ increased due to the addition of carbachol, ATP and histamine. The presence of risperidone inhibited the action of histamine on this process, while making little effect on that of carbachol and ATP. 2. A quantification of $[Ca^{2+}]_i$ in relation to histamine of different concentrations indicates that the effect of histamine was concentration dependent with an $EC_{50}$ of $3.3{\pm}0.5\;{\mu}M$. 3. The inhibitory effect of risperidone on histamine-induced $[Ca^{2+}]_i$ was concentration-dependent with an $IC_{50}$ of $104.4{\pm}14\;nM$. 4. Risperidone inhibits histamine-induced Ca2+ release from endoplasmic reticulum and influx of extracellular $Ca^{2+}$ in HSG cells(p<0.05).

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A Practical Application and Development of Carbon Emission Factors for 4 Major Species of Warm Temperate Forest in Korea (난대지역 주요 4개 수종의 탄소배출계수 개발 및 적용)

  • Son, Yeong Mo;Kim, Rae Hyun;Kang, Jin Taek;Lee, Kwang Su;Kim, So Won
    • Journal of Korean Society of Forest Science
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    • v.103 no.4
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    • pp.593-598
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    • 2014
  • In this study, we developed the carbon emission factors for 4 major species of warm-temperate region in Korea, and tried to provide their carbon emissions and removals estimates using these carbon emission factors. We selected Castanopsis cuspidata, Camellia japonica, Quercus acuta and Quercus glauca as target species and derived their carbon emission factors. The basic wood density that serve as one of the carbon emission factors were 0.583 for Castanopsis cuspidata, 0.657 for Camellia japonica, 0.833 for Quercus acuta and 0.763 for Quercus glauca and their uncertainties ranged from 5.3 to 17.9%. Biomass expansion factors were calculated as well: 1.386 for Castanopsis cuspidata, 2.621 for Camellia japonica, 1.701 for Quercus acuta and 2.123 for Quercus glauca and associated uncertainties varied from 14.7 to 30.5%. Lastly root-shoot ratios for each species were also determined: 0.454 for Castanopsis cuspidata, 0.356 for Camellia japonica, 0.191 for Quercus acuta and 0.299 for Quercus glauca with the uncertainties lying within a range from 19.8 to 35.7%. These three carbon emission factors including basic wood density had the uncertainties of less than 40% recommended by FAO. Therefore the application of country-specific emission factors seemed to provide quite accurate estimates of carbon emissions and removals. The estimation of the carbon stored in the 4 species were also conducted which amounted to $186.10tCO_2/ha$ for Castanopsis cuspidata, $280.63tCO_2/ha$ for Camellia japonica, $344.04tCO_2/ha$ for Quercus acuta and $278.91tCO_2/ha$ for Quercus glauca and their annual carbon removals were $6.65tCO_2/ha/yr$, $6.25tCO_2/ha/yr$, $11.70tCO_2/ha/yr$ and $12.29tCO_2/ha/yr$, respectively. This systematic assessment of forest resources can be a reliable source of information for managing evergreen broadleaved forest in warm temperate regions and thus serve as useful data for effective decision-making to address vegetation zone shifts due to climate change.

DNA damages with Fpg/Endo Ⅲ FLARE Assay in cynomolgus monkeys exposed to stainless steel welding fume (용접흄 흡입노출 영장류에서 Fpg/Endo Ⅲ FLARE Assay를 이용한 DNA 손상 및 회복)

  • Rim, Kyung Taek;Kim, Soo Jin;Chung, Yong Hyun;Kim, Hyeon Yeong;Maeng, Seung Hee;Yu, Il Je
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.17 no.4
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    • pp.272-281
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    • 2007
  • 선박제조업을 비롯한 운송업 및 건축업 등의 다양한 분야에서 용접기술이 이용되어 옴에 따라 용접근로자들에 대한 산업보건학적 관심이 높아지고 있다. 노출정도가 다양하기는 하지만 용접흄은 6가 크롬을 비롯한 금속화합물과 유해가스, 화학물질 등을 복합적으로 포함하고 있는 스테인레스 스틸 용접흄에 대한 유전독성영향을 평가하기 위하여 흡입챔버를 이용, 실험동물인 영장류에 스테인레스 스틸 용접흄을 노출시키고 혈액 내 lymphocytes에 생성된 용접흄 노출농도 및 시간별 DNA 손상정도 및 그 회복효소를 측정함으로써, 유해성이 완전하게 확인되지 않은 용접흄에 노출되어 나타날 수 있는 암을 비롯한 심각한 건강영향을 예방하기 위한 각 지표들을 찾아 그 유용성을 비교하고자 하였다. 영장류를 노출시키기 위해 robotic arm을 장치한 영장류 흡입노출 시스템을 개발하였으며, 이 노출 시스템을 이용하여 수컷 영장류 6마리에 대해 용접흄 노출시험을 실시하였는데 실험군은 대조군 2, 저농도 ($31mg/m^3$) 노출군 2, 고농도 ($63mg/m^3$) 노출군 2마리로 구성하였고, 1일 2시간씩 일주일에 5일 동안 용접흄에 노출시켰다. 노출 농도는 지속적으로 모니터링 하였고, 노출과정 중에 영장류의 혈액을 채취하여 lymphocytes를 분리, 단세포 DNA 손상을 선별하기 위해 DNA 손상회복 효소인 E. coli formamidopyrimidine-DNA glycosylase (Fpg)와 endonuclease Ⅲ (Thymine Glycol-DNA glycosylase) 투여와 Comet asaay (single cell gel electrophoresis, 단세포겔전기영동기법)를 결합시켜 이용하는 Fpg/Endo III FLARE 분석법을 사용하였다. Fpg enzyme에 의한 olive tail moment값의 변화는 16주 노출군부터 노출부검(34주)군 까지 노출농도가 높아짐에 따른 olive tail moment 기하평균 값의 양 반응관계를 보기는 어렵지만, 고농도군의 경우 27주 노출군에서 가장 높은 olive tail moment 값을 보이고 이후 차츰 감소하였다. 한편 16주에서 22주까지의 노출기간에서는 대조군에 비해 노출군에서 DNA손상정도(olive tail moment값)는 모두 유의하게 높았으나, 6, 12, 18, 25, 31, 33, 35주간 노출하였을 때는 다른 결과를 보였다. 각 실험군의 Fpg enzyme에 의한 tail length값의 분포를 살펴볼 때, 저농도군 및 고농도군에서 27주간 노출하였을 때 가장 높은 tail length 값을 보이고 이후 차츰 감소하는 경향을 보였다. 또한 16, 22주간 노출하였을 때 대조군에 비해 노출군에서 tail length 값이 유의하게 높았으나, 20주간에서만 양 반응관계가 관찰되었고, 다른 주간에서는 양 반응 및 기간 반응관계를 나타내지는 않았다. Endo III enzyme에 의한 olive tail moment값의 변화는 기간별 노출군에서 대조군에 비해 높은 DNA손상정도(olive tail moment값)를 나타내는 결과들이 있었지만, 10, 12, 16, 22, 25, 31주간 노출하였을 때 등 상당수 노출기간에서 반응관계를 나타내지는 않았다. 각 실험군의 Endo III enzyme에 의한 tail length값의 분포를 살펴볼 때, 18, 20, 27, 33주간 노출하였을 때 대조군에 비해 노출군에서 tail length 값이 조금 높았지만, 양 반응 및 기간 반응관계를 보이지 않았고 수치의 크기가 불규칙하게 변화하였다. 즉, DNA에 있어 산화된 pyrimidine을 형성하여 손상된 부위의 염기를 제거함으로써 AP site (abasic site)를 만들고 이들이 Comet assay를 통해 break로 전환된 것을 포함한 DNA손상을 측정하기 위하여 endonuclease III (Endo III)를 첨가시킨 Endo III FLARE 분석법을 실시한 결과, 본 연구에서 나타난 결과는 용접흄 노출 영장류에서 Olive tail moment 및 tail length 공히 노출량 및 노출기간 반응관계를 볼 수 없었다. Endo III FLARE 분석법을 통한 산화적 DNA 손상지표는 영장류에 적용하기에는 적응반응현상으로 대조군과 유의한 차이도 관찰할 수 없었고 더욱이 역으로 대조군에서의 자연발생적 수치가 더 높아질 수 있어 용접흄 노출 영장류의 모니터링 지표로 사용하기에는 제한점이 있었다.

A Comparison between Minimally Invasive Percutaneous Plate Osteosynthesis and Plate Fixation in the Treatment of Clavicle Midshaft Fracture (쇄골 간부 골절의 최소 침습적 경피적 금속판 고정술과 관혈적 수술 비교)

  • Yoo, Seong-Ho;Kang, Suk-Woong;Kim, Bu-Hwan;Song, Moo-Ho;Kim, Yeong-Joon;Park, Gyu-Taek;Kwack, Chang-Hun
    • Journal of the Korean Orthopaedic Association
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    • v.52 no.1
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    • pp.1-6
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    • 2017
  • Purpose: To retrospectively compare minimally invasive percutaneous plate osteosynthesis (MIPPO) with open plate fixation for the treatment of clavicle midshaft fracture. Materials and Methods: Between November 2011 to May 2014, 40 cases that were followed for more than 1 year-among all cases of MIPPO and open plate fixation-were analyzed. The study population was divided into two groups: group A included 20 cases of MIPPO and group B included 20 open plate fixation cases. The comparative analysis between the two groups was based on the operative time, bone union, functional evaluation (American Shoulder and Elbow Society score), incision length, pain relief (visual analogue scale, VAS), and complication. Results: The bone union was successful for all the cases, and the functional evaluation scores of the shoulder joint were satisfactory for both groups (p>0.05). The operative time was 47.5 minutes and 58.7 minutes for group A and B, respectively (p<0.05). The incision length for group A was 6.2 cm and that for group B was 10.7 cm with statistical significance (p<0.05). Pain relief (VAS) after surgery for group A showed a quick recuperation in the early stages. For complications, there were 2 cases of dysesthesia and 1 case of malunion due to metal fixation failure in group A. There were 6 cases of dysesthesia and 2 cases of cosmetic problem due to hypertrophic scar in group B. Conclusion: Surgical results of clavicle shaft fracture were satisfactory for both groups, but group A had advantages of shorter operative time, minimal incision length, and better pain relief in the early stages compared with group B. However, we need further evaluations with long-term follow-up results and complications, such as malunion and exposure on radiation.

Deterioration Assessment for Conservation Sciences of the Five Storied Stone Pagoda in the Jeongrimsaji Temple Site, Buyeo, Korea (부여 정림사지 오층석탑의 보존과학적 풍화훼손도 평가)

  • Kim, Yeong-Taek;Lee, Chan-Hee;Lee, Myeong-Seong
    • Economic and Environmental Geology
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    • v.38 no.6 s.175
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    • pp.675-687
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    • 2005
  • The rocks of the five storied stone pagoda in the Jeongrimsaji temple site are 149 materials in total with porphyritic biotite granodiorite. They include pegmatite veinlet, basic xenolith and evenly developed plagioclase porphyry. This stone pagoda has comparably small fracture and cracks which are farmed in the times of rock properties, but surface exfoliation and granular decomposition are in process actively since the rocks are generally weakened from the influence of air contaminants and acid rain. Structural instability of constituting rocks in the 4th roof materials are observed to occur from distortion and tilt. Such instability is judged to threat stability of the upper part of the stone pagoda. Also, chemical weathering is operating even more as the contaminants, ferro-manganese hydroxides eluted from water-rock interaction on the rock surface. Most of the rock surface is covered with yellowish brown, dark black and light gray contaminants, and especially occur in the lower part of the roof rocks on each floor. The roof underpinning rocks are severe in surface pigmentation from manganese hydroxides and light gray contaminants. The surface of rocks lives bacteria. algae, lichen, or moss and diverse productions in colors of light gray, dark Bray and dark green. Grayish white crustose lichen grows thick on the surface with darkly discolored by fungi and algae in the first stage on basement rocks, and weeds grows wild on the upper part of each roof rocks. This stone pagoda must closely observe the movements of the upper part rock materials through minute safety diagnosis and long term monitoring for structural stability. Especially since the surface discoloration of rocks and pigmentation of secondary contaminants are severe, establishment of general restoration and scientific conservation treatment are necessary through more detailed study for this stone pagoda.

Metal 첨가물질에 따른 비정질 IGZO 투명전극 특성 연구

  • Sin, Han-Jae;Hwang, Do-Yeon;Lee, Jeong-Hwan;Lee, Dong-Ik;Park, Seong-Eun;Park, Jae-Seong;Kim, Seong-Jin;Lee, Yeong-Ju;Seo, Chang-Taek
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.368-370
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    • 2013
  • 투명 전극은 전기전도도를 갖는 동시에 가시광선을 투과하는 소재를 말하며, 구체적으로는 빛의 파장이 400~700 nm 영역대의 가시광선을 80% 이상 투과하며 전기전도도가 비저항으로 $10^{-3}{\Omega}cm$이하이거나 면저항이 $10^3{\Omega}$/${\Box}$소재를 의미한다. 투명 전극은 전기전도도에 따라 사용되는 용도가 다양하다. LCD, PDP, OLED 와 같은 평판디스플레이 및 3D 디스플레이의 투명전극으로 사용되는 핵심재료일 뿐만 아니라 터치스크린, 투명필름, 대전방지막, 열반사막, EMI 방지막, 태양전지 분야에 광범위하게 이용되고 있다. 일반적으로, 투명전극 박막에 가장 많이 사용되고 있는 소재는 ITO (indium tin oxide)이나, 주성분인 In의 사용량 증가로 상용 ITO 타겟 가격이 급등하고 있음으며, 고가의 ITO 타겟을 대체하기 위한 저가의 투명전극 소재 개발이 절대적으로 요구되며, 신규 소재 개발을 통한 기술력 우위 선점이 필수적으로 요구되는 상황이다. 본 연구에서는 기존에 디스플레이 분야에서 널리 활용되는 고가의 ITO를 대체하기 위한 다성분 금속산화물 투명전극 스퍼터링 타겟 제조기술을 개발하기 위한 연구로서, Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재를 조성설계, 고밀도 균질 타겟 제조 및 투명전극 박막을 형성하는 연구를 실시하였다. 고체산화물 산화인듐(In2O3)분말, 산화갈륨(Ga2O3) 분말그리고 산화아연(ZnO)분말과 Metal을 몰비로 칭량한 후 분말을 폴리에틸렌제 포트에 넣고 에탄올을 충분히 채운 후 지르코니아(ZrO2) 볼(ball)을 이용하여 24 h 동안 볼 밀링(ball milling) 방법으로 혼합한 뒤, $120^{\circ}C$의 플레이트위에서 마그네틱 바로 stirring하면서 건조하였다. 이 분말을 건조기에서 완전히 건조한 후 알루미나 유발을 이용해서 pulverizing한 후 sieving기를 이용하여 분말의 조립화를 하였다. 이 분말을 금형에 넣고 300 kg/$cm^2$의 압력으로 press하여 성형한 뒤 대기중에서 소결하였다 소결을 위한 승온 온도는 $10^{\circ}C$/min이었고 소결은 $1,450^{\circ}C$에서 6 h 동안 하였다. IGZO target의 조성 비율은 1:1:12 (mol%)를 사용하였으며, 첨가한 Metal은 Boron (B), Germanium (Ge), Barium (Ba)을 사용하여 타겟을 제작하였다. M-IGZO 박막은RF magnetron Sputter를 이용하여 증착하였으며, 앞선 실험에서 제작한 타겟을 사용하여 M-IGZO박막을 투명전극으로 사용하기 위한 각각의 특성을 파악하였다. 모든 박막은 상온에서 증착을 하였으며, 증착된 박막두께를 측정하기 위해 ${\alpha}$-step IQ를 사용하였고, 광학적 특성을 분석하기 위해 UV-Visible spectrophotometer 로 투과율을 측정하였다. 그리고 전기적 특성을 측정하기 위해 Hall effect measurement 및 4-probe를 사용하였으며, 결정성 분석을 위하여 XRD를 이용하여 분석하였다. 표1은 M-IGZO타겟을 사용하여 증착시간에 따른 면저항 특성을 나타내었다. Ge, B, Ba이 첨가된 IGZO 박막은 증착시간이 증가할수록 면저항이 낮아짐을 알 수 있었다. 또한, Ge이 첨가된 IGZO 박막이 다른 금속이 첨가된 IGZO 박막의 면저항보다 현저히 낮음을 알 수 있었다. Fig. 1(a), (b), (c)는 각 타겟을 동일한 조건으로 증착을 하여 광학적특성을 나타내는 그래프이다. GZO 박막의 광학적 특성을 보면 가시광 영역에서 평균 투과율은 모두 80% 이상으로 우수한 광투과 특성을 보여 투명전자소자로 사용가능하다. 특히, 자외선 영역을 모두 차단하는 UV cut 능력이 우수함을 알 수 있었다. 따라서, 금속이 첨가된 IGZO 박막을 태양전지용 투명전극으로 사용할 경우, 자외선에 의하여 수명이 단축되는 현상을 줄여줄 수 있음을 기대할 수 있으며 내구성 향상에 크게 기여할 것으로 보인다. Fig. 2는 Ge=0, 0.5, 5%인 IGZO 투명전극을 총 40회 반복하여 증착을 실시한 후 각각의 면저항을 측정한 결과이다. 실험결과에 따르면 Ge가 0%, 5%인 IGZO 투명전극은 증착을 거듭할수록 면저항이 증가하는 결과를 나타내었으며, 0.5%인 IGZO 투명전극은 점차 안정화되어가는 결과를 나타내었다. 따라서 안정화 되었을 때 평균 면저항은 26ohm/sq.로 나타났으며, 광투과율은 Fig. 3과 같이 가시광영역에서 평균 80%이상의 결과를 보였으며, 550 nm에서는 86.36%의 우수한 특성을 나타내었다. 본 연구에서는 Metal이 첨가된 In-Ga-Zn-O기반의 3성분계 투명도전성 소재 target을 제작하여 RF magnetron sputter로 박막을 형성한 후 특성을 비교하였다. M-IGZO target 중 Ge (0.5%)을 첨가한 IGZO 타겟을 사용한 투명전극이 가장 우수한 특성을 보였으며, 제작된 M-target의 In 비율이 30% 정도로 기존의 ITO (90%) 대비하여 투명전극 제작 단가를 절감할 수 있다.

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