• Title/Summary/Keyword: Isotropic mask

Search Result 8, Processing Time 0.029 seconds

Image Interpolation using directional edge weight (방향성 에지 윤곽선 가중치를 이용한 영상 보간)

  • Lee, Ou-Seb;Kim, Hyeong-Kyo
    • Journal of the Institute of Convergence Signal Processing
    • /
    • v.11 no.1
    • /
    • pp.26-31
    • /
    • 2010
  • We proposed a new directional edge based interpolation, DEBI, by combining two weighted directional information to reduce blurred edges and annoying artifacts. Four isotropic gradient masks are employed in defining edge directions and they are proven to hold a first order derivative relation with respect to a rotating coordinate. Two minimum gradients among four absolute directional results are shown to be sufficient to describe slant edges efficiently. Compared with widely used bilinear and bicubic interpolation methods, the proposed algorithm results in a noticeable improvement along edge area.

Fabrication of Novel Metal Field Emitter Arrays(FEAs) Using Isotropic Silicon Etching and Oxidation

  • Oh, Chang-Woo;Lee, Chun-Gyoo;Park, Byung-Gook;Lee, Jong-Duk;Lee, Jong-Ho
    • Journal of Electrical Engineering and information Science
    • /
    • v.2 no.6
    • /
    • pp.212-216
    • /
    • 1997
  • A new metal tip fabrication process for low voltage operation is reported in this paper. The key element of the fabrication process is that isotropic silicon etching and oxidation process used in silicon tip fabrication is utilized for gate hole size reduction and gate oxide layer. A metal FEA with 625 tips was fabricated in order to demonstrate the validity of the new process and submicron gate apertures were successfully obtained from originally 1.7$\mu\textrm{m}$ diameter mask. The emission current above noise level was observed at the gate bias of 50V. The required gate voltage to obtain the anode current of 0.1${\mu}\textrm{A}$/tip was 74V and the emission current was stable above 2${\mu}\textrm{A}$/tip without any disruption. The local field conversion factor and the emitting area were calculated as 7.981${\times}$10\ulcornercm\ulcorner and 3.2${\times}$10\ulcorner$\textrm{cm}^2$/tip, respectively.

  • PDF

Observation of Growth Behavior of Induced Hillock for Nano/Micro Patterning on Surface of Borosilicate with Etching Time and Load (보로실리케이트 표면의 나노/마이크로 패터닝을 위한 식각 시간, 하중에 따른 유기 힐록의 성장거동 관찰)

  • Cho S. H.;Youn S. W.;Kang C. G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2005.10a
    • /
    • pp.182-185
    • /
    • 2005
  • Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

  • PDF

Dependence of deep submicron CMOSFET characteristics on shallow source/drain junction depth (얕은 소오스/드레인 접합깊이가 deep submicron CMOSFET 소자 특성에 미치는 영향)

  • 노광명;고요환;박찬광;황성민;정하풍;정명준
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.33A no.4
    • /
    • pp.112-120
    • /
    • 1996
  • With the MOsES (mask oxide sidewall etch scheme)process which uses the conventional i-line stepper and isotropic wet etching, CMOSFET's with fine gate pattern of 0.1.mu.m CMOSFET device, the screening oxide is deposited before the low energy ion implantation for source/drain extensions and two step sidewall scheme is adopted. Through the characterization of 0.1.mu.m CMOSFET device, it is found that the screening oxide deposition sheme has larger capability of suppressing the short channel effects than two step sidewall schem. In cse of 200.angs.-thick screening oxide deposition, both NMOSFET and PMOSFET maintain good subthreshold characteristics down to 0.1.mu.m effective channel lengths, and show affordable drain saturation current reduction and low impact ionization rates.

  • PDF

Solid-State High-Resolution 1H-NMR Study for Ammonia Borane of Hydrogen Storage Material

  • Han, J.H.;Lee, Cheol-Eui;Kim, Se-Hun;Kim, Chang-Sam;Han, Doug-Young
    • Journal of the Korean Magnetic Resonance Society
    • /
    • v.14 no.1
    • /
    • pp.38-44
    • /
    • 2010
  • In liquids NMR, $^{1}H$ is the most widely observed nucleus, which is not the case in solids NMR. The reason is due to the strong homo-dipolar interactions between the hydrogen atoms which mask the useful chemical shift information. Therefore we must remove the strong homo-dipolar interactions in order to get structural information, which can be investigated by the isotropic chemical shift. There are two ways of obtaining it. One is the ultra-fast MAS of ca. 70 kHz spinning speed, which has become available only recently. The other way is devising a pulse sequence which can remove the strong homo-dipolar interaction. In the latter way, MAS with a moderate spinning rate of a few kHz, is enough to remove the chemical shift anisotropy. In this report, 1D-CRAMPS and 2D MASFSLG techniques are utilized and their results will be compared. This kind of highresolution $^{1}H$ NMR for solids, should become a valuable analytical tool in the understanding and the developing of a new class of hydrogen storage materials. Here ammonium borane $-NH_{3}BH_{3}$, whose hydrogen content is high, is used as a sample.

Development of Microlens Array for Maskless Lithography Application (Maskless lithography 응용을 위한 마이크로렌즈 어레이 개발)

  • Nam, Min-Woo;Oh, Hae-Kwan;Kim, Geun-Young;Seo, Hyun-Woo;Wei, Chang-Hyun;Song, Yo-Tak;Yang, Sang-Sik;Lee, Kee-Keun
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.16 no.4
    • /
    • pp.33-39
    • /
    • 2009
  • A microlens array (MLA) was developed based on the wet-etched quartz substrate and coating of UV adhesive on the substrate for maskless lithography application. The developed MLA has the focal length of ${\sim}45\;{\mu}m$ and the spot size of ${\sim}1\;{\mu}m$. The spot size of the focused beam passing through the MLA was detected by CCD camera, and its intensity was monitored by beam profiler. Uniform spots with nearly identical intensities were observed on the focal plane when a beam passes through the fabricated MLA. The focal length was varied depending on thickness of the coated UV adhesive. The thicker the thickness of the UV adhesive was, the shorter the focal length of the MLA was. With a general mask aligner, UV beam focusing was tested onto photoresist (PR). The beams were well focused onto PR when UV passes through the MLA. Depending on the variable distances from the MLA, beam sizes onto PR were controlled. Even at high temperature for a long time, the performances of the MLA were not changed.

  • PDF

Cu dry etching by the reaction of Cu oxide with H(hfac) (Cu oxide의 형성과 H(hfac) 반응을 이용한 Cu 박막의 건식식각)

  • Yang, Hui-Jeong;Hong, Seong-Jin;Jo, Beom-Seok;Lee, Won-Hui;Lee, Jae-Gap
    • Korean Journal of Materials Research
    • /
    • v.11 no.6
    • /
    • pp.527-532
    • /
    • 2001
  • Dry etching of copper film using $O_2$ plasma and H(hfac) has been investigated. A one-step process consisting of copper film oxidation with an $O_2$ plasma and the removal of surface copper oxide by the reaction with H(hfac) to form volatile Cu(hfac)$_2$ and $H_2O$ was carried but. The etching rate of Cu in the range from 50 to 700 /min was obtained depending on the substrate temperature, the H(hfac)/O$_2$ flow rate ratio, and the plasma power. The copper film etch rate increased with increasing RF power at the temperatures higher than 215$^{\circ}C$. The optimum H(hfac)/O$_2$ flow rate ratio was 1:1, suggesting that the oxidation process and the reaction with H(hfac) should be in balance. Cu patterning using a Ti mask was performed at a flow rate ratio of 1:1 on 25$0^{\circ}C$\ulcorner and an isotropic etching profile with a taper slope of 30$^{\circ}$was obtained. Cu dry patterning with a tapered angle which is necessary for the advanced high resolution large area thin film transistor liquid-crystal displays was thus successfully obtained from one step process by manipulating the substrate temperature, RF power, and flow rate ratio.

  • PDF

Gaussian Filtering Effects on Brain Tissue-masked Susceptibility Weighted Images to Optimize Voxel-based Analysis (화소 분석의 최적화를 위해 자화감수성 영상에 나타난 뇌조직의 가우시안 필터 효과 연구)

  • Hwang, Eo-Jin;Kim, Min-Ji;Jahng, Geon-Ho
    • Investigative Magnetic Resonance Imaging
    • /
    • v.17 no.4
    • /
    • pp.275-285
    • /
    • 2013
  • Purpose : The objective of this study was to investigate effects of different smoothing kernel sizes on brain tissue-masked susceptibility-weighted images (SWI) obtained from normal elderly subjects using voxel-based analyses. Materials and Methods: Twenty healthy human volunteers (mean $age{\pm}SD$ = $67.8{\pm}6.09$ years, 14 females and 6 males) were studied after informed consent. A fully first-order flow-compensated three-dimensional (3D) gradient-echo sequence ran to obtain axial magnitude and phase images to generate SWI data. In addition, sagittal 3D T1-weighted images were acquired with the magnetization-prepared rapid acquisition of gradient-echo sequence for brain tissue segmentation and imaging registration. Both paramagnetically (PSWI) and diamagnetically (NSWI) phase-masked SWI data were obtained with masking out non-brain tissues. Finally, both tissue-masked PSWI and NSWI data were smoothed using different smoothing kernel sizes that were isotropic 0, 2, 4, and 8 mm Gaussian kernels. The voxel-based comparisons were performed using a paired t-test between PSWI and NSWI for each smoothing kernel size. Results: The significance of comparisons increased with increasing smoothing kernel sizes. Signals from NSWI were greater than those from PSWI. The smoothing kernel size of four was optimal to use voxel-based comparisons. The bilaterally different areas were found on multiple brain regions. Conclusion: The paramagnetic (positive) phase mask led to reduce signals from high susceptibility areas. To minimize partial volume effects and contributions of large vessels, the voxel-based analysis on SWI with masked non-brain components should be utilized.