• Earthquakes and Structures
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• 제18권4호
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• pp.467-480
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• 2020

Concrete rectangular liquid storage tanks are widely used, but there are many cases of damage in previous earthquakes. Nonlinear fluid-structure interaction (FSI) is considered, Mooney-Rivlin material is used for rubber bearing, nonlinear contact is used for sliding bearing, numerical calculation models of no-isolation, rubber isolation, sliding isolation and hybrid isolation concrete rectangular liquid storage tanks are established; dynamic responses of different structures are compared to verify the effectiveness of isolation methods; and influences of earthquake amplitude, bidirectional earthquake and far-field long-period earthquake on dynamic responses are investigated. Results show that for liquid sloshing wave height, rubber isolation cause amplification effect, while sliding isolation and hybrid isolation have reduction effect; displacement of rubber isolation structure is much larger than that of sliding isolation with limiting-devices and hybrid isolation structure; when PGA is larger, wall cracking probability of no-isolation structure becomes larger, and probability of liquid sloshing wave height and structure displacement of rubber isolation structure exceeds the limit is also larger; under bidirectional earthquake, occurrence probabilities that liquid sloshing wave height and structure displacement of rubber isolation structure exceed the limit will be increased; besides, far-field long-period earthquake mainly influences structure displacement and liquid sloshing wave height. On the whole, control effect of sliding isolation is the best, followed by hybrid isolation, and rubber isolation is the worst.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.443-444
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• 2002

The uniformity of field oxide is critical to isolation property of device in STI, so the control of field oxide thickness in STI-CMP becomes enormously important. The loss of field oxide in shallow trench isolation comes mainly from dishing and erosion in STI-CMP. In this paper, the effect of slurries on the dishing was investigated with both blanket and patterned wafers were selected to measure the removal rate, selectivity and dishing amount. Dishing was a strong function of pattern spacing and types of slurries. Dishing was significantly decreased with decreasing pattern spacing for both slurries. Significantly lower dishing with ceria based slurry than with silica based slurry were achieved when narrow pattern spacing were used. Possible dishing mechanism with two different slurries were discussed based on the observed experimental results.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.272-278
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• 2002

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. In this paper, the effect of pattern density, trench width and selectivity of slurry on dishing in STI CMP process was investigated by using specially designed isolation pattern. As trench width increased, the dishing tends to increase. At $20{\mu}m$ pattern size, the dishing was decreased with increasing pattern density Low selectivity slurry shows less dishing at over $160{\mu}m$ trench width, whereas high selectivity slurry shows less dishing at below $160{\mu}m$ trench width.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.25-28
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• 2001

Recently, STI(Shallow Trench Isolation) process has attracted attention for high density of semiconductor device as a essential isolation technology. Without applying the conventional complex reverse moat process, CMP(Chemical Mechanical Polishing) has established the Process simplification. However, STI-CMP process have various defects such as nitride residue, torn oxide defect, damage of silicon active region, etc. To solve this problem, in this paper, we discussed to determine the control limit of process, which can entirely remove oxide on nitride from the moat area of high density as reducing the damage of moat area and minimizing dishing effect in the large field area. We, also, evaluated the reliability and reproducibility of STI-CMP process through the optimal process conditions.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.501-504
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• 1999

In the shallow trench isolation(STI) chemical mechanical polishing(CMP) process, the key issues are the optimized thickness control within- wafer-non-uniformity, and the possible defects such as nitride residue and pad oxide damage. These defects after STI CMP process were discussed to accomplish its optimum process condition. To understand its optimum process condition, overall STI related processes including reverse moat etch, trench etch, STI filling and STI CMP were discussed. It is represented that the nitride residue can be occurred in the condition of high post CMP thickness and low trench depth. In addition there are remaining oxide on the moat surface after reverse moat etch. It means that reverse moat etching process can be the main source of nitride residue. Pad oxide damage can be caused by over-polishing and high trench depth.

• 한국전기전자재료학회논문지
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• 제16권7호
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• pp.647-655
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• 2003

Commonly used SAW duplexers have a difficulty on manufacture so that a transmission line is printed on the package or an LTCC multi-layer is needed because a quarter-wave transmission line which is a kind of an isolation network is applied to the SAW duplexers. In this study, new structures of one chip type SAW duplexers are proposed. In the proposed structure, Tx and Rx SAW ladder filters and isolation networks are located on a single 36LiTaO$_3$ piezoelectric substrate. The manufacture process is very simple than commonly used product. It is possible to improve tile performance by means of optimizing the micro-strip line lumped elements. It is easy to integrate and modulate with other surrounding components. The optimal design techniques can be applied to other kind of multi-port devices.

• Smart Structures and Systems
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• 제8권4호
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• pp.399-412
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• 2011

This study compares the performance of two smart isolation systems that utilize superelastic shape memory alloys (SMAs) for seismic protection of bridges using energy balance concepts. The first isolation system is a SMA/rubber-based isolation system (SRB-IS) and consists of a laminated rubber bearing that decouples the superstructure from the bridge piers and a SMA device that provides additional energy dissipation and re-centering capacity. The second isolation system, named as superelastic-friction base isolator (S-FBI), combines the superelastic SMAs with a flat steel-Teflon bearing rather than a laminated rubber bearing. Seismic energy equations of a bridge structure with SMA-based isolation systems are established by absolute and relative energy balance formulations. Nonlinear time history analyses are performed in order to assess the effectiveness of the isolation systems and to compare their performance. The program RSPMatch 2005 is employed to generate spectrum compatible ground motions that are used in time history analyses of the isolated bridge. Results indicate that SRB-IS produces higher seismic input energy, recoverable energy and base shears as compared to the S-FBI system. Also, it is shown that combining superelastic SMAs with a sliding bearing rather than rubber bearing significantly reduce the amount of the required SMA material.

• 한국진공학회지
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• 제15권3호
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• pp.273-279
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• 2006

Si기반 고주파집적회로의 차단재로서 간접전극 양극산화법으로 형성된 다공성 Si을 활용하기 위한 기초 연구로서 전류밀도, 시간에 따른 기공의 크기와 깊이등을 조사하였고 기공 도입 전,후 Si의 격자상수 변화를 측정하여 유발되는 내부응력의 크기를 평가하였다. 기공의 크기와 깊이는 대개 전류밀도와 시간에 따라 증가하였다. 기공이 형성됨에 따라 Si의 격자상수가 증가하여 약 8MPa의 압축응력이 유발되었다. 간접전극 양극산화법으로 형성된 다공성 Si은 공정이간단하고 기공으로 유발되는 내부응력의 크기가 작아 Si YLSI공정 적합성이 우수하므로 고주파 직접회로의 효과적인 차단재로서 적합한 재료로 판단된다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 춘계학술대회논문집
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• pp.477-482
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• 2002

This research is concerned with the study of an active vibration absorber using piezoelectric actuators and Isolation pad. The active isolation system consists of 4-pairs of PZT actuators bonded on the surface of an aluminum plate and a passive damping material. The active system is connected to the passive system in series. The Signals of the accelerometers are fed into the PZT actuator through the controller. We proposed a new control technique which can deal with the shock as well as the base excitation in this study. The Positive Acceleration Feedback(PAE) tuned to the natural frequency of the vibration isolation system is used to suppress the vibrations caused by the shock using the top accelerometer signal. The Negative Acceleration Feedback (NAF) based on the base acceleration signal is used to counteract the base motion. Experimental results show that the proposed active vibration isolation system can suppress vibrations.

• Smart Structures and Systems
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• 제25권3호
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• pp.323-335
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• 2020

Magnetorheological elastomer (MRE), a smart material, is an innovative material for base isolation system. It has magnetorheological (MR) effect that can control the stiffness in real-time. In this paper, a new hybrid base isolation system combining two electromagnetic closed circuits and the roller bearing is proposed. In the proposed system, the roller part can support the vertical load. Thus, the MRE part is free from the vertical load and can exhibit the maximum MR effect. The MRE magnetic loop is constructed in the free space of the roller bearing and forms a strong magnetic field. To demonstrate the performance of the proposed hybrid base isolation system, dynamic characteristic tests and performance evaluation were carried out. Dynamic characteristic tests were performed under the extensive range of strain of the MRE and the change of the applied current. Performance evaluation was carried out using the hybrid simulation under five earthquakes (i.e., El Centro, Kobe, Hachinohe, Northridge, and Loma Prieta). Especially, semi-active fuzzy control algorithm was applied and compared with passive type. From the performance evaluation, the comparison shows that the new hybrid base isolation system using fuzzy control algorithm is superior to passive type in reducing the acceleration and displacement responses of a target structure.