• Title/Summary/Keyword: Ion-milling

Search Result 187, Processing Time 0.03 seconds

Effect of Ca Implantation on the Sintering and Crack Healing Behavior of High Purity $Al_2$O$_3$ Using Micro-Lithographic Technique -II. Hexagonal Ligaments and Type of Healing (Ion Implantation으로 Ca를 첨가한 단결정 $Al_2$O$_3$의 Crck-Like Pore의 Healing 거동-H. Hexagonal Ligaments and Type of Healing)

  • 김배연
    • Journal of the Korean Ceramic Society
    • /
    • v.36 no.8
    • /
    • pp.813-819
    • /
    • 1999
  • Inner crack-like pores with controlled amount of Ca impurity level in the high purity alumina single crystal sapphire had been created by micro-fabrication technique which includes ion implantation photo-lithography Ar ion milling and hot press technique. The morphological change and the healing of crack-like pore in the Ca doped high purity single crystal alumina during high temperature heat treatment in vacuum were observed using optical microscopy. The hexagonal bridging ligaments were developed and the size of hexagonal bridging ligaments had been increased with temperature and Ca amount and had grown to their corner rounded. It appeared that the hexagonal bridging ligaments would have an equilbrium size with temperature and the amount of Ca addition. Three kinds of crack-like pore healing type were observed. Edge regression and ligament growth were observed from relatively low temperature in the crack-like pore. Edge regression were found in almost all of the crack-like pore but the ligament growth were found only in the several crack-like pores accelerating heating very fast. Flow type healing was observed above $1800^{\circ}C$ and It healed the crack-like pore very slowly.

  • PDF

Preparation Method of Plan-View Transmission Electron Microscopy Specimen of the Cu Thin-Film Layer on Silicon Substrate Using the Focused Ion Beam with Gas-Assisted Etch

  • Kim, Ji-Soo;Nam, Sang-Yeol;Choi, Young-Hwan;Park, Ju-Cheol
    • Applied Microscopy
    • /
    • v.45 no.4
    • /
    • pp.195-198
    • /
    • 2015
  • Gas-assisted etching (GAE) with focused ion beam (FIB) was applied to prepare plan-view specimens of Cu thin-layer on a silicon substrate for transmission electron microscopy (TEM). GAE using $XeF_2$ gas selectively etched the silicon substrate without volume loss of the Cu thin-layer. The plan-view specimen of the Cu thin film prepared by FIB milling with GAE was observed by scanning electron microscopy and $C_S$-corrected high-resolution TEM to estimate the size and microstructure of the TEM specimen. The GAE with FIB technique overcame various artifacts of conventional FIB milling technique such as bending, shrinking and non-uniform thickness of the TEM specimens. The Cu thin film was uniform in thickness and relatively larger in size despite of the thickness of <200 nm.

Fabrication of High-T$_c$ Superconducting Josephson Junctions by Ar lon Milling and E-Beam Lithography (Ar 이온빔 식각과 전자선리소그래피 방벙으로 제작한 고온초전도 조셉슨 접합)

  • Lee, Moon-Chul;Kim, In-Seon;Lee, Jeong-O;Yoo, Kyung-Hwa;Park, Yong-Ki;Park, Jong-Chul
    • 한국초전도학회:학술대회논문집
    • /
    • v.9
    • /
    • pp.91-94
    • /
    • 1999
  • A new type of high-T$_c$ superconducting Josephson junctions has been prepared by Ar ion beam etching and electron beam lithography. YBa$_2Cu_3O_{7-x}$ (YBCO) films deposited on (001) SrTiO$_3$ single crystal substrate by pulsed laser deposition were patterned by Ar ion milling with photolithography. The narrow slit with a electroresist mask, about 1000 ${\AA}$ wide, was constructed over a 3 ${\sim}$ 5 ${\mu}$m bridge of a 1200-${\AA}$-thick YBCO film by electron beam lithography. The slit was then etched by the Ar ion beam to form a damaged 600-${\AA}$-thick YBCO. Thus prepared structure forms an S-N-S (YBCO - damaged YBCO - YBCO) type Josephson junctions. Those junctions exhibit RSI-like I-V characteristics at 77 K. The properties of the Josephson junctions such as I$_c$ R$_N$, and J$_c$ were characterized.

  • PDF

Performance of modified graphite as anode material for lithium-ion secondary battery

  • Zheng, Hua;Kim, Myung-Soo
    • Carbon letters
    • /
    • v.12 no.4
    • /
    • pp.243-248
    • /
    • 2011
  • Two different types of graphite, such as flake graphite (FG) and spherical graphite (SG), were used as anode materials for a lithium-ion secondary battery in order to investigate their electrochemical performance. The FG particles were prepared by pulverizing natural graphite with a planetary mill. The SG particles were treated by immersing them in acid solutions or mixing them with various carbon additives. With a longer milling time, the particle size of the FG decreased. Since smaller particles allow more exposure of the edge planes toward the electrolyte, it could be possible for the FG anodes with longer milling time to deliver high reversible capacity; however, their initial efficiency was found to have decreased. The initial efficiency of SG anodes with acid treatments was about 90%, showing an over 20% higher value than that of FG anodes. With acid treatment, the discharge rate capability and the initial efficiency improved slightly. The electrochemical properties of the SG anodes improved slightly with carbon additives such as acetylene black (AB), Super P, Ketjen black, and carbon nanotubes. Furthermore, the cyclability was much improved due to the effect of the conductive bridge made by carbon additives such as AB and Super P.

Effect of ball-milling condition on electrochemical properties of $LiFePO_4-C$ cathode materials

  • Jin, Bo;Jin, En-Mei;Park, Kyung-Hee;Park, Bok-Kee;Gu, Hal-Bon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.11a
    • /
    • pp.338-338
    • /
    • 2007
  • $LiFePO_4-C$ cathode materials were prepared by hydrothermal reaction and ball-milling. In order to enhance the electronic conductivity of $LiFePO_4$, 10% of acetylene black was added. During the ball-milling, different revolutions per minute (100, 200 and 300 rpm) was carried out. The structural and morphological performance of $LiFePO_4-C$ powders were characterized by X-ray diffraction and scanning electron microscope. The X-ray diffraction results demonstrated that $LiFePO_4-C$ powders had an orthorhombic olivine-type structure with a space group of Pnma. $LiFePO_4-C$ batteries were characterized electrochemically by charge/discharge experiments. The charge/discharge experiments indicated that $LiFePO_4-C$/Li batteries by 300 rpm of the ball-milling exhibited the best electrochemical performance with the discharge capacity of 126mAh/g at a discharge rate of $0.1mA/cm^2$.

  • PDF

Ion Beam Induced Micro/Nano Fabrication: Shape Fabrication (이온빔을 이용한 마이크로/나노 가공: 형상가공)

  • Kim, Heung-Bae;Hobler, Gerhard
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.24 no.10
    • /
    • pp.109-116
    • /
    • 2007
  • Focused ion beams are a potential tool for micro/nano structure fabrication while several problems still have to be overcome. Redeposition of sputtered atoms limits the accurate fabrication of micro/nano structures. The challenge lies in accurately controlling the focused ion beam to fabricate various arbitrary curved shapes. In this paper a basic approach for the focused ion beam induced direct fabricate of fundamental features is presented. This approach is based on the topography simulation which naturally considers the redeposition of sputtered atoms and sputtered yield changes. Fundamental features such as trapezoidal, circular and triangular were fabricated with this approach using single or multiple pass box milling. The beam diameter(FWHM) and maximum current density are 68 nm and $0.8 A/cm^2$, respectively. The experimental investigations show that the fabricated shape is well suited for the pre-designed fundamental features. The characteristics of ion beam induced direct fabrication and shape formation will be discussed.

Effect of Graphite Mixing Method on Electrode Characteristics in Cathode Resynthesis of Lithium Battery (리튬전지(電池) 양극(陽極) 재합성시(再合成時) 흑연(黑鉛) 도전재(導電材) 혼합방법(混合方法)이 전극특성(電極特性)에 미치는 영향(影響))

  • Lee, Churl-Kyoung;Kim, Tae-Hyun
    • Resources Recycling
    • /
    • v.19 no.1
    • /
    • pp.27-32
    • /
    • 2010
  • To improve electronic conductivity of cathodic active materials of lithium ion battery, carbonaceous materials is usually added. New mixing method of abrasive milling has been investigated in mixing of graphite and $LiCoO_2$ powders. It would be expected that uniform mixing of graphite reduces capacity fading of cathode of lithium battery. Abrasion milled $LiCoO_2$ composite showed the best electrochemical performance as a cathode material with 1 wt% of graphite content, 300 rpm of milling speed, and 10 min of milling time. The improvement of the electrochemical performances such as cycleability and charge/discharge capacity retention would be mainly attributed to increase of the electronic conductivity and/or prevention of the active materials by uniform dispersion and coating of graphite on $LiCoO_2$.

Synthesis of Cathode Material-Nickel Sulfides by Mechanical Alloying for Sodium Batteries

  • Liu, Xiaojing;Ahn, Hyo-Jun;Ahn, In-Shup
    • Journal of Powder Materials
    • /
    • v.19 no.3
    • /
    • pp.182-188
    • /
    • 2012
  • In this study, fine cathode materials $Ni_3S_2$ and $NiS_2$ were synthesized using the simple, convenient process of mechanical alloying (MA). In order to improve the cell properties, wet milling processes were conducted using low-energy ball milling to decrease the mean particle size of both materials. The cells of Na/$Ni_3S_2$ and Na/$NiS_2$ show a high initial discharge capacity of 425 mAh/g and 577 mAh/g respectively using wet milled powder particles, which is much larger than commercial ones, providing some potential as new cathode materials for rechargeable sodium-ion batteries.