• 제목/요약/키워드: Ion-doping

검색결과 331건 처리시간 0.04초

이온 샤우어 도핑을 이용한 자기정렬방식의 APCVD 비정질 실리콘 박막 트랜지스터의 제작 (Fabrication of self aligned APCVD A-Si TFT by using ion shower doping method)

  • 문병연;이경하;정유찬;유재호;이승민;장진
    • 전자공학회논문지A
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    • 제32A권1호
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    • pp.146-151
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    • 1995
  • We have studied the fabrication self aligned atmospheric pressure(AP) CVD a-Si thin film transistor with source-drain ohmic contact by using ion shower doping method. The conductivity is 6*10$^{-2}$S/cm when the acceleration voltage, doping time and doping temperature are 6kV, 90s and 350.deg. C, respectively. We obtained the field effect mobility of 1.3cm$^{2}$/Vs and the threshold voltage of 7V.

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LC/MS를 이용한 뇨중에서의 Methylprednisolone Acetate 및 그 대사물질 분석에 관한 연구 (A Study on the Analysis of Methylprednisolone Acetate and its Metabolites in Rat Urine by LC/MS)

  • 박송자;표희수;김연제;박성수;박종세
    • 분석과학
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    • 제8권2호
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    • pp.139-159
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    • 1995
  • 몇 가지 종류의 corticosteroid에 대하여 액체 크로마토그래피-질량분석법으로 양이온 질량 스펙트럼을 얻었다. 화학구조에 따라 수소 첨가된 분자이온 [$MH^+$], 암모늄 첨가이온 [${MNH_4}^+$], 또는 ($MH^+-60$) 이온이 base peak였고 [$MH^+-18$] 또는 [${MNH_4}^+-18$] 이온 등이 특성적으로 나타났다. Methylprednisolone acetate를 male Sprague-Dawley rat에 경구투여한 다음 24시간 동안 배설된 뇨로부터 유리상태 또는 접합상태의 대사물질들을 가수분해, 추출 및 농축하고, thermospray LC/MS를 사용하여 양이온과 음이온 질량토막이온을 분석하였다. Methylprednisolone acetate의 C-21 위치에서의 탈아세틸화(deacetylation), C-20 위치에서 C=0의 -CHOH로의 환원, C-11 위치에서 CHOH의 C=0로의 산화 또는 C-17과 C-20 사이의 bond cleavage등에 의해 생성되는 것으로 추정되는 10여종의 대사물질을 검출하였다. 그 중에 20-hydroxymethylprednisolone(20-HMP), methylprednisolone(MP), methylprednisone(11-KMP)등은 표준물질과 비교 확인하였다.

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Properties of N-butyl-N-methyl-pyrrolidinium Bis(trifluoromethanesulfonyl) Imide Based Electrolytes as a Function of Lithium Bis(trifluoromethanesulfonyl) Imide Doping

  • Kim, Jae-Kwang;Lim, Du-Hyun;Scheers, Johan;Pitawala, Jagath;Wilken, Susanne;Johansson, Patrik;Ahn, Jou-Hyeon;Matic, Aleksandar;Jacobsson, Per
    • 전기화학회지
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    • 제14권2호
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    • pp.92-97
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    • 2011
  • In this study we have investigated the Li-ion coordination, thermal behavior and electrochemical stability of N-butyl-N-methyl-pyrrolidinium bis(trifluoromethanesulfonyl)imide ($Py_{14}TFSI$) with lithium bis(trifluoromethanesulfony)imide (LiTFSI) doping intended for use as electrolytes for lithium batteries. The ionic conductivity is reduced and glass transition temperature ($T_g$) increases with LiTFSI doping concentration. Also, the electrochemical stability increases with LiTFSI doping. A high LiTFSI doping could enhance the electrochemical stability of electrolytes for lithium batteries, whereas the decrease in the ionic conductivity limits the capacity of the battery.

p-n 접합 형성을 위한 반도체 실리콘 웨이퍼 대기압 플라즈마 붕소 확산 가능성 연구 (Study of Boron Doping Feasibility with Atmospheric Pressure Plasma for p-n Junction Formation on Silicon Wafer for Semiconductor)

  • 김우재;이환희;권희태;신기원;양창실;권기청
    • 반도체디스플레이기술학회지
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    • 제16권4호
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    • pp.20-24
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    • 2017
  • Currently, techniques mainly used in semiconductor impurity diffusion processes include furnace thermal diffusion, ion implantation, and vacuum plasma doping. However, there is a disadvantage that the process equipment and the unit cost are expensive. In this study, boron diffusion process using relatively inexpensive atmospheric plasma was conducted to solve this problem. With controlling parameters of Boron diffusion process, the doping characteristics were analyzed by using secondary ion mass spectrometry. As a result, the influence of each variable in the doping process was analyzed and the feasibility of atmospheric plasma doping was confirmed.

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Selective doping of Li-rich layered oxide cathode materials for high-stability rechargeable Li-ion batteries

  • Han, Dongwook;Park, Kwangjin;Park, Jun-Ho;Yun, Dong-Jin;Son, You-Hwan
    • Journal of Industrial and Engineering Chemistry
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    • 제68권
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    • pp.180-186
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    • 2018
  • We report the discovery of Li-rich $Li_{1+x}[(Ni_{0.225}Co_{0.15}Mn_{0.625})_{1-y}V_y]O_2$ as a cathode material for rechargeable lithium-ion batteries in which a small amount of tetravalent vanadium ($V^{4+}$) is selectively and completely incorporated into the manganese sites in the lattice structure. The unwanted oxidation of vanadium to form a $V_2O_5-like$ secondary phase during high-temperature crystallization is prevented by uniformly dispersing the vanadium ions in coprecipitated $[(Ni_{0.225}Co_{0.15}Mn_{0.625})_{1-y}V_y](OH)_2$ particles. Upon doping with $V^{4+}$ ions, the initial discharge capacity (>$275mA\;h\;g^{-1}$), capacity retention, and voltage decay characteristics of the Li-rich layered oxides are improved significantly in comparison with those of the conventional undoped counterpart.

Reverse annealing of $P^+/B^+$ ion shower doped poly-Si

  • Jin, Beop-Jong;Hong, Won-Eui;Ro, Jae-Sang
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.752-755
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    • 2006
  • Reverse annealing was observed in $P^+/B^+$ ion shower doped poly-Si upon activation annealing. Phosphorous or boron was implanted by ion shower doping using a source gas mixture of $PH_3/H_2$ or $B_2H_6/H_2$. Activation annealing was conducted using a tube furnace in the temperature ranges from $350^{\circ}C$ to $650^{\circ}C$. Hall measurement revealed that reverse annealing begins at different annealing temperatures for poly-Si implanted with P and B, respectively. It was observed that reverse annealing starts at $550^{\circ}C$$ in $P^+$ ion shower doped poly-Si, while at $350^{\circ}C$ in the case of B-doping.

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Study on visible emission of Cu-ion-doped perovskite hafnate in view of excitation energy dependence

  • Lee, D.J.;Lee, Y.S.;Noh, H.J.
    • 한국초전도ㆍ저온공학회논문지
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    • 제17권4호
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    • pp.8-11
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    • 2015
  • We studied on the visible emission of Cu-ion-doped perovskite hafnate $SrHfO_3$ (SHO:Cu) with the photo-excitation energy dependence. The polycrystalline SHO:Cu samples were newly synthesized in the solid state reaction method. From the X-ray diffraction measurement it was found that the crystalline structure of SHO:Cu is nearly identical to that of undoped $SrHfO_3$. Interestingly, the photoluminescence excitation (PLE) spectra change significantly with the emission energy, which is linked to the strong dependence of the visible emission on the photo-excitation energy. This unusual emission behavior is likely to be associated with the mixed valence states of the doped Cu ions, which were revealed by X-ray photoelectron spectroscopy. We compared our finding of tunable visible emission in the SHO:Cu compounds with the cases of similar materials, $SrTiO_3$ and $SrZrO_3$ with Cu-ion-doping.

스퍼터링 증착한 CdTe 박막의 효과적인 Ag 도핑을 위한 이온 교환법 연구 (A Study on Ion Exchange Method for Effective Ag Doping of Sputtering-Deposited CdTe Thin Film)

  • 김철준;박주선;이우선
    • 전기학회논문지
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    • 제60권6호
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    • pp.1169-1174
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    • 2011
  • CdTe thin-film solar cell technology is well known that it can theoretically improve its conversion efficiency and manufacturing costs compared to the conventional silicon solar cell technology, due to its optical band gap energy (about 1.45eV) for solar energy absorption, high light absorption capability and low cost requirements for producing solar cells. Although the prior studies obtained the high light absorption, CdTe thin film solar cell has not been come up to the sufficient efficiency yet. So, doping method was selected for the improvement of the electrical characteristics in CdTe solar cells. Some elements including Cu, Ag, Cd and Te were generally used for the p-dopant as substitutional acceptors in CdTe thin film. In this study, the sputtering-deposited CdTe thin film was immersed in $AgNO_3$ solution for ion exchange method to dope Ag ions. The effects of immersion temperature and Ag-concentration were investigated on the optical properties and electrical characteristics of CdTe thin film by using Auger electron spectroscopy depth-profile, UV-visible spectrophotometer, and a Hall effect measurement system. The best optical and electrical characteristics were sucessfully obtained by Ag doping at high temperature and concentration. The larger and more uniform diffusion of Ag ions made increase of the Ag ion density in CdTe thin film to decrease the series resistance as well as mede the faster diffusion of light by the metal ions to enhance the light absorption.