• Journal of Sensor Science and Technology
• /
• v.6 no.6
• /
• pp.430-436
• /
• 1997

A piezoresistive acceleration sensor for 30 G has been fabricated by silicon micromachining method using SDB(silicon direct bonding) wafer. The structure of the piezoresistive acceleration sensor consists of a seismic square pillar type mass and four beams. This structure was fabricated by reactive ion etching and chemical etching using KOH-etchant. The rectangular square structure is used in order to compensate the deformation of the edges due to underetching. The fabricated sensor showed a linear output voltage-acceleration characteristics and its sensitivity was about $88{\mu}V/V{\cdot}g$ from 0 to 10 G.

• Journal of Sensor Science and Technology
• /
• v.9 no.3
• /
• pp.203-207
• /
• 2000

The sensitivity of ISFET glucose sensor is improved by employing amperometric actuation method. However, this method takes long time to recover the primary output voltage after measurement because of slow migration of the hydrogen ion between internal and external sensing membranes. Consequently, such a recovery-time delaying problem is one of obstacles to a practical use. In this paper, a new method is proposed to control the concentration of hydrogen ion in internal membrane, which applies a reduction potential to the working electrode for supplying hydroxide ion. Experimental results show that the recovery-time was reduced within 2 minute against decades minute of conventional method.

• Journal of Sensor Science and Technology
• /
• v.8 no.4
• /
• pp.341-346
• /
• 1999

In general cases, compared with glass electrode, FET type electrolyte sensors have many advantages. But the drift, memory effect and the poor reproducibility of the FET type electrolyte sensor cause the decrease of the reliability in the measurement system. To improve the reliability, an ion-measuring system using FET type electrolyte sensor array with 8 sensors has been developed. Developed system employed the electronic switchs to connect a signal detecting circuit with 8 sensor array and the system can measure ion concentration of 4 different type electrolyte($H^+$, $Na^+$, $K^+$, $Ca^{2+}$). The signal processing algorithm with insertion sorting method was adopted to enhance the reliability. We measured 3 different ion($H^+$, $Na^+$, $K^+$) to evaluate the performance of developed system. The results show that the designed signal processing algorithm can reduce the error range in comparison with a simple arithmetic mean and the developed system has a good reliability over the previous single channel sensor system.

• Journal of the Korean Electrochemical Society
• /
• v.1 no.1
• /
• pp.40-44
• /
• 1998

The LAPS device of fast response and high sensitivity, based on electrochemical potential difference, and its system were fabricated for the precise measurement of pH changes and its characteristic were investigated. The electrostatic variation characteristics of LAPS according to the pH changes and parameters in the device were verified through a simulation using LAPS equivalent circuit model. The LAPS device and its system were fabricated on the basis of the result of simulation. The fabricated LAPS system showed linear sensitivity (about 56 mV/pH within the range of pH 2 to pH 11. In order to overcome the defect of general urea sensor (especially slow response time), urease immobilized nitrocellulose membrane was attached on the LAPS and resulted in the very fast response time, 0.29 mV/sec, 0.86 mV/sec at urea concentration of $50{\mu}g/ml,\; 500{\mu}g/ml$, respectively. And also in order to measure the uranyl ion, the uranyl ion selective sensing membrane with calix[6]arene derivative was used and its sensitivity was 25mV/concentration decade in the wide uranyl ion concentration range of $10^{-11}M\;to\;10^{-4}M$.

• Journal of Microbiology and Biotechnology
• /
• v.13 no.3
• /
• pp.373-377
• /
• 2003

Various groups of industrial and agricultural pollutants (heavy metal ions, cyanides, and pesticides) can be detected by enzymes. Since heavy metal ions inhibit urease, cyanides inhibit peroxidase, organophosphorus and carbamate pesticides inhibit butyrylcholinesterase, these enzymes were co-immobilized into a bovine serum albumin gel on the surface of an ion-sensitive field effect transistor to create a bioprobe that is sensitive to the compounds mentioned above. The sensitivity of the present sensor towards KCN corresponded to $1\;\mu\textrm{M}$ with 1 min of incubation time. The detection limits for Hg(II) ions and the pesticide carbofuran were 0.1 and $0.5\;\mu\textrm{M}$, respectively, when a 10 min sensor incubation time in contaminated samples was chosen. The total time for determining the concentrations of all species mentioned did not exceed 20 min.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2006.10a
• /
• pp.198-201
• /
• 2006

In this paper, we fabricated drag force type and pressure difference type gas flow sensor with dry etching technology which used Deep RIE(reactive ion etching) and etching stop technology which used SOI(silicon-on-insulator). we fabricated four kinds of sensor, which are cantilever, paddle type, diaphragm, and diaphragm with orifice type. Both cantilever and paddle type flow sensors have similar sensitivity as 0.03mV/V kPa. Sensitivity of the fabricated diaphragm and diaphragm with orifice type sensor were relatively high as about 3.5mV/V kPa, 1.5mV/V kPa respectively.

• Journal of the Korean Applied Science and Technology
• /
• v.30 no.2
• /
• pp.197-203
• /
• 2013

The diagnostic assay of calcium ion was sought using a modified sensor with square-wave stripping voltammetry (SWSV) and cyclic voltammetry (CV). In this study, simple graphite pencil was used as working, reference, and auxiliary electrodes. By coating the working electrodes with DNA, their sensitivity was very much improved, and good results were yielded. Moreover, clean seawater was used as an electrolyte solution instead of acid and base electrolytes to lessen the expenses involved in the experiment. The analytical optimum conditions were also examined. These conditions were attained at the low detection limit of $0.6ugL^1$. After that, the results were applied to drinking water of milk contain.

• Journal of the Korean Ceramic Society
• /
• v.27 no.5
• /
• pp.638-644
• /
• 1990

The C3H8 gas sensitivities of SnO2, Pd-SnO2, Pt-SnO2 gas sensor are looked over with the impregnation method of PdCl2, H2PtCl6 solution on SnO2. The Cl- ion due to incomplete decomposition of PdCl2 at 80$0^{\circ}C$ for 30 min decrease the C3H8 gas sensitivity of SnO2, and the sensitivity is increased by the impreganation of H2PtCl6 solution on SnO2 because of its lower decomposition temperature compared with PdCl2. The C3H8 gas sensitivities of Pd-SnO2, Pt-SnO2 impregnated slightly after 1st sintering are larger than that of pure SnO2 sensor because very small amount of Cl- ion exist in sample due to smaller amount of impregnaiton.

• Journal of Sensor Science and Technology
• /
• v.21 no.2
• /
• pp.90-95
• /
• 2012

This paper describes the development of a glucose biosensor based on ion sensitive field effect transistor(ISFET) with a palladium(Pd) modified ion sensing membrane. By adopting Pd as a hydrogen sensitive layer and integrating a screen-printed reference electrode, the sensitivity and stability were considerably improved due to the high permeability and selectivity of the Pd hydrogen selective membrane. This paper suggests a new approach for realizing portable and highly sensitive glucose sensors for diagnosing and treating diabetes mellitus.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2005.05a
• /
• pp.237-240
• /
• 2005

The demand of micro electrical mechanical system (MEMS) bio/chemical sensor is rapidly increasing. To prevent the contamination of sensing area, a filtration system is required in on-chip total analyzing MEMS bio/chemical sensor. A nano-filter was mainly applied in some application detecting submicron feature size bio/chemical products such as bacteria, fungi and so on. We suggested a simple nano-filter fabrication process based on replication process. The mother pattern was fabricated by holographic lithography and reactive ion etching process, and the replication process was carried out using polymer mold and UV-imprinting process. Finally the nano-filter is obtained after removing the replicated part of metal deposited replica. In this study, as a practical example of the suggested process, a nano-dot array was replicated to fabricate nano-filter fur bacteria sensor application.