• 한국수소및신에너지학회논문집
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• 제22권4호
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• pp.504-511
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• 2011

Nano-sized Sn powder was prepared by pulsed wire evaporation method. The Sn powder and carbon black were charged in jar and ball milled. The milling time was varied with 10 min., 1h, 2h, and 4h, respectively. The milled powders were dried and the shape and size were observed by FE-SEM. Nano-sized Sn powders were plastic-deformed and agglomerated by impact force of balls and heat generated during the SPEX milling. The agglomerated Sn powder also consisted of many nano-sized particles. Initial discharge capacities of milled Sn electrode powders with carbon powder were milled for 10 min., 1h, 2h, and 4h were 787, 829, 827, and 816 mAh/g, respectively. After 5 cycle, discharge capacities of Sn electrode powders with carbon powder milled for 10 min., 1h, 2h, and 4h decreased as 271, 331, 351, and 287 mAh/g, respectively. Because Sn electrode powders milled for 2h constist of uniform and fine size, the cyclability of coin cell made of this powders is better than others.

• 한국초전도ㆍ저온공학회논문지
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• 제21권1호
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• pp.15-17
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• 2019

We present terahertz optical properties of $GdBa_2Cu_3O_{7-x}$ (GdBCO) superconducting thin films. GdBCO films with a thickness of about 105 nm were grown on a $LaAlO_3$ (LAO) single crystal substrate using a conventional pulsed laser deposition (PLD) technique. Using an Ar ion milling system, the thickness of the GdBCO film was reduced to 58 nm, and its surface was also smoothened. Terahertz (THz) transmission spectra through two different GdBCO films are measured over the range between 0.2 and 1.5 THz using THz time domain spectroscopy. Interestingly, the THz transmission of the thinner GdBCO film has been increased to six times larger than that of the thicker one, while the thinner film is still maintaining its superconducting property at below 90 K.

• Design & Manufacturing
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• 제11권3호
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• pp.19-24
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• 2017

In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.

• 한국산학기술학회논문지
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• 제9권3호
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• pp.615-620
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• 2008

저저항 배선층으로 쓰일 수 있는 선폭 $0.5{\mu}m$, 70nm 높이의 폴리실리콘 패턴에 $10nm-Ni_{1-x}Co_x$(x=0.2, 0.6, and 0.7)의 금속 박막을 열증착법으로 성막하고 쾌속 열처리 (RTA) 온도를 $700^{\circ}C$와 $1000^{\circ}C$로 달리하여 실리사이드화 공정을 실시하여 상부에 니켈코발트 실리사이드를 형성시켰다 이때의 미세구조를 확인하고 FIB (focused ion beam)를 활용하여 저에너지 조건 (30kV-10 pA-2 sec)에서 배선층을 국부적으로 조사하여 실리사이드 층의 선택적 제거 가능성을 확인하였다. 실험 범위내의 실리사이드화 온도 범위와 NiCo 상대 조성 범위에서 주어진 FIB 조건으로 선택적으로 저저항 실리사이드 층의 제거가 가능하였으나, 상대적으로 Co 함유량이 많은 실리사이드는 배선층 내부에서 기포가 발생하였으며, 이러한 기포로 인해 실리사이드 층만의 국부적 제거는 불가능하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1194-1197
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• 2005

Micro nozzle is employed as a dynamic passive valve in micro fluidic devices. Micro nozzle array is used in micro droplet generation in bio-medical applications and propulsion device for actuating satellite and aerospace ship in vacuum environments. Aperture angle and the channel length of the micro nozzle affect its retification efficiency, and thus it is needed to produce micro nozzle precisely. MEMS process has a limit on making a micro nozzle with high-aspect ratio. Reactive ion etching process can make high-aspect ratio structure, but it is difficult to make the complex shape. Focused ion beam deposition has advantage in machining of three-dimensional complex structures of sub-micron size. Moreover, it is possible to monitor machining process and to correct defected part at simultaneously. In this study, focused ion beam deposition was applied to micro nozzle production.

• Applied Microscopy
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• 제40권4호
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• pp.177-183
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• 2010

집속이온빔장치(focused ion beam, FIB)는 전자보다 무거운 양이온빔을 이용하여 시료를 10~100 nm 정도로 깎아 낼 수 있는 장비로 주로 재료분야에서 활용되어 왔다. 최근 세계적으로 의생물 분야에서의 활용이 점차 늘어나고 있는 추세에 있어 국내연구자들의 이해를 돕기 위해 간단히 기기의 메커니즘과 그 활용예를 기술 하고자 한다. FIB에 주로 사용되는 갈륨(Ga)빔의 특성 때문에 시료의 표면을 효과적으로 쳐 낼 수 있고, 전계 방사형 주사전자현미경(FESEM)을 이용하면 그 표면의 영상을 얻을 수 있다. 이 두 가지 시스템을 하나의 시스템으로 묶어낸 것을 dual beam system이라고 한다. 최근 이러한 시스템을 이용하여 효모, 병원균에 감염된 식물 등이 소개되었으며, 통상적으로 경도가 높아 처리하기 힘든 상아나 어패류의 껍질 등의 시료를 효과적으로 분석한 연구도 있다. 또한 FIB를 이용한 밀링과 FESEM을 이용한 절단면 촬영을 반복하여 얻는 영상을 이용하여 신경계의 연결망을 재구성하려는 연구가 활발하게 진행되고 있다. FIB/FESEM dual beam은 의생물학 분야의 다양한 연구에 활용될 수 있는 유용한 도구며, 의생물 시료의 3차원 연구에 크게 기여할 수 있을 것으로 판단된다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.241-245
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• 2007

The residual stress in axial stress in the axial direction of the steel filaments has been measured by using a method based on the combination of the focused ion beam (FIB) and high resolution strain mapping program (VIC-2D). That is, the residual stress was calculated from the measured displacement field before and after the introduction of a slot along the steel filaments. The displacement was obtained by the digital correlation analysis of high-resolution scanning electron micrographs, while the slot was introduced by FIB milling with low energy beam. The present measurement revealed that the residual stress within 8% of the magnitude was persistent in the steel filaments fabricated.

• Bulletin of the Korean Chemical Society
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• 제31권5호
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• pp.1331-1335
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• 2010

A novel spherical carbon composite material, in which nanosized disordered carbons are dispersed in a soft carbon matrix, has been prepared and investigated for use as a potential anode material for lithium ion batteries. Disordered carbons were synthesized by ball milling natural graphite in air. The composite was prepared by mixing the ball-milled graphite with petroleum pitch powder, pelletizing the mixture, and pyrolyzing the pellets at $1200^{\circ}C$ in an argon flow. The ballmilled graphite consists of distorted nanocrystallites and amorphous phases. In the composite particle, nanosized flakes are uniformly distributed in a soft carbon matrix, as revealed by X-ray diffractometer (XRD) and transmission electron microscopy (TEM) experiments. The composite is compatible with a pure propylene carbonate (PC) electrolyte and shows high rate capability and excellent cycling performance. The electrochemical properties are comparable to those of hard carbon.

• 대한기계학회논문집A
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• 제30권3호
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• pp.328-333
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• 2006

Movable nanometer-scale structures are fabricated by selective etching of single crystalline Au nanoplates. The nanostructures have arbitrary shapes like gear and alphabet 'A' with in-plane size less than 500 m and thickness of $25\sim60nm$. They could be moved successfully on the substrate using a nanornanipulator installed in a focused ion beam system. Our approach is expected to be useful in fabricating various kinds of nanocomponents which can play a role as building blocks for the sophisticated nanodevices or micromachines.

• 한국세라믹학회지
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• 제34권8호
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• pp.834-842
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• 1997

Controlled Ca impurity implanted inner crack-like pore in the high purity alumina single crystal, sapphire, had been created by micro-fabrication technique, which includes ion implantation, photo-lithography, Ar ion milling, and hot press technique. The morphological change and the healing of cracklike pore in Ca doped high purity single crystal alumina, sapphire, during high temperature heat treatment in vacuum were observed using optical microscopy. The dot-like surface roughening was developed and hexagon like crystal appeared on inner surface of crack-like pore after heat treatment. Bar type crystals, probably CaO.6Al2O3, were observed on the inner surface after 1 hour heat treatment at 1, 50$0^{\circ}C$, but this bar type crystal disappeared after 1 hour heat treatment at 1, $600^{\circ}C$. This disappearance means that there should be a little increase of Ca solubility limit to alumina at this temperatures.