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http://dx.doi.org/10.3795/KSME-A.2006.30.3.328

Fabrication of Movable Nanostructures by Selective Etching of Nanoplates  

Yun Yong-Ju (한국표준과학연구원 전략기술연구부, 서강대학교 물리학과)
Ah Chil-Seong (한국표준과학연구원 전략기술연구부, 한국전자통신연구원 IT융합부품연구소)
Yun Wan-Soo (한국표준과학연구원 전략기술연구부)
Ha Dong-Han (한국표준과학연구원 전략기술연구부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.30, no.3, 2006 , pp. 328-333 More about this Journal
Abstract
Movable nanometer-scale structures are fabricated by selective etching of single crystalline Au nanoplates. The nanostructures have arbitrary shapes like gear and alphabet 'A' with in-plane size less than 500 m and thickness of $25\sim60nm$. They could be moved successfully on the substrate using a nanornanipulator installed in a focused ion beam system. Our approach is expected to be useful in fabricating various kinds of nanocomponents which can play a role as building blocks for the sophisticated nanodevices or micromachines.
Keywords
Nanoplate; Nanocomponent; Focused ion Beam; Selective Etching; Lithography; Ion Milling;
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