• Title/Summary/Keyword: Ion Implantation

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PL characteristics of silicon-nanocrystals as a function of temperature (온도에 따른 실리콘 나노결정 PL 특성)

  • Kim, Kwang-Hee;Kim, Kwang-Il;Kwon, Young-Kyu;Lee, Yong-Hyun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.93-93
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    • 2003
  • Photoluminescence(PL) properties of Silicon nanocrystals (nc-Si) as a function of temperature is reported to consider the mechanism of PL. Nc-Si has been made by $Si^+$ ion-implantation into thermal $SiO_2$ and subsequent annealing. And after gold had been diffused at the same samples above, the resultant PL spectra has been compared to the PL spectra from the non-gold doped nc-Si. PL peak energy variation from nc-Si is same with the variation of energy bandgap of bulk silicon as temperature changes from 6 K to room temperature. This result may mean nc-Si is still indirect transition material like bulk silicon. Gold doped nc-Si reveals short peak wavelength of PL spectrum than gold undoped one. PL peak shift through gold doing process shows clearly the PL mechanism is not from defect or interface states. PL intensity increases from 6K to a certain temperature and then decrease to room temperature. This characteristic with temperature shows that phonon have a role for the luminescence as theory explains that electron and hole can be recombined radiatively by phonon's assist in nc-Si, which is almost impossible in bulk silicon. Therefore luminescence is observed in nc-Si constructed less than a few of unit cell and the peak energy of luminescence can be higher than the bulk bandgap energy by the bandgap widening effect occurs in nanostructure.

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Newly Developed BioDegradable Mg Alloys and Its Biomedical Applications

  • Seok, Hyeon-Gwang;Kim, Yu-Chan;Yang, Gui Fu;Cha, Pil-Ryeong;Jo, Seong-Yun;Yang, Seok-Jo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.55.2-55.2
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    • 2012
  • Intensive theoretical and experimental studies have been carried out at Korean Institute of Science and Technology (KIST) on controlling the bio absorbing rate of the Mg alloys with high mechanical strength through tailoring of electrochemical potential. Key technology for retarding the corrosion of the Mg alloys is to equalize the corrosion potentials of the constituent phases in the alloys, which prevented the formation of Galvanic circuit between the constituent phases resulting in remarkable reduction of corrosion rate. By thermodynamic consideration, the possible phases of a given alloy system were identified and their work functions, which are related to their corrosion potentials, were calculated by the first principle calculation. The designed alloys, of which the constituent phases have similar work function, were fabricated by clean melting and extrusion system. The newly developed Mg alloys named as KISTUI-MG showed much lower corrosion rate as well as higher strength than previously developed Mg alloys. Biocompatibility and feasibility of the Mg alloys as orthopedic implant materials were evaluated by in vitro cell viability test, in vitro degradation test of mechanical strength during bio-corrosion, in vivo implantation and continuous observation of the implant during in vivo absorbing procedures. Moreover, the cells attached on the Mg alloys was observed using cryo-FIB (focused ion beam) system without the distortion of cell morphology and its organ through the removal of drying steps essential for the preparation of normal SEM/TEM samples. Our Mg alloys showed excellent biocompatibility satisfying the regulations required for biomedical application without evident hydrogen evolution when it implanted into the muscle, inter spine disk, as well as condyle bone of rat and well contact interface with bone tissue when it was implanted into rat condyle.

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Enhancement of 1,3-Dihydroxyacetone Production from Gluconobacter oxydans by Combined Mutagenesis

  • Lin, Xi;Liu, Sha;Xie, Guangrong;Chen, Jing;Li, Penghua;Chen, Jianhua
    • Journal of Microbiology and Biotechnology
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    • v.26 no.11
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    • pp.1908-1917
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    • 2016
  • Wild strain L-6 was subjected to combined mutagenesis, including UV irradiation, atmospheric and room temperature plasma, and ion beam implantation, to increase the yield of 1,3-dihydroxyacetone (DHA). With application of a high-throughput screening method, mutant Gluconobacter oxydans I-2-239 with a DHA productivity of 103.5 g/l in flask-shake fermentation was finally obtained with the starting glycerol concentration of 120 g/l, which was 115.7% higher than the wild strain. The cultivation time also decreased from 54 h to 36 h. Compared with the wild strain, a dramatic increase in enzyme activity was observed for the mutant strain, although the increase in biomass was limited. DNA and amino acid sequence alignment revealed 11 nucleotide substitutions and 10 amino acid substitutions between the sldAB of strains L-6 and I-2-239. Simulation of the 3-D structure and prediction of active site residues and PQQ binding site residues suggested that these mutations were mainly related to PQQ binding, which was speculated to be favorable for the catalyzing capacity of glycerol dehydrogenase. RT-qPCR assay indicated that the transcription levels of sldA and sldB in the mutant strain were respectively 4.8-fold and 5.4-fold higher than that in the wild strain, suggesting another possible reason for the increased DHA productivity of the mutant strain.

Analysis of a Novel Elevated Source Drain MOSFET with Reduced Gate-Induced Drain Leakage and High Driving Capability (Gate-Induced Drain Leakage를 줄인 새로운 구조의 고성능 Elevated Source Drain MOSFET에 관한 분석)

  • Kim, Gyeong-Hwan;Choe, Chang-Sun;Kim, Jeong-Tae;Choe, U-Yeong
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.6
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    • pp.390-397
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    • 2001
  • A novel self-aligned ESD (Elevated Source Drain) MOSFET structure which can effectively reduce the GIDL (Gate-Induced Drain Leakage) current is proposed and analyzed. The proposed ESD structure is characterized by sidewall spacer and recessed-channel depth which are determined by dry-etching process. Elevation of the Source/Drain extension region is realized so that the low-activation effect caused by low-energy ion implantation can be avoided. Unlike the conventional LDD structures, it is shown that the GIDL current of the ESD structure is suppressed without sacrificing the maximum driving capability. The main reason for the reduction of GIDL current Is the decreased electric field at the point of the maximum band-to-band tunneling as the peak electric field is shifted toward the drain side.

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Fabrication, Mesurement and Evaluation of Silicon-Gate n-well CMOS Devices (실리콘 게이트 n-well CMOS 소자의 제작, 측정 및 평가)

  • Ryu, Jong-Seon;Kim, Gwang-Su;Kim, Bo-U
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.21 no.5
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    • pp.46-54
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    • 1984
  • A silicon-gate n-well CMOS process with 3 $\mu$m gate length was developed and its possibility for the applications was discussed,. Threshold voltage was easily controlled by ion implantation and 3-$\mu$m gate length with 650 $\AA$ oxide shows ignorable short channel effect. Large value of Al-n+ contact resistance is one of the problems in fabrications of VLSI circuits. Transfer characteristics of CMOS inverter is fairly good and the propagation delay time per stage in ring oscillator with layout of (W/L) PMOS /(W/L) NMOS =(10/5)/(5/5) is about 3.4 nsec. catch-up occurs on substrate current of 3-5 mA in this process and critically dependent on the well doping density and nt-source to n-well space. Therefore, research, more on latch-up characteristics as a function of n-well profile and design rule, especially n+-source to n-well space, is required.

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플라즈마 이온주입(Plasma Immersion Ion Implantation, PIII) 방법으로 Boron 도핑된 실리콘 기판의 도펀트 활성화와 기판손상에 관한 연구

  • 이기철;유정호;고대홍;강호인;김영진;김재훈
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.184-184
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    • 1999
  • 반도체소자의 고집적, 미세화에 따라 MOSFET 소자에서의 고농도, 미세접합이 요구되고 있다. 이러한 고농도, 미세접합을 형성하기 위하여 기존의 저에너지 이온주입법을 대체 또는 병행할 목적으로 플라즈마 이온주입방법이 활발히 연구되고 있다. 본 연구에서는 플라즈마 이온주입방법을 이용하여 (100) 실리콘 기판에 보론을 주입후 열처리하여 형성된 p+층의 도펀트의 활성화와 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. 본 실험에서 (100)실리콘 기판에 도핑할 소스 가스로 BF3을 주입하고, D.C. pulse 플라즈마 도핑시스템을 사용하여 플라즈마 내의 보론이온을 웨이퍼 홀더에 -1~-5kV의 인가된 음전압에 의해 가속시키어 실리콘 웨이퍼에 주입하였다. 주입에너지 -1kV, -3kV, -5kV와 1$\times$1015, 3$\times$1515의 dose로 주입된 실리콘 기판을 급속가열방식(RTP)을 사용하여 $600^{\circ}C$~110$0^{\circ}C$의 온도구간에서 10초와 30초로 열처리하여 도펀트의 활성화와 미세접합을 형성한 후 SIMS, four-point probe, Hall 측정, 그리고 FT-IR을 이용하여 플라즈마 이온주입된 도펀트의 거동과 활성화율을 관찰하였고 FT-IR과 TEM의 분석을 통하여 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. SIMS, four-point probe, Hall 측정, 그리고 FT-IR의 분석으로 열처리 온도의 증가에 따라 도펀트의 활성화율이 증가하였고, 이온주입 에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose를 증가시키면 접합깊이가 증가함을 관찰하였다. 이온주입으로 인한 기판손상의 분석을 광학적 방법인 FT-IR과 미세구조를 분석할 수 있는 TEM을 이용하여 분석하였다. 이온주입으로 인한 dislocation이나 EOR(End Of Range)과 같은 extended defect가 없었고, 이온주입으로 인한 비정질층도 없는 p+층을 얻을수 있었다.

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Klotho : Expression and Regulation at the Maternal-Conceptus Interface in Pigs

  • Choi, Yohan;Seo, Heewon;Shim, Jangsoo;Hyun, Sang-Hwan;Lee, Eunsong;Ka, Hakhyun
    • Journal of Embryo Transfer
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    • v.29 no.4
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    • pp.375-383
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    • 2014
  • Klotho (KL) is a single transmembrane protein composed of KL1 and KL2 repeats possessing ${\beta}$-glucuronidase activity and maintains calcium homeostasis in physiological state. It has been implicated in pigs that calcium is important for the establishment and maintenance of pregnancy, and our previous study has shown that transient receptor potential vanilloid type 6 (TRPV6), a calcium ion transporter, is predominantly expressed in the uterine endometrium during pregnancy in pigs. However, expression and function of KL in the uterine endometrium has not been determined in pigs. Thus, the present study determined expression and regulation of KL in the uterine endometrium during the estrous cycle and pregnancy in pigs. Real-time RT-PCR analysis showed that levels of KL mRNA decreased between Days 12 to 15 of the estrous cycle, and its expression showed a biphasic manner during pregnancy. KL mRNA was expressed in conceptuses and in chorioallantoic tissues during pregnancy. Explant culture study showed that expression levels of KL were not affected by treatment of steroid hormones or interleukin-1beta during the implantation period. Furthermore, levels of KL mRNA in the uterine endometrium from gilts carrying somatic cell nuclear transfer (SCNT)-derived embryos were significantly lower than those from gilts carrying natural mating-derived embryos on Day 12 of pregnancy. These results exhibited that KL was expressed at the maternal-conceptus interface in a pregnancy status- and stage-specific manner, and its expression was affected by SCNT procedure, suggesting that KL may play an important role in the establishment and maintenance of pregnancy in pigs.

Optical properties of epitaxial $Gd_2$O_3:EU^{3+}$luminescent thin films depending on crystallinity ($Gd_2$O_3:EU^{3+}$ 형광체 박막의 결정성에 따른 발광특성 연구)

  • 장문형;최윤기;정권범;황보상우;장홍규;노명근;조만호;손기선;김창해
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.275-280
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    • 2003
  • Epitaxial Gd$_2O_3:Eu^{3+}$luminescent thin films have been grout on Si(III) substrates using ionized Cluster Beam Deposition (ICBD). After the film growing, they were implanted and post annealed to change the crystal structure. The initial growth stage was monitored by using in-situ Reflection High Energy Electron Diffraction (RHEED). The formed crystal structure was identified with X-ray diffraction (XRD) technique and Fourier transform infrared (FT-R) spectroscopy. The electronic states variations were investigated by Near Edge X-ray Absorption Fine Structure (NEXAFS). Photoluminescence (PL), Cathodoluminescence (CL). and Vacuum ultraviolet (VUV) spectrum were used for examining the optical properties. We report the optical property changes depending on crystal structure and the electronic states.

Thermal and Chemical Quenching Phenomena in a Microscale Combustor (II)- Effects of Physical and Chemical Properties of SiOx(x≤2) Plates on flame Quenching - (마이크로 연소기에서 발생하는 열 소염과 화학 소염 현상 (II)- SiOx(x≤2) 플레이트의 물리, 화학적 성질이 소염에 미치는 영향 -)

  • Kim Kyu-Tae;Lee Dae-Hoon;Kwon Se-Jin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.30 no.5 s.248
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    • pp.405-412
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    • 2006
  • In order to realize a stably propagating flame in a narrow channel, flame instabilities resulting from flame-wall interaction should be avoided. In particular flame quenching is a significant issue in micro combustion devices; quenching is caused either by excessive heat loss or by active radical adsorptions at the wall. In this paper, the relative significance of thermal and chemical effects on flame quenching is examined by means of quenching distance measurement. Emphasis is placed on the effects of surface defect density on flame quenching. To investigate chemical quenching phenomenon, thermally grown silicon oxide plates with well-defined defect distribution were prepared. ion implantation technique was used to control defect density, i.e. the number of oxygen vacancies. It has been found that when the surface temperature is under $300^{\circ}C$, the quenching distance is decreased on account of reduced heat loss; as the surface temperature is increased over $300^{\circ}C$, however, quenching distance is increased despite reduced heat loss effect. Such abberant behavior is caused by heterogeneous surface reactions between active radicals and surface defects. The higher defect density, the larger quenching distance. This result means that chemical quenching is governed by radical adsorption that can be parameterized by oxygen vacancy density on the surface.

Temperature dependence of Heteroeptaxial $Y_2O_3$ films grown on Si by ionized cluster beam deposition

  • Cho, M.-H.;Ko, D.-H.;Whangbo, S.W.;Kim, H.B.;Jeong, K.H.;Whang, C.N.;Choi, S.C.;Cho, S.J.
    • Journal of the Korean Vacuum Society
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    • v.7 no.s1
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    • pp.57-77
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    • 1998
  • Heteroepitaxial $Y_2O_3$ films were grown on a Si(111) substrate by ionized cluster beam deposition(ICBD) in ultra high vacuum, and its qualities such as crystllitnity, film stress, and morphological characteristics were investigated using the various measurement methods. The crystallinity was investigated by x-ray diffraction (XRD) and reflection high energy electron diffraction (RHEED). Interface crystallinity was also examined by Rutherford backscattering spectroscopy(RBS) channeling, transmission electron microscopy(TEM). The stress of the films was measured by RBS channeling and XRD. Surface and interface morphological characteristics were investigated by atomic force microscopy (AFM) and x-ray scattering method. Comparing the interface with the surface characteristics, we can conclude that many defects at the interface region were generated by interface reaction between the yttrium metal and SiO2 layer and by ion beam characteristic such as shallow implantation, so that they influenced the film qualities. The film quality was dominantly depended on the characteristic temperature range. In the temperature range from $500^{\circ}C$ to $600^{\circ}C$, the crystallinity was mainly improved and the surface roughness was drastically decreased. On the other hand, in the temperature range from $600^{\circ}C$ to $700^{\circ}C$, the compressive stress and film density were dominantly increased, and the island size was more decreased. Also the surface morphological shape was transformed from elliptical shape to triangular. The film stress existed dominantly at the interface region due to the defects generation.

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