• Title/Summary/Keyword: Ion Gun

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Optical properties of Nb2O5 thin films prepared by ion beam assisted deposition (이온빔 보조 증착 Nb2O5 박막의 광학적 특성)

  • 우석훈;남성림;정부영;황보창권;문일춘
    • Korean Journal of Optics and Photonics
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    • v.13 no.2
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    • pp.105-112
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    • 2002
  • We studied the optical and structural properties of conventional and ion-beam-assisted-deposition (IBAD) Nb$_2$O$_{5}$ films which were evaporated by an electron beam gun. The vacuum-to-air spectral shift and the cross sectional SEM images of the Nb$_2$O$_{5}$ films were investigated. The results show that the IBAD Nb$_2$O$_{5}$ films have a higher packing density than the conventional Nb$_2$O$_{5}$ films. The average refractive index of IBAD Nb$_2$O$_{5}$ films was increased, while the extinction coefficient was decreased compared with the conventional films. As the oxygen flow was increased, the average refractive index and extinction coefficient of the conventional and IBAD films decreased. Both the conventional and IBAD Nb$_2$O$_{5}$ films showed inhomogeneity in refractive index, and the degree of inhomogeneity of the IBAD Nb$_2$O$_{5}$ films became larger as the ion current density was increased. All Nb$_2$O$_{5}$ films were found to be amorphous by x-ray diffraction (XRD) analysis, and hence the crystal structure of Nb$_2$O$_{5}$ films was not changed by IBAD.

Electrochemical Decomposition Characteristics of Ammonia by the Catalytic Oxide Electrodes (촉매성 산화물 전극에 의한 암모니아의 전기 화학적 분해 특성)

  • Kim, Kwang-Wook;Kim, Young-Jun;Kim, In-Tae;Park, Gun-Ill;Lee, Eil-Hee
    • Korean Chemical Engineering Research
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    • v.43 no.1
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    • pp.9-15
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    • 2005
  • In order to know the electrochemical decomposition characteristics of ammonia to nitrogen, this work has studied several experimental variables on the electrolytic ammonia decomposition. The effects of pH and chloride ion at $IrO_2$, $RuO_2$, and Pt anodes on the electrolytic decomposition of ammonia were compared, and the existence of membrane equipped in the cell and the changes of the current density, the initial ammonia concentration and so on were investigated on the decomposition. The performances of the electrode were totally in order of $RuO_2{\approx}IrO_2>Pt$ in the both of acid and alkali conditions, and the ammonia decomposition was the highest at a current density of $80mA/cm^2$, over which it decreased, because the adsorption of ammonia on the electrode surface was hindered due to the evolution of oxygen. The ammonia decomposition increased with the concentration of chloride ion in the solution. However, the increase became much dull over 10 g/l of chloride ion. The $RuO_2$ electrode among the tested electrodes generated the most OH radicals which could oxidized the ammonium ion at pH 7.

전자빔의 조사가 직접이온빔으로 증착하는 CN 박막의 물성에 미치는 영향

  • 김용환;이덕연;김인교;백홍구
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.87-87
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    • 2000
  • 이온빔 증착에 있어서 전자의 조사가 이온빔 증착기구에 미치는 영향에 대한 연구는 지금까지 보고 되어지지 않았다. 특히 전자의 조사가 증착층의 물성에 영향을 미칠 수 있느지에 대하여 정량적인 결과를 실험을 통하여 제시한 보고는 내가 아는 한 존재하지 않는다. 한편 이와같이 박막 증착에 있어서 전하가 증착되어지는 박막의 물성에 미칠 수 있는 영향에 대해서는 많은 과학자들의 관심사이기도 하다. 본 실험에서는 kaufman ion gun을 이용하여 질소 양이온을, 그리고 Cs+ ion gun을 이용하여 탄소 음이온을 조사하고 이들을 이용하여 CN 박막을 증착하였다. 질소 양이온의 에너지는 100eV, 이온밀도는 70$\mu$A/$\textrm{cm}^2$로 고정하고, 탄소 이온빔(80$\mu$A/$\textrm{cm}^2$)의 에너지를 200cV까지 변화시켜가며 증착하였다. 이때 증착층의 특성에 음 전하의 효과를 유발하기 위하여 350~360$\mu$A/$\textrm{cm}^2$의 전자빔을 이온빔 증착과 동시에 추가로 조사하였고 이의 특성을 전자빔을 조사하지 않고 증착한 CN 박막의 특성과 서로 비교하였다. 또한 증착 표면의 전하 축적에 의한 입사 이온빔의 에너지 감소에 의한 영향을 방지하기 위하여 증착되는 Si 기판에 HF (300kHz, 3.5V) bias를 가하여 주었다. 전자빔의 조사와 동시에 이루어진 CN 박막의 증착은 입사하는 탄소 음 이온빔의 에너지가 80eV에서 180eV 사이일때 원자밀도의 향상과 질소함량의 증가, 그리고 sp2C-N 결합대비 sp3C-N 결합의 향상이 이루어졌음을 확인하였다. 이는 이온빔 충돌에 의하여 피코쵸 정도의 시간대에 이루어지는 박막내의 collision cascade 영역에 이에 의하여 생긴 결함부위에 유입된 음 전하가 위치하면 전하주위의 원자와 polarization을 형성하고 이에 의하여 탄소와 질소의 결합을 형성하는데 필요한 자유에너지의 감소를 수반하는 방향으로 원자의 배열이 이루어지기 때문으로 사료된다. 이와같이 이온빔 에너지가 이온빔 증착 기구의 주요한 인자로 널리 인식되고 있는 kinetic bonding process에 있어서 이온 에너지에 의하여 activation energy barrier를 넘은후, 전자의 조사가 자유에너지를 낮추는 방향으로 최종 결합경로를 조절할 수 있기 때문에 이온빔 증착을 조절할 수 있는 또 하나의 주요한 인자로 받아들여질 수 있으리라 판단된다. 이온빔 프로세스에 의한 DLC 혹은 탄소관련 필름을 형성하는데 있어서 입사 이온빔의 에너지에 의하여 수반되는 thermal spike 혹은 외부 열원에 의한 가열은 박막층의 흑연화를 수반하기 때문에 박막의 sp3 특성을 향상시키기 위하여 회피하여야 할 요소이지만 thermal spike에 의한 국부 영역의 가열과 같은 불가피한 인자가 존재하는 상황에서 전자에 의한 추가 전하의 조사에 의한 최종결합경로의 선택적 조절은 박막의 화학적 결합과 물리적 특성을 향상시킬 수 있는 중요한 방법이 될 수 있다고 판단된다.

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Hydrochemical Characteristics of Deep Groundwater at Surak-ri, Nonsan-gun, Chungnam Province, Korea (충남 논산군 수락리 일대 심부지하수의 수질특성)

  • Im, HyunChul;Cho, ByongWook
    • Journal of the Korean Geophysical Society
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    • v.7 no.2
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    • pp.113-120
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    • 2004
  • Hydrochemical characteristics of deep groundwater at Surak-ri, Nonsan-gun, Chungnam Province was explained by major ion concentration, water type, and phase stability diagram. The area is composed of meta-sedimentary rock and quartz pophyry. The 5 boreholes where deep groundwater was sampled and analyzed are located on the meta-sedimentary rocks and drilling depth range of the wells is from 554 m to 928 m. pH, TDS, Na, and SiO2 values are high in the groundwater from meta-sedimentary area intruded by quartz pophyry, while Ca is high in the groundwater from meta-sedimentary area. K and Mg concentrations are low but F concentration is high both groundwater. The content of major anions is in the order of CO3(HCO3)>Cl>SO4(F) in both geology, while that of major cations shows the order of Na>Ca>K(Mg) in meta-sedimentary area intruded by quartz porphyry and a>Na>Mg>Na in meta-sedimentary area. Based on the phase equilibrium in the systems Na2O-Al2O3-SiO2-H2O and K2O-Al2O3-SiO2-H2O, the groundwater is saturated with respect to Quartz and more evolved compared with the natural mineral water. It is concluded that chemical evolution in the groundwater from meta-sedimentary area intruded by quartz porphyry, is nearly saturated with respect to feldspar, while the groundwater from meta-sedimentary area continue to proceed with increasing pH by reaction of feldspar.

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Effect of Seed-layer on the Crystallization and Electric Properties of SBN60 Thin Films (SBN60 박막의 결정화 및 전기적 특성에 관한 씨앗층의 영향)

  • Jang, Jae-Hoon;Lee, Dong-Gun;Lee, Hee-Young;Jo, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.723-727
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    • 2003
  • [ $Sr_xBa_{1-x}Nb_2O_6$ ] (SBN, $0.25{\leq}x{\leq}0.75$) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient and a nonlinear electro-optic coefficient value. In spite of its advantages, SBN has not been investigated well compared to other ferroelectric materials with perovskite structure. In this study, SBN thin film was manufactured by ion beam sputtering technique using the prepared SBN target in $Ar/O_2$ atmosphere. SBN30 thin film of $1000{\AA}$ was pre-deposited as a seed layer on $Pt(100)/TiO_2/SiO_2/Si$ substrate followed by SBN60 deposition up to $3000{\AA}$ in thickness. As-deposited SBN60/SBN30 layer was heat-treated at different temperatures of 650, 700, 750, and $800^{\circ}C$ in air, respectively The crystallinity and orientation behavior as well as electric properties of SBN60/SBN30 multi-layer were examined. The deposited layer was uniform and the orientation was shown primarily along (001) plane from XRD pattern. There was no difference in the crystal structure with heat-treatment temperature, but the electric properties depended on the heating temperature and was the best at $750^{\circ}C$. In electric properties of Pt/SBN60/SBN30/Pt thin film capacitor prepared, the remnant polarization (2Pr) value was $15{\mu}C/cm^2$, the coercive field (Ec) 75 kV/cm, and the dielectric constant 1075, respectively.

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Comparison of Learning Techniques of LSTM Network for State of Charge Estimation in Lithium-Ion Batteries (리튬 이온 배터리의 충전 상태 추정을 위한 LSTM 네트워크 학습 방법 비교)

  • Hong, Seon-Ri;Kang, Moses;Kim, Gun-Woo;Jeong, Hak-Geun;Beak, Jong-Bok;Kim, Jong-Hoon
    • Journal of IKEEE
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    • v.23 no.4
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    • pp.1328-1336
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    • 2019
  • To maintain the safe and optimal performance of batteries, accurate estimation of state of charge (SOC) is critical. In this paper, Long short-term memory network (LSTM) based on the artificial intelligence algorithm is applied to address the problem of the conventional coulomb-counting method. Different discharge cycles are concatenated to form the dataset for training and verification. In oder to improve the quality of input data for learning, preprocessing was performed. In addition, we compared learning ability and SOC estimation performance according to the structure of LSTM model and hyperparameter setup. The trained model was verified with a UDDS profile and achieved estimated accuracy of RMSE 0.82% and MAX 2.54%.

Effect of Metal ion on Rancidity of Crude Rapeseed Oil (비정제 유채유의 산패에 미치는 금속이온의 영향)

  • Kim, Youn-Soon;Kim, Youn-Su;Nam, Hyung-Gun;Seo, Gwang-Yeob
    • Journal of environmental and Sanitary engineering
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    • v.24 no.1
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    • pp.33-39
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    • 2009
  • In order to investigate effect of metal ion and antioxidant on rancidity of crude rapeseed oil (CRO), $Fe^{2+}$, $Cu^{2+}$, $Co^{2+}$, $Ni^{2+}$, $Cr^{2+}$, $Sn^{2+}$, $Mn^{2+}$, $Zn^{2+}$, and antioxidants including BHA, Vitamin C, and Tocopherol were used. The specific gravity and refractive index of CRO were $0.92g/cm^3$ and 1.45, respectively. The chromaticities of light, red, and yellow in CRO were 88.6 and 98.7, respectively. Among various fatty acids, Oleic acid (C18:1) concentration was highest, 62.3% and Linoleic acid (C18:2) concentration was 19.16%. In the case of Linolenic acid (C18:3) and Palmitic acid (C16:0), they were 9.88 and 5.2%, respectively. The concentrations of unsaturated fatty acids and saturated fatty acid were 92.2 and 7.8%, respectively. The degree of expediting rancidity of CRO was an order of $Fe^{2+}$> $Cu^{2+}$> $Cr^{2+}$> $Zn^{2+}$> $Ni^{2+}$> $Al^{2+}$> $Mn^{2+}$> $Mn^{2+}$> $Sn^{2+}$> $Co^{2+}$> $Li^{2+}$. Especially, when $Cu^{2+}$ and $Fe^{2+}$ was used, the peroxide value concentration was about 4.0 fold higher than non addition of them. The inhibition effect of rancidity of CRO using antioxidant with $Cu^{2+}$ and $Fe^{2+}$ was an order of BHA> Vitamin C> Tocopherol.

Production and Purification of Alkaline Protease from Streptomyces sp. (Streptomyces속 균주가 생성하는 Alkaline Protease의 생산 및 정제)

  • Choi, Cheong;Chung, Yung-Gun;Sung, Sam-Kyung;Choi, Kwang-Soo;Lee, Jae-Sung;Cho, Young-Je;Kwon, Oh-Jin
    • Microbiology and Biotechnology Letters
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    • v.20 no.2
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    • pp.169-177
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    • 1992
  • An alkaline protease producing microorganism was isolated from soil and identified as Streptomyces griseus HC-1141. The optimum culture condition of Streptomyces griseus HC- 1141 for the production of alkaline protease was as follows; 0.5% casein, 0.05% ammonium chloride, 0.1% ferrous sulfate. 2.0% lactose, pH 8.0 and 84 hrs. The enzyme was purified about 53 folds by ammonium sulfate treatment, DEAE-cellulose ion exchange chromatography and gel filtratioo on Sephadex G-150. The homogeneity of the purified enzyme was verified by polyacrylamide gel electrophoresis. The molecular weight was estimated to be 31,000 on sodium dodecyl sulfate polyacrylamide gel electrophoresis. This enzyme consists of glycine and glutamic acid as major amino acids. The N-terminal and C-terminal residues of the alkaline protease were leucine and histidine respectively.

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Effect of Seed-layer on the Crystallization and Electric Properties of SBN60 Thin Films (SBN60 박막의 결정화 및 전기적 특성에 관한 씨앗층의 영향)

  • Jang, Jae-Hoon;Lee, Dong-Gun;Lee, Hee-Young;Jo, Sang-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.08a
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    • pp.85-88
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    • 2003
  • $Sr_xBa_{1-x}Nb_2O_6$(SBN, $025{\leq}x{\leq}0.75$) ceramic is a ferroelectric material with tetragonal tungsten bronze (TTB) type structure, which has a high pyroelectric coefficient and a nonlinear electro-optic coefficient value. In spite of its advantages, SBN has not been investigated well compared to other ferroelectric materials with perovskite structure. In this study, SBN thin film was manufactured by ion beam sputtering technique using the prepared SBN target in Ar/$O_2$ atmosphere. SBN30 thin film of 500 ${\AA}$ was pre-deposited as a seed layer on Pt(l00)/$TiO_2$/$SiO_2$/Si substrate followed by SBN60 deposition up to 4500 ${\AA}$ in thickness. SBN60/SBN30 layer was deposited at different Oxygen amount of 0, 8.1, 17, and 31.8 sccm, respectively. The crystallinity and orientation behavior as well as electric properties of SBN60/SBN30 multi-layer were examined. The deposited layer was uniform and the orientation was shown primarily along (001) plane from XRD pattern. The crystal structure and the electric properties depended on the Oxygen amount, heating temperature and was the best at O2 = 8.1 seem, $750^{\circ}C$. In electric properties of Pt/SBN60/SBN30/Pt thin film capacitor prepared, the remnant polarization (2Pr) value was 13 ${\mu}C/cm^2$, the coercive field (Ec) 75 kV/cm, and the dielectric constant 1492, respectively.

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A study on machining method about molybdenum alloy micro fixing part for TEM precision specimen. (TEM 정밀 시편 제작용 몰리브덴 합금 미세 고정 부품의 제작을 위한 절삭 가공 방법에 관한 연구)

  • Kim, Ki-Beom;Lee, Chang-Woo;Lee, Hae-Jin;Ham, Min-Ji;Kim, Gun-Hee
    • Design & Manufacturing
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    • v.11 no.3
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    • pp.19-24
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    • 2017
  • In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.