• 센서학회지
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• 제7권3호
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• pp.163-170
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• 1998

플라즈마 이온온도를 측정하기 위해 정전평판형 이온에너지 분석기를 설계 제작하고 에너지 교정 및 에너지 분해능 등의 특성을 조사하였다. 일정한 검출기 위치에서 이온의 에너지에 따른 편향평판전압은 선형성을 보였으며, $53{\sim}103mm$ 사이의 검출기 위치에서 이온에너지에 대한 최대편향평판전압의 기울기는 $1.61{\sim}0.92$로 검출기위치의 증가에 따라 선형적으로 감소하였다. 본 실험 영역에서 에너지 분해능은 약 $4.16{\sim}11.60%$였으며, 검출기 위치 및 이온에너지의 증가에 따라 향상되었다. 상대적 검출효율은 검출기 위치의 증가에 따라 감소하였다. 제작된 분석기를 다목적 플라즈마 발생장치에 설치하여 DC 플라즈마의 이온에너지 스펙트럼을 측정하였다. 방전전압이 320V, 전류가 0.17A인 DC 플라즈마의 이온온도는 $203{\sim}205eV$로 나타났으며 검출기의 위치에 따른 이온온도의 변화는 없었다. 검출기의 위치에 따른 에너지 분해능은 $18{\sim}21%$로 검출기 위치가 증가할수록 향상되었다.

• 한국안전학회지
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• 제14권4호
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• pp.126-134
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• 1999

In this study, plasma source ion implantation was used to improve the wear properties of biocompatible titanium implant. In order to observe the effect of ion energy and dose on wear property of titanium implant, pin-on-disk type wear tests in Hank's solution were carried out. The friction coefficient of ion implanted specimens were increased from 0.47 to 0.65 under high energy and ion dose conditions. As increasing ion energy and ion dose, the amount of wear was reduced.

• 한국전기전자재료학회논문지
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• 제16권3호
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• pp.175-180
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• 2003

As the integrated circuit device shrinks to the deep submicron regime, the ion implantation process with high ion dose has been attracted beyond the conventional ion implantation technology. In particular, for the case of boron ion implantation with low energy and high dose, the stabilization and throughput of semiconductor chip manufacturing are decreasing because of trouble due to the machine conditions and beam turning of ion implanter system. In this paper, we focused to the improved characteristics of processing conditions of ion implantation equipment through the modified deceleration mode. Thus, our modified recipe with low energy and high ion dose can be directly apply in the semiconductor manufacturing process without any degradation of stability and throughput.

• Bulletin of the Korean Chemical Society
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• 제22권8호
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• pp.883-888
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• 2001

We describe an ion-surface scattering apparatus newly developed to investigate the reactive scattering process of low-energy alkali-metal ions at surfaces. The apparatus consists of an alkali-metal ion gun that is rotatable by 360°, a quadrupole mass spectrometer (QMS) with an ion energy analyzer, a sample manipulator with a heating-and-cooling stage, and an ultrahigh vacuum (UHV) chamber that houses these components. Preliminary experimental results obtained from the apparatus are presented on angular and energy distributions of the ions scattered from clean Pt(111) and water-adsorbed Pt surfaces.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.314-317
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• 2004

On 9/5/2003, the planet probe “HAYABUSA” as MUSES-C project was launched by The Institute of Space and Astronautical Science. “HAYABUSA” has microwave discharge ion engines and these engines are characterized by their high efficiency and specific impulse in comparison with chemical engine. A large ion engine can be used as a planet explorer, while a small ion engine can be used as attitude control of small satellite. We have been developing a high thrust density microwave discharge ion engine using “Multi-Monopole Antenna”. The performance of this engine are: ion cost of 344W/A, propellant utilization efficiency of 52% and thrust density of 0.055mN/$\textrm{cm}^2$ for Kr gas flow rate of 2.5sccm, microwave(2.45㎓) power of 32W and acceleration voltage of l.4㎸.

• 전력전자학회논문지
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• 제26권6호
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• pp.421-428
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• 2021

Lithium-ion secondary batteries exhibit advantageous characteristics such as high voltage, high energy density, and long life, allowing them to be widely used in both military and daily life. However, the lithium-ion secondary battery does have its limitation; for example, the output power and capacity are readily decreased due to the increased internal impedance during discharging at a lower temperature (-32℃, military requirement). Also, during charging at a lower temperature, lithium dendrite growth is accelerated at the anode, thereby decreasing the battery capacity and life as well. This paper describes a study that involves increasing the internal temperature of lithium-ion secondary battery by energy circulation operation in a low-temperature environment. The energy circulation operation allows the lithium-ion secondary battery to alternately charge and discharge, while the internal resistance of lithium-ion battery acts as a heating element to raise its own temperature. Therefore, the energy circulation operation method and device were newly designed based on the electrochemical impedance spectroscopy of the lithium-ion secondary battery to mediate the battery performance at a lower temperature. Through the energy circulation operation of lithium ion secondary battery, as a result of the heat generated from internal resistance in an extremely low-temperature environment, the temperature of the lithium-ion secondary battery increased by more than 20℃ within 10 minutes and showed a 75% discharging capacity compared with that at room temperature.

• 전기학회논문지
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• 제56권12호
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• pp.2173-2178
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• 2007

Dynamics of plasma sheath was analyzed using simple ion fluid model with poison equation. Incident ion current, energy, potential distribution and space charge density profile were calculated as a function of time. The effects of initial floating sheath on the evolution of biased sheath were compared with ideal matrix sheath. The effects of finite rising time of pulse bias voltage on the ion current and energy was studied. The influence of surface charging on the evolution of sheath was also investigated

• 반도체디스플레이기술학회지
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• 제13권3호
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• pp.39-43
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• 2014

The effect of electrode charging on the ion energy distribution (IED) was investigated in the dual-frequency capacitively coupled plasma source which was powered of 100 MHz RF at the top electrode and 400 kHz bias on the bottom electrode. The charging property was analyzed with the distortion of the measured current and voltage waveforms. The capacitance and the resistance of electrode sheath can change the property of ion and electron charging on the electrode so it is sensitive to the plasma density which is controlled by the main power. The ion energy distribution was estimated by equivalent circuit model, being compared with the measured distribution obtained from the ion energy analyzer. Results show that the low frequency bias power changes effectively the low energy population of ion in the energy distribution.

• Nuclear Engineering and Technology
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• 제41권5호
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• pp.709-714
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• 2009

An ion implanter, which can serve as a metal-ion supply, has been constructed and performance tested. Copper ions are generated and extracted from a Bernas ion source with a heating crucible that provides feed gases to sustain the plasma. Sable arc plasmas can be sustained in the ion source for a crucible temperature in excess of $350^{\circ}C$. Stable extraction of the ions is possible for arc Currents less than 0.3 A. Arc currents increase with the induced power of a block cathode and the transverse field in the ion source. $Cu^+$ ions in the extracted beam are separated using a dipole magnet. A $20{\mu}A$ $Cu^+$ ion current can be extracted with a 0.2 A arc current. The ion current can support a dose of $10^{16}ions/cm^2$ over an area of $15\;cm^2$ within a few hours.

• 한국방사성폐기물학회:학술대회논문집
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• 한국방사성폐기물학회 2004년도 Proceedings of the 4th Korea-China Joint Workshop on Nuclear Waste Management
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• pp.1-11
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• 2004

PAN-4A composite ion exchanger was more selective for Sr ion than other cations and PAN-KCoFC composite ion exchanger has much higher ion exchange capacity for Cs ion than other cations. The ion exchange capacities obtained from Dubinin-Polanyi equation were 3.93 meq/g for Sr ion and 1.50 meq/g for Cs ion using PAN-4A and PAN-KCoFC ion exchangers, respectively. The modified Dubinin-Polanyi model fit the experimental data accurately in multi-component system. The effective surface diffusivities $(D_{s, cff})$ for Sr and Cs ions of PAN-4A and PAN-KCoFC ion exchangers were slightly increased with the different particle sizes.