The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Analysis of Time-Dependent Behavior of Plasma Sheath using Ion Fluid Model

이온유체방정식을 이용한 Plasma Sheath 시변 해석

  • 이호준 (부산대학교 전자전기통신공학부) ;
  • 이해준 (부산대학교 전자전기통신공학부)
  • Published : 2007.12.01
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Abstract

Dynamics of plasma sheath was analyzed using simple ion fluid model with poison equation. Incident ion current, energy, potential distribution and space charge density profile were calculated as a function of time. The effects of initial floating sheath on the evolution of biased sheath were compared with ideal matrix sheath. The effects of finite rising time of pulse bias voltage on the ion current and energy was studied. The influence of surface charging on the evolution of sheath was also investigated

Keywords

References

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