• 반도체디스플레이기술학회지
• /
• 제4권2호
• /
• pp.11-14
• /
• 2005

In plasma processing reactors, it is common practice to control plasma density and ion bombardment energy by manipulating excitation voltage and frequency. In this paper, a dually excited capacitively coupled rf plasma reactor is self-consistently simulated with a three moment model. Effects of phase differences between primary and secondary voltage waves, simultaneously modulated at various combinations of commensurate frequencies, on plasma properties are investigated. The simulation results show that plasma potential and density as well as primary self-dc bias are nearly unaffected by the phase lag between the primary and the secondary voltage waves. The results also show that, with the secondary frequency substantially lower than the primary frequency, secondary self·do bias remains constant regardless of the phase lag. As the secondary frequency approaches to the primary frequency, however, the secondary self-dc bias becomes greatly altered by the phase lag, and so does the ion bombardment energy at the secondary electrode. These results demonstrate that ion bombardment energy can be more carefully controlled through plasma simulation.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 하계학술대회 논문집
• /
• pp.938-941
• /
• 2000

SrBi$_2$Ta$_2$$O_{9}$(SBT) thin films were etched in Ar/SF$_{6}$ and Ar/CHF$_3$gas plasma using magnetically enhanced inductively coupled plasma(MEICP) system. The etch rates of SBT thin film were 1500$\AA$/min in SF$_{6}$/Ar and 1650 $\AA$/min in Ar/CHF$_3$at a rf power of 600W a dc-bias voltage of -l50V. a chamber pressure of 10 mTorr. In order to examine the chemical reactions on the etched SBT thin film surface , x-ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) were examined. In etching SBT thin film with F-base gas plasma, M(Sr. Bi. Ta)-O bonds are broken by Ar ion bombardment and form SrFand TaF$_2$ by chemical reaction with F. SrF and TaF$_2$are removed more easily by Ar ion bombardmentrdment

• 한국표면공학회지
• /
• 제43권3호
• /
• pp.154-158
• /
• 2010

Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
• /
• pp.188-189
• /
• 2006

차세대 반도체 공정을 위한 많은 노력 중 미세가공의 중요성이 날로 증가함에 따라 reactive ion etching (RIE)에 대한 연구 또한 그 중요성이 커지고 있다. 본 논문에서는 RIE 과정에서 etch rate과 uniformity에 영향을 줄 수 있는 요인 4가지 즉, $CHF_3$, $O_2$, chamber pressure, RF power의 변화에 대한 실험 계획법(DOE)을 통해 계획하고, 실험한 후 neural network를 통해 학습함으로서 RIE 공정상의 최적화를 모색하였다.

• 반도체디스플레이기술학회지
• /
• 제22권4호
• /
• pp.131-135
• /
• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• 한국윤활학회:학술대회논문집
• /
• 한국윤활학회 2002년도 제35회 춘계학술대회
• /
• pp.25-33
• /
• 2002

Effect of surface topography on the water wetting nature and micro/nano tribological characteristics of Si-wafer and PTFE was experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun in different argon don dose conditions in a vacuum chamber to change the surface topography, Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribo tester, SPM (scanning prove microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. The water wetting angle of tile ion beam treated samples also increased with the ion dose. Results also showed that micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-triboloSical characteristics showed little dependence on the wetting angles. The water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.

• 산업기술연구
• /
• 제43권1호
• /
• pp.15-23
• /
• 2023

Lithium-ion batteries are predominantly employed in electric vehicles and energy storage devices, offering the advantage of high energy density. However, they are susceptible to efficiency degradation when operated at high temperatures due to their sensitivity to the external environment. In this study, we conducted experiments using an indirect cooling method to prevent thermal runaway and explosions in lithium-ion batteries. The results were validated by comparing them with heat transfer simulations conducted through a commercial finite element analysis program. The experiments included single-cell exothermic tests and cooling experiments on a battery pack with 10 cells connected in series, utilizing 21700 lithium-ion batteries. To block external temperature influences, the experimental environment featured an extrusion method insulation in the environmental chamber. The cooling system, suitable for indirect cooling, was constructed with copper tubes and pins. The heat transfer analysis began by presenting a single-cell heating model using commercial software, which was then employed to analyze the heating and cooling of the battery pack.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
• /
• pp.241.1-241.1
• /
• 2014

The large-area high-power radio-frequency (RF) driven ion sources based on the negative hydrogen (deuterium) ion beam extraction are the major components of neutral beam injection (NBI) systems in future large-scale fusion devices such as an ITER and DEMO. Positive hydrogen (deuterium) RF ion sources were the major components of the second NBI system on ASDEX-U tokamak. A test large-area high-power RF ion source (LAHP-RaFIS) has been developed for steady-state operation at the Korea Atomic Energy Research Institute (KAERI) to extract the positive ions, which can be used for the NBI heating and current drive systems in the present fusion devices, and to extract the negative ions for negative ion-based plasma heating and for future fusion devices such as a Fusion Neutron Source and Korea-DEMO. The test RF ion source consists of a driver region, including a helical antenna and a discharge chamber, and an expansion region. RF power can be transferred at up to 10 kW with a fixed frequency of 2 MHz through an optimized RF matching system. An actively water-cooled Faraday shield is located inside the driver region of the ion source for the stable and steady-state operations of RF discharge. The characteristics and uniformities of the plasma parameter in the RF ion source were measured at the lowest area of the expansion bucket using two RF-compensated electrostatic probes along the direction of the short- and long-dimensions of the expansion region. The plasma parameters in the expansion region were characterized by the variation of loaded RF power (voltage) and filling gas pressure.

• 한국의학물리학회지:의학물리
• /
• 제9권2호
• /
• pp.105-113
• /
• 1998

고에너지 광자선을 발생시키는 의료용선형가속기의 선질은 경우에 따라 변이를 가져오게 된다. 이러한 변이를 정확하게 판정하여 줄 수 있는 방사선측정법의 활용은 매우 중요하다. 보편적으로 광자선의 측정에 있어서 전리함의 사용이 아주 빈번하였으나 전자포탈영상장치(EPID)의 등장은 새로운 방사선측정법에 대한 가능성의 시작을 예견해준다. 실험은 6MV 광자선의 대칭성, Light/Radiation congruence, 그리고 Wedge filter를 통한 간편한 에너지의 변화에측과 위치의 정확도에 대하여 측정을 시행하였다. 사실 방사선측정의 대표적인 방법은 물팬톰-전리함응 이용한 모델인데 본 실험에서는 영상의 화소가 지니는 디지탈 값을 적절한 소프트웨어로 읽어내어서 데이터를 환산하여 결과를 얻었다. 선행실험에서 얻은 상대선량률을 적용하여 대칭성에서는 조사야영역이 l0$\times$10$cm^2$ 일 때 횡축과 종축에서 1.2%, 1.2%로 비교적 오차가 적었다. 그리고 Light/Radiation field congruence 여부는 횡축이 0.3%, 그리고 종축이 0.2%로서 예상한 기대값에 접근하였다. 다음으로 wedge filter를 활용한 에너지의 변이와 위치의 정확도에 대한 움직임을 알 수 있었다.

• 한국의학물리학회지:의학물리
• /
• 제8권2호
• /
• pp.87-102
• /
• 1997

목적 : 방사선량 측정시 에너지, 매질, 측정기 등의 측정 조건과 측정 프로토콜에 따라 절대 흡수선량값이 결정된다. 본 연구에서는 이러한 측정 조건의 변화와 측정 프로토콜의 차이에 따른 절대 선량 값을 구하여 비교 분석 하고자 한다. 방법 : 시멘스 선형가속기에서 발생하는 6MV 광자선을 이용하여 3개의 다른 매질(물, 고체 물팬텀, 폴리스틸렌팬텀)내에서 2개의 전리함 (PTW ion chamber, NEL ion chamber)과 2개의 전기계(Victoreen electrometer, Keithley electrometer)를 사용하여 흡수선량을 측정하였다. 매질, 전리함, 전기계등의 측정 조건을 달리하여 서로 다른 조합에 대한 측정값을 TG21, IAEA 프로토콜에 의해 각각 분석하였다. 결과 및 결론 : 2개의 전기계와 2개의 전리함 조합에 따른 TG2l 및 IAEA 의 Ngas,, ND값의 비는 평균적으로 1％ 이내에서 일치하였다. 3개의 서로 다른 매질, 4개의 서로 다른 전리함 및 전기계 조합에 따른 12 가지 측정조건에 대한 흡수선량의 변화는 평균 0.6％의 차이를 보여 주였으며 임의의 전리함 및 전기계 조합에 대하여 물팬텀 및 고체물팬텀에 대한 TG21, MEA 측정법에 의한 흡수선량비의 변화 양상이 같은 양상을 보여주고 있으나 그 차이가 평균 1.96％를 보임으로서 고체물팬텀이 절대 흡수선량 측정에는 적절치 않은 것으로 사료된다. TG21 측정법에 따른 물팬텀과 폴리스틸렌팬텀을 이용한 절대 흡수선량값이 1.54％의 차이를 보임으로서 팬텀 매질에 대한 비교 factor가 필요할 것으로 사료된다. 측정매질, 전리함, 전기계 등의 여러 조건에 대한 흡수선량값의 차이가 TG21, IAEA 프로토콜에서 1％ 이내의 차이를 보여 주고 있으며 상대적인 변화 양상이 측정법에 상관없이 같은 경향으로 변함으로서 측정조건이 측정법에 영향을 주지 않았음을 알 수 있다. 다만 표준 측정법을 사용할 때 팬텀에 의한 차이는 많이 날 수 있으므로 측정법에서 사용하는 표준 팬텀을 사용 할 것을 권장하며 이것이 어려운 경우는 병원에서 사용하는 팬텀에 대한 보정값을 자체적으로 구하여 사용하는 것이 오차를 줄일 수 있을 것으로 사료된다.