Development of certified reference material (CRM)s for surface analysis II : multilayer thin films for sputter depth profiling (표면분석용 인증표준물질의 개발 II : 깊이분포도용 다층 박막 표준물질의 개발)
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- Journal of the Korean Vacuum Society
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- v.8 no.3B
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- pp.283-289
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- 1999