Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication of Bi-superconducting Thin Films by Layer-by-layer Sputtering Method

  • Jung, Jin-in (Department of Electrical & Electronic Engineering Dongshin University) ;
  • Lee, Hee-Kab (Department of Electrical & Electronic Engineering Dongshin University) ;
  • Park, Yong-Pil (Department of Electrical & Electronic Engineering Dongshin University)
  • Published : 1999.11.01
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Abstract

Bi$_2$Sr$_2$CuO$\sub$x/ thin films have been fabricated by atomic layer-by-layer deposition using ion beam sputtering(IBS) method. XRD and RHEED investigations reveal that a buffer layer with compositions different from Bi-2201 is formed at the early deposition stage of less than 10 units cell and then Bi-2201 oriented along the c-axis is grown.

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