• 제목/요약/키워드: Intermetallic formation

검색결과 207건 처리시간 0.029초

FeRAM 소자 제작 중에 발생하는 Pt/Al 반응 기구 (Pt/Al Reaction Mechanism in the FeRAM Device Integration)

  • 조경원;홍태환;권순용;최시경
    • 한국재료학회지
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    • 제14권10호
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    • pp.688-695
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    • 2004
  • The capacitor contact barrier(CCB) layers have been introduced in the FeRAM integration to prevent the Pt/Al reaction during the back-end processes. Therefore, the interdiffusion and intermetallic formation in $Pt(1500{\AA})/Al(3000{\AA})$ film stacks were investigated over the annealing temperature range of $100\sim500^{\circ}C$. The interdiffusion in Pt/Al interface started at $300^{\circ}C$ and the stack was completlely intermixed after annealing over $400^{\circ}C$ in nitrogen ambient for 1 hour. Both XRD and SBM analyses revealed that the Pt/Al interdiffusion formed a single phase of $RtAl_2$ intermetallic compound. On the other hand, in the presence of TiN($1000{\AA}$) barrier layer at the Pt/Al interface, the intermetallic formation was completely suppressed even after the annealing at $500^{\circ}C$. These were in good agreement with the predicted effect of the TiN diffusion barrier layer. But the conventional TiN CCB layer could not perfectly block the Pt/Al reaction during the back-end processes of the FeRAM integration with the maximum annealing temperature of $420^{\circ}C$. The difference in the TiN barrier properties could be explained by the voids generated on the Pt electrode surface during the integration. The voids were acted as the starting point of the Pt/Al reaction in real FeRAM structure.

CMnAl TRIP Steel Surface Modification During CGL Processing

  • Gong, Y.F.;Lee, Y.R.;Kim,, Han-S.;Cooman, B.C.De
    • Corrosion Science and Technology
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    • 제9권2호
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    • pp.81-86
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    • 2010
  • The mechanisms of selective oxidation of intercritically annealed CMnAl TRIP steels in a Continuous Galvanizing Line (GCL) were studied by cross-sectional observation of the surface and sub-surface regions by means of High Resolution Transmission Electron Microscopy (HR-TEM). The selective oxidation and nitriding of an intercritically annealed CMnAl TRIP steel in a controlled dew point 10%$H_2+N_2$ atmosphere resulted in the formation of c-xMnO.$MnO_2$ (1${\leq}$x<3) and c-xMnO.$Al_2O_3$ ($x{\geq}1$) particles on the steel surface. Single crystal c-xMnO.$SiO_2$ ($2{\leq}x{\leq}4$) oxide particles were also observed on the surface. A thin film of crystalline c-xMnO.$SiO_2$ (2${\leq}$x<3) and c-xMnO.$Al_2O_3$ ($x{\geq}1$) was present between these particles. In the sub-surface region, internal oxidation, nitriding and intermetallic compound formation were observed. In the first region, large crystalline c-xMnO.$SiO_2$ ($1{\geq}x{\geq}2$) and c-xMnO.$Al_2O_3$ ($x{\geq}1$) oxides particles were present. In the second region, c-AlN particles were observed, and in a third region, small $MnAl_x$ (x>1) intermetallic compound particles were observed.

연료전지 집전판용 주석도금 동판의 열 열화에 따른 금속간화합물 성장 및 비저항 변화 (Resistivity Changes and Intermetallic Growth After Thermal Aging of Matte Tin-Plated Copper Sheet for Current Collector in Fuel Cell)

  • 김재훈;김주한;한상옥;구경완;금영범;정귀성;고행진
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.2067_2068
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    • 2009
  • Resistivity changes and intermetallic growth after thermal aging of Matter tin-plated copper sheet for current collector in fuel cell were investigated to survey the diffusion of Cu into Sn in interface and surface. The results show that the intermetallic growth and resistivity depended on thermal aging temperature and dwell time. In Sn plate on a Cu substrate, $Cu_6Sn_5({\mu})$ and $Cu_3Sn({\varepsilon})$ intermetallics layer were formed at plate/substrate interface. $Cu_6Sn_5({\mu})$ intermetallics layer gradually changed $Cu_3Sn({\varepsilon})$. Moreover Cu get through Sn layer and it was diffused in the surface at $200^{\circ}C$. On the other hand, only $Cu_3Sn({\varepsilon})$ intermetallics layer were formed at plate/substrate interface at $300^{\circ}C$. Consequently, the intermetallics formation, thermal condition and oxidation of surface, causes increase in the resistivity of Tin-plated copper sheet.

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Microstructural behavior on weld fusion zone of Al-Ti and Ti-Al dissimilar lap welding using single-mode fiber laser

  • Lee, Su-Jin;Kawahito, Yousuke;Kim, Jong-Do;Katayama, Seiji
    • Journal of Advanced Marine Engineering and Technology
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    • 제37권7호
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    • pp.711-717
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    • 2013
  • Titanium (Ti) metal and its alloys are desirable materials for ship hulls and other structures because of their high strength, light weight and corrosion-resistance. And light weight and corrosion-resistant aluminum (Al) is the ideal metal for shipbuilding. The joining of Ti and Al dissimilar metals is one of the effective measures to reduce weight of the structures or to save rare metals. Ti and Al have great differences in materials properties, and intermetallic compounds such as Ti3Al, TiAl, TiAl3 are easily formed at the contacting surface between Ti and Al. Thus, welding or joining of Ti and Al is considered to be extremely difficult. However, it was clarified that ultra-high speed welding could suppress the formation of intermetallic compounds in the previous study. Results of tensile shear strength increases with an increase in the welding speed, and therefore extremely high welding speed (50m/min in this study) is good to dissimilar weldability for Ti and Al. In this study, therefore, full penetration dissimilar lap welding of Ti (upper) - Al (lower) and Al (upper) - Ti (lower) with single-mode fiber laser was tried at ultra-high welding speed, and the microstructure of the interface zones in the dissimilar Al and Ti weld beads was investigated.

DISSIMILAR FRICTION-STIR WELDING OF ALALLOY 1050 AND MGALLOY AZ31

  • Park, Seung Hwan C.;Masato Michiuchi;Yutaka S. Sato;Hiroyuki Kokawa
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2002년도 Proceedings of the International Welding/Joining Conference-Korea
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    • pp.534-538
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    • 2002
  • Dissimilar friction stir welding of aluminum (AI) alloy 1050 and magnesium (Mg) alloy AZ31 was successfully done in the limited welding parameters. The dissimilar weld showed good quality and facility compared to conventional fusion weld. Transverse cross section perpendicular to the welding direction had no defects. The weld was divided into base material of Al alloy, an irregular shaped stir zone and base material of Mg alloy. The irregular shaped stir zone was roughly located around the initial weld center. The weld interface near plate surface shifted from initial weld centerline to the advancing side. Hardness profile of the weld was heterogeneous, and the hardness value of the stir zone was raised to about 150 Hv to 250 Hv. The mixed phase was identified to intermetallic compound $Mg_{17}$Al$_{12}$ using x-ray diffraction method, energy dispersive x-ray spectroscopy (EDX) and electron probe micro analysis (EPMA). The formation of intermetallic compound $Mg_{17}$Al$_{12}$ during FSW causes the remarkable increase in hardness value in the stir zone.one.

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시효처리된 연료전지 집전판용 Matte 주석도금 동판의 고온열화 거동과 비저항변화 (Degradation Behavior and Resistivity Changes After Thermal Aging of Matte Tin-Plated Copper Sheet for Current Collector in Fuel Cell)

  • 김주한;김재훈;구경완;금영범;정귀성;고행진;한상옥
    • 전기학회논문지
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    • 제58권8호
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    • pp.1559-1565
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    • 2009
  • Resistivity changes and intermetallic growth after thermal aging of Matter tin-plated copper sheet for current collector in fuel cell were investigated to survey the diffusion of Cu into Sn in interface and surface. The results show that the intermetallic growth and resistivity depended on thermal aging temperature and dwell time. In Sn plate on a Cu substrate, Cu6Sn5(${\mu}$) and Cu3Sn(${\varepsilon}$) intermetallics layer were formed at plate/substrate interface. Cu6Sn5(${\mu}$) intermetallics layer gradually changed Cu3Sn(${\varepsilon}$). Moreover Cu get through Sn layer and it was diffused in the surface at $200^{\circ}C$. On the other hand, only Cu3Sn(${\varepsilon}$) intermetallics layer were formed at plate/substrate interface at $300^{\circ}C$. Consequently, the intermetallics formation, thermal condition and oxidation of surface, causes increase in the resistivity of Tin-plated copper sheet.

Microstructural behavior on weld fusion zone of Al-Ti and Ti-Al dissimilar lap welding using single-mode fiber laser

  • Lee, Su-Jin;Katayama, Seiji;Kim, Jong-Do
    • Journal of Advanced Marine Engineering and Technology
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    • 제38권2호
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    • pp.133-139
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    • 2014
  • Titanium (Ti) metal and its alloys are desirable materials for ship hulls and other ocean structures because of their high strength, corrosion-resistance and light weight properties. And light weight and corrosion-resistant aluminum (Al) is the ideal metal for shipbuilding. The joining of Ti and Al dissimilar metals is one of the effective methode to reduce weight of the structures. Ti and Al have great differences in materials properties, and intermetallic compounds such as $Ti_3Al$, TiAl, $TiAl_3$ are easily formed at the contacting surface between Ti and Al. Thus, dissimilar welding and joining of Ti and Al are considered to be very difficult. However, it was clarified that ultra-high speed welding could suppress the formation of intermetallic compounds in the previous study. Results of tensile shear strength increases with an increase in the welding speed, and therefore extremely high welding speed (50 m/min) is good to dissimilar weldability for Ti and Al. In this study, therefore, full penetration dissimilar lap welding of Ti (upper) - Al (lower) and Al (upper) - Ti (lower) with single-mode fiber laser was tried at ultra-high welding speed, and the microstructure of the interface zones in the dissimilar Al and Ti weld beads was investigated.

고전도성 부품용 Al-Cu 주조복합재료의 계면 특성 (Interfacial Characteristics of Al-Cu Cast Composites for High Conductivity Applications)

  • 김정민;김남훈;고세현
    • 한국주조공학회지
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    • 제38권3호
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    • pp.55-59
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    • 2018
  • To optimize the conductivity and to reduce the weight by as much as possible, Al-Cu composites were prepared through a suction-casting procedure. Pure copper metal foam was infiltrated by melted aluminum with the use of the vacuum, after which warm rolling was conducted to remove several remaining pores at the interface between the Cu foam and the aluminum matrix. Despite the short casting time, significant dissolution of Cu into the melt was observed. Moreover, it was found that various Al-Cu intermetallic compounds arose at the interface during the isothermal heating process after the casting and rolling steps. The average thickness of the Al-Cu intermetallic compound tended to increase in proportion to the heating time. The electrical and thermal conductivity levels of the cast composites were found to be comparatively low, mainly due to the dissolution of the Cu foam and the formation of intermetallics at the interface.

가돌리늄(Gd) 첨가에 따른 1A 등급 듀플렉스 스테인레스 강의 미세조직 및 파괴 특성 변화 (Microstructure and Fracture Property of 1A Grade Duplex Stainless Steel with the Addition of Gadolinium)

  • 임재한;정현도;안지호;문병문
    • 한국주조공학회지
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    • 제36권1호
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    • pp.24-31
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    • 2016
  • CD4MCU duplex stainless steel with gadolinium was fabricated as a neutron absorbing material by the air induction melting method. The gadolinium formed intermetallic compounds of Cu-Gd-Fe. There were no significant differences in hardness or ultimate tensile strength between experimental alloys. With the addition of gadolinium the yield strength of the cast alloy significantly increased, from $478.8{\pm}11.6$ to $514.2{\pm}29.9MPa$, whereas elongation of the cast alloy decreased with the addition of gadolinium, from $26.0{\pm}7.1$ to $7.0{\pm}2.5%$ due to the formation of gadolinium based intermetallic compounds.

Al-Fe 레이저 오버레이층 경계면에서의 금속간화합물 거동 (Intermetallic Compounds Behavior at Laser Overlay Interface of Aluminum and Fe-based Powder)

  • 강남현;유연곤;이창우;김정한
    • Journal of Welding and Joining
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    • 제25권3호
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    • pp.51-56
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    • 2007
  • A $CO_2$ laser overlay was conducted by using a Fe-based powder on the AC2B aluminum substrate. Cracks and intermetallic compounds (IMC) were observed inconsistently along the interface between the overlay and post-molten layer. A scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS) detected some Fe-rich IMC ($Fe_3Al$, FeAl) as well as the brittle Al-rich IMC ($Fe_2Al_5,\;FeAl_3$). Micro vickers hardness proved the formation of Al-rich IMC ($FeAl_3$) along the interface by showing HV0.1 $800{\sim}900$. Furthermore, nano indentation was successfully applied to investigate the behavior of IMC more precisely than the micro vickers hardness.