• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• Journal of the Korean Society for Precision Engineering
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• v.20 no.10
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• Corrosion Science and Technology
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• v.2 no.6
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• pp.277-282
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• 2003

Holographic interferometry, an electromagnetic method, was used to study corrosion of carbon steel, aluminum and copper nickel alloys in NaOH, KCI and $H_2SO_4$ solutions respectively. The technique, called electrochemical emission spectroscopy, consisted of in-situ monitoring of changes in the number of fringe evolutions during the corrosion process. It allowed a detailed picture of anodic dissolution rate changes of alloys. The results were compared to common corrosion measurement methods such as linear polarization resistance measurements and electrochemical impedance spectroscopy. A good agreement between both data was found, thus indicating that holographic interferometry can be a very powerful technique for in-situ corrosion monitoring.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1530-1535
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• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.9
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• pp.68-74
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• 1998

The ESPI(Electronic Speckle Pattern Interferometry) is a real time, full-field, non-destructive optical measurement technique that allows static and dynamic deformation analysis and surface shape measurements of engineering structures. e .g. turbine blades. vehicle engine components, body panels, etc. This technique is very similar to holographic interferometry, but uses a solid static camera and an image processing board for recording and digital processing of speckle patterns. In this paper it is presented that FEM results for the free vibration of symmetrically laminated composite as [30/-30/90]s. The natural frequencies of laminated composite rectangular plates having the particular boundary condition are experimentally obtained. In order to demonstrate the validity of the experiment, FEM analysis using ANSYS was performed and natural frequencies experimentally obtained is compared with calculation by FEM analysis. The results obtained from both experiment and FEM analysis show a good agreement.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.37-43
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.22-28
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.12 no.10
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• pp.40-49
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• 1995

This paper presents the performance and problems in analysis method and testing system of Electronic Speckle Pattern Interferometry (ESPI) method, in measuring two - dimensional in-plane displacement. The anyalysis result of measurement by ESPE is quite comparable to that tof measurement by strain gauge method. This implies that the method of ESPE is a very effective tool in non-contact two-dimensional in-plane strain analysis. But there is a controversal point, measurment error. This error is discussed to be affected not by ESPE method itself, but by its analysis scheme of the interference fringe, where the first-order interpolation has been applied to the points of strain measured. In this case, it is turned out that the more errors would be occurred in the large interval of fringe. And so this paper describes a computer method for drawing when the height is available only for some arbitrary collection of points. The method is based on a distance-weighted, last- squares approximation technique with the weight varying with the distance of the data points.

• Journal of Mechanical Science and Technology
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• v.14 no.7
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• pp.715-721
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• 2000

Residual stress is one of the causes which makes defects in engineering components and materials. These residual stresses can occur in many engineering structures and can sometimes lead to premature failures. There are commonly used methods by which residual stresses are currently measured. But these methods have a little damage and other problems; therefore, a new experimental technique has been devised to measure residual stress in materials with a combination of electronic laser interferometry, laser heating and finite element method. The electronic laser interferometer measures in-plane deformations while the laser heating and cooling provides for very localized stress relief. FEM is used for determining the heat temperature and other parameters. The residual stresses are determined by the amount of strain that is measured subsequent to the heat-up and cool-down of the region being interrogated. A simple model is presented to provide a description of the method. In this paper, the ambiguity problem for the fringe patterns has solved by a phase shifting method.

• Proceedings of the KSRS Conference
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• v.2
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• pp.582-585
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• 2006

Augustine volcano is an active stratovolcano located southwest of Anchorage, Alaska. Augustine volcano experienced seven significantly explosive eruptions in 1812, 1883, 1908, 1935, 1963, 1976, and 1986, and a minor eruption in January 2006. To measure ground surface deformation of Augustine volcano, we applied satellite radar interferometry with ERS-1/2 and ENVISAT SAR images acquired from three descending and three ascending satellite tracks. Multiple interferograms are stacked to reduce artifacts due to changes in atmospheric condition and retrieve temporal deformation sequence. For this, we used Least Square (LS) method for reducing atmospheric effects and Singular Value Decomposition (SVD) method for the retrieval of a temporal deformation sequence. Interferograms before 2006 eruption show about 3 cm/year subsidence by contraction of pyroclastic flow deposits from the 1986 eruption. Interferograms during 2006 eruption do not show significant deformation around volcano crater. Interferograms after 2006 eruption show again a several cm subsidence by compaction and contraction of pyroclastic flow deposits for a few months. This study demonstrates that satellite radar interferometry can monitor deformation of Augustine volcano to help understand the magma plumbing system driving surface deformation.