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Real-time Compensation of Motion Errors Using Extended Twyman-Green Interferometry  

배은덕 (삼성전자)
오정석 (한국과학기술원 기계공학과 대학원)
김승우 (한국과학기술원 기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.10, 2003 , pp. 112-119 More about this Journal
Abstract
This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.
Keywords
Twyman-Green interferometry; Real-time compensation;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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