• 센서학회지
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• 제29권4호
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• pp.266-269
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• 2020

In this study, we investigated the effect of a sulfur passivation (S-passivation) process step on the electrical properties of surface-channel In_0.7Ga_0.3As quantum-well (QW) metal-oxide-semiconductor field-effect transistors (MOSFETs) with S/D regrowth contacts. We fabricated long-channel In_0.7Ga_0.3As QW MOSFETs with and without (NH₄)₂S treatment and then deposited 1/4 nm of Al₂O₃/HfO₂ through atomic layer deposition. The devices with S-passivation exhibited lower values of subthreshold swing (74 mV/decade) and drain-induced barrier lowering (19 mV/V) than the devices without S-passivation. A conductance method was applied, and a low value of interface trap density D_it (2.83×10¹² cm^-2eV^-1) was obtained for the devices with S-passivation. Based on these results, interface traps between InGaAs and high-κ are other defect sources that need to be considered in future studies to improve III-V microsensor sensing platforms.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.429.2-429.2
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• 2014

ZnO nanowire is known as synthesizable and good mechanical properties. And, stimuli-responsive polymer is widely used in the application of tunable sensing device. So, we combined these characteristics to make precise tunable sensing devise. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using nanosphere template with various conditions via hydrothermal process. Also, pH-temperature dependant tuning ability of nanostructure was studied. The brief experimental scheme is as follow. First, Zno seed layer was coated on a si wafer ($20{\times}20mm$) by spin coater. And then $1.15{\mu}m$ sized close-packed PS nanospheres were formed on a cleaned si substrate by using gas-liquid-solid interfacial self-assembly method. After that, zinc oxide nanowires were synthesized using hydrothermal method. Before the wire growth, to specify the growth site, heat treatment was performed. Finally, NIPAM(N-Isopropylacrylamide) was coated onto as-fabricated nanostructure and irradiated by UV light to form the PNIPAM network. The morphology, structures and optical properties are investigated by FE-SEM(Field Emission Scanning electron Microscopy), XRD(X-ray diffraction), OM(Optical microscopy), and WCA(water contact angle).

• 한국표면공학회지
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• 제36권5호
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• pp.373-378
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• 2003

With increasing environmental concerns, application of lead-free solder and fluxless soldering process have been taken attention from the electronic packaging industry. Plasma treatment is one of the soldering methods for the fluxless soldering, and it can prevent environmental pollution cased by flux. On this study fluxless soldering process under $Ar-H_2$plasma using lead free solders such as Sn-3.5 wt%Ag, Sn-3.5 wt%Ag-0.7 wt%Cu and Sn-37%Pb for a reference was investigated. As the plasma reflow has higher soldering temperature than normal air reflow, the effects of UBM(Under Bump Metallization) thickness on the interfacial reaction and bonding strength can be critical. Experimental results showed in case of the thin UBM, Au(20 nm)/Cu(0.3 $\mu\textrm{m}$)/Ni(0.4 $\mu\textrm{m}$)/Al(0.4 $\mu\textrm{m}$), shear strength of the soldered joint was relatively low as 19-27㎫, and it's caused by the crack observed along the bonded interface. The crack was believed to be produced by the exhaustion of the thin UBM-layer due to the excessive reaction with solder under plasma. However, in case of thick UBM, Au(20 nm)/Cu(4 $\mu\textrm{m}$)/Ni(4 $\mu\textrm{m}$)/Al(0.4 $\mu\textrm{m}$), the bonded interface was sound without any crack and shear strength gives 32∼42㎫. Thus, by increasing UBM thickness in this study the shear strength can be improved to 50∼70%. Fluxed reflow soldering under hot air was also carried out for a reference, and the shear strength was 48∼52㎫. Consequently the fluxless soldering with plasma showed around 65∼80% as those of fluxed air reflow, and the possibility of the $Ar-H_2$ plasma reflow was evaluated.

• 한국표면공학회지
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• 제44권5호
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• pp.226-231
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• 2011

Graphene was coated on STS 316L by electro spray coating method to improve its properties of corrosion resistance and contact resistance. Exfoliated graphite (graphene) was made of the graphite by chemical treatment. Graphene is distributed using dispersing agent, and STS 316L was coated with diffuse graphene solution by electro spray coating method. The structure of the exfoliated graphite was analyzed using XRD and the coating layer of surface was analyzed by using SEM. Analysis showed that multi-layered graphite structure was destroyed and it was transformed into fine layers graphene structure. And the result of SEM analysis on the surface and the cross section, graphene layer was uniformly formed with 3~5 ${\mu}m$ thickness on the surface of substrate. Corrosion resistance test was applied in the corrosive solution which is similar to the PEM fuel cell stack inside. And interfacial contact resistance test was measured to simulate the internal operating conditions of PEM fuel cell stack. The results of measurements show that stainless steel coated with graphene was improved in corrosion resistance and surface contact resistance than stainless steel without graphene coating layer.

• Transactions on Electrical and Electronic Materials
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• 제5권5호
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• pp.204-207
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• 2004

In this work, we present the electrochemical properties of Al bipolar plate, which can be re-searched for the application of PEMFC system. Bulk resistance of the plate was measured with a four-point probe method. The electrical conductivity of noble metal coated Al plate was 4.40 x 10$^4$ S/cm. On the other hand, the electrical interfacial resistance of the noble metal coated Al plate valued at 0.15 mΩ-$\textrm{cm}^2$ and that of graphite was 0.26 mΩ-$\textrm{cm}^2$ under the holding pressure of 140 N/$\textrm{cm}^2$ at the applied current of 5 A. And the performance of Al bipolar plate for PEMFC was evaluated at various conditions. The single cell performance was more than 0.43 W/$\textrm{cm}^2$ (0.47 Wig) for noble metal coated Al bipolar plate at 5$0^{\circ}C$ under atmospheric pressure in external humidified hydrogen and oxygen condition. As the present results, we could show the results that the noble metal coated Al bipolar plates were favorable in the aspect of electrical properties compared with those of the commercialized resin-impregnated graphite plates.

• Bulletin of the Korean Chemical Society
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• 제34권4호
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• pp.1137-1144
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• 2013

$TiO_2$ composites with seven different carbon materials (activated carbons, graphite, carbon fibers, single-walled carbon nanotubes, multi-walled carbon nanotubes, graphene oxides, and reduced graphene oxides) that are virgin or treated with nitric acid are prepared through an evaporation method. The photocatalytic activities of the as-prepared samples are evaluated in terms of $H_2$ production from aqueous methanol solution (photo-catalytic reduction: PCR) and degradation of aqueous pollutants (phenol, methylene blue, and rhodamine B) (photocatalytic oxidation: PCO) under AM 1.5-light irradiation. Despite varying effects depending on the kinds of carbon materials and their surface treatment, composites typically show enhanced PCR activity with maximum 50 times higher $H_2$ production as compared to bare $TiO_2$. Conversely, the carbon-induced synergy effects on PCO activities are insignificant for all three substrates. Colorimetric quantification of hydroxyl radicals supports the absence of carbon effects. However, platinum deposition on the binary composites displays the enhanced effect on both PCR and PCO reactions. These differing effects of carbon materials on PCR and PCO reactions of $TiO_2$ are discussed in terms of physicochemical properties of carbon materials, coupling states of $TiO_2$/carbon composites, interfacial charge transfers. Various surface characterizations of composites (UV-Vis diffuse reflectance, SEM, FTIR, surface area, electrical conductivity, and photoluminescence) are performed to gain insight on their photocatalytic redox behaviors.

• Composites Research
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• 제28권4호
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• pp.239-243
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• 2015

최근 탄소나노튜브 (CNT) 고유의 특성을 충분히 발현하면서, 섬유화를 통해 장점을 극대화 할 수 있는 탄소나노튜브 섬유 합성 방법 및 후처리 공정들이 많은 관심을 받아왔다. 그러나 개별 탄소나노튜브가 다발형태로 집속되어지는 과정 중, 탄소나노튜브 상호간 약한 계면결합력과 전단특성으로 인하여 원하는 섬유 물성을 확보하기 어려운 문제점을 갖고 있다. 이를 해결하기 위해서 본 연구에서는 Direct Spinning 방법을 통한 탄소나노튜브의 연속적인 합성과 다양한 후처리 방법을 이용하여 탄소나노튜브 섬유의 기계적 특성을 조사하였다. 플라즈마 후처리를 통하여 측정된 탄소나노튜브 섬유의 기계적 물성은 본래의 섬유보다 최대 40%가 증가됨을 확인하였다.

• 대한치과기공학회지
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• 제39권1호
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• pp.43-52
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• 2017

Purpose: Physical and chemical properties of gold is most suitable to be restored of teeth to its original state. Recently zirconia was used instead of gold because of esthetical and intimacy of human body. Because of high strength and high abrasion resistance of zirconia, all zirconia artificial tooth lead to wear the original tooth of opposite site. To preserve this original tooth, zirconia artificial tooth covered with dental ceramic glass was used. When joining the zirconia core and dental ceramic glass, difference of their thermal expansion coefficient and wetting ability is generated the residual stress at interface lead to crack. In order to solve this problem, intermediate layer what is called zir-liner was imported to decrease the residual stress and increase the bonding strength. Methods: In this study, to identify the optimum conditions for manufacturing process, various methods to rough the surface of zirconia core were adopted, and vary the thickness of interlayer, and analyzed bond strength. Results: Bond strength of sanding specimens group showed higher than that of non-sanding specimens group, and once applied intermediate layer with sanding specimens showed highest bond strength with 28 MPa. SEM photomicrographs of zirconia cores fired at $1500^{\circ}C$ showed parallel straight lines in sanding and pockmarked surface in blasting surfaces as abrasion traces. Observation of the destruction section after shear test by SEM were carried out. Liner applied non-sanding group and non-liner applied sanding group all showed interfacial crack. Sandblasting group with non-liner showed remained dental ceramic glass on the surface of zirconia. Sandblasting group with once applied liner showed partially remained liner and dental ceramic glass on the surface of zirconia. XRD analysis revealed that sandblasting group showed higher monoclinic peaks than other specimens group and this result was due to the high collision energy for stress induced phase transformation. Conclusions: A study on the improvement of bonding strength between zirconia and dental ceramic glass steadily carried out for the future to practical use.

• Composites Research
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• 제23권6호
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• pp.39-46
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• 2010

치아의 와동에 수복된 치과용 복합레진을 광(LED) 조사를 통해 정화 수축시키면서 음향방출(acoustic emission, AE) 신호를 검출하였다. 비모수 통계법인 Mann-Whitney법과 Kruskal-Wallis법을 이용하여 시편의 재질과 계면의 접착조건에 따른 AE hit event 수와 최대진폭을 비교 평가하였다. PMMA와 치아시편으로부터 검출된 선호의 최대진폭은 정착조건에 따른 차이가 없었지만 스테인리스 시편으로부터 검출된 신호는 접착조건에 따라 최대 진폭의 차이가 있었다(p<0.05). AE hit event 수는 양호한 접착조건에서 시편의 재질에 따라 차이가 있었고(p<0.05), 세가지 재질의 시편 모두 접착조건이 양호한 실험에서 AE 신호가 적게 검출되었다. SEM을 이용하여 계면에 생성된 캡을 측정한 결과 AE가 많이 검출되고 검출된 신호의 최대 진폭이 큰 시편에서 갱의 폭이 넓고 형성 비율이 높았다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.180-180
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• 2010

Thin film transistors (TFTs) based on oxide semiconductors have emerged as a promising technology, particularly for active-matrix TFT-based backplanes. Currently, an amorphous oxide semiconductor, such as InGaZnO, has been adopted as the channel layer due to its higher electron mobility. However, accurate and repeatable control of this complex material in mass production is not easy. Therefore, simpler polycrystalline materials, such as ZnO and $SnO_2$, remain possible candidates as the channel layer. Inparticular, ZnO-based TFTs have attracted considerable attention, because of their superior properties that include wide bandgap (3.37eV), transparency, and high field effect mobility when compared with conventional amorphous silicon and polycrystalline silicon TFTs. There are some technical challenges to overcome to achieve manufacturability of ZnO-based TFTs. One of the problems, the stability of ZnO-based TFTs, is as yet unsolved since ZnO-based TFTs usually contain defects in the ZnO channel layer and deep level defects in the channel/dielectric interface that cause problems in device operation. The quality of the interface between the channel and dielectric plays a crucial role in transistor performance, and several insulators have been reported that reduce the number of defects in the channel and the interfacial charge trap defects. Additionally, ZnO TFTs using a high quality interface fabricated by a two step atomic layer deposition (ALD) process showed improvement in device performance In this study, we report the fabrication of high performance ZnO TFTs with a $Si_3N_4$ gate insulator treated using plasma. The interface treatment using electron cyclotron resonance (ECR) $O_2$ plasma improves the interface quality by lowering the interface trap density. This process can be easily adapted for industrial applications because the device structure and fabrication process in this paper are compatible with those of a-Si TFTs.