• 제목/요약/키워드: Interfacial Roughness

검색결과 96건 처리시간 0.023초

열처리에 따른 $Y_2O_3$ 박막의 미세 구조 변화와 전기적 특성 변화에 대한 고찰 (The evolution of microstructures and electrical properties of $Y_2O_3$ thin films on si(100) upon annealing treatments)

  • 정윤하;강성관;김은하;고대홍;조만호;황정남
    • 한국진공학회지
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    • 제8권3A호
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    • pp.218-223
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    • 1999
  • We investigated the interfacial reactions between the $Y_2O_3$ film deposited by ICB processing and p-type (100) Si substrates upon annealing treatments in $O_2$ and Ar gas ambients. we also investigated the evolution of surface morphology of ICB deposited $Y_2O_3$ films upon annealing treatments. We observed that the root-mean-square(RMS) value of surface roughness measured by AFM increased with annealing time at $800^{\circ}C$ in $O_2$ ambient, while the change of surface roughness was not observed in Ar ambient. We also found the growth of $SiO_2$ layer and the formation of yttium silicate layer. From the capacitance values $(C_{acc})$ measured by C-V measurements, the relative didldctric constant of $Y_2O_3$ film in metal-insulator-semiconductor(MIS) structure was estimated to be about 9.

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양극산화 처리에 따른 탄소섬유 표면의 페놀릭 하이드록실 관능기 비율의 증가가 에폭시기지 복합재료의 기계적 계면결합 특성에 미치는 영향 (Effects of Increase in Ratio of Phenolic Hydroxyl Function on Carbon Fiber Surfaces by Anodic Oxidation on Mechanical Interfacial Bonding of Carbon Fibers-reinforced Epoxy Matrix Composites)

  • 김동규;김관우;한웅;송범근;오상엽;방윤혁;김병주
    • 공업화학
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    • 제27권5호
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    • pp.472-477
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    • 2016
  • 본 연구에서는 전류밀도 변화에 따른 탄소섬유의 양극산화 처리가 탄소섬유 표면과 탄소섬유 강화 복합재료의 기계적 계면결합력에 미치는 영향을 고찰하였다. 양극산화 처리된 탄소섬유 표면 특성은 원자간력 현미경(Atomic force microscope, AFM)과 전계방사형 주사전자현미경(Field emission-scanning electron microscope, FE-SEM), 적외선 분광법(Fourier transform infrared spectroscopy, FT-IR) 및 X선 광전자 분광법(X-ray Photoelectron Spectroscopy, XPS)으로 분석하였으며, Short beam 전단시험을 통해 표면처리에 따른 탄소섬유 강화 복합재료의 계면 전단강도를 측정하였다. 실험 결과 전류밀도가 증가함에 따라 탄소섬유 표면의 거칠기와 산소관능기의 함량의 증가와, 탄소섬유 강화 복합재료의 층간전단강도(Interlaminar shear strength, ILSS)의 향상 및 페놀릭 하이드록실 그룹과의 비례관계를 확인하였다. CF-2.0 시편의 층간전단강도는 87.9 MPa로 CF-AS 시편에 비해 약 4% 증가하였는데, 이러한 결과는 양극산화 처리가 산소관능기와 탄소섬유 표면 거칠기의 증가를 유도하여 탄소섬유와 수지의 계면 결합력이 증가된 것으로 판단된다. 그중 층간전단강도와 비례관계인 페놀릭 하이드록실 그룹은 탄소섬유 강화 복합재료의 계면결합력을 향상시키는 중요한 요소라 판단된다.

알카리 표면개질 처리가 무전해 구리 도금피막과 폴리이미드 필름의 접합력에 미치는 효과 (Effect of Alkali Surface Modification on Adhesion Strength between Electroless-Plated Cu and Polyimide Films)

  • 손이슬;이호년;이홍기
    • 한국표면공학회지
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    • 제45권1호
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    • pp.8-14
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    • 2012
  • The effects of the alkali surface modification process on the adhesion strength between electroless-plated Cu and polyimide films were investigated. The polyimide surfaces were effectively modified by alkali surface treatments from the hydrophobic to the hydrophilic states, and it was confirmed by the results of the contact angle measurement. The surface roughness increased by alkali surface treatments and the adhesion strength was proportional to the surface roughness. The adhesion strength of Cu/polyimide interface treated by KOH + EDA (Ethylenediamine) was 874 gf/cm which is better than that treated by KOH and KOH + $KMnO_4$. The results of XPS spectra revealed that the alkali treatment formed oxygen functional groups such as carboxyl and amide groups on the polyimide films which is closely related to the interfacial bonding mechanism between electroless-plated Cu and polyimide films. It could be suggested that the species and contents of functional group on polyimide films, surface roughness and contact angle were related with the adhesion strength of Cu/polyimide in combination.

C/W 다층박막 거울의 탄소층 특성 Property of Carbon Layer for C/W Multilayer Mirror (Property of Carbon Layer for C/W Multilayer Mirror)

  • 박병훈;조형욱;오선주;윤권하;천권수
    • 한국방사선학회논문지
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    • 제4권4호
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    • pp.33-36
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    • 2010
  • 고 에너지 X선을 이용하는 응용에서 다층박막 거울은 매우 유용하다. 고 에너지 X선은 매우 짧은 다층박막 두께주기를 요구한다. 두께주기가 수 나노미터로 매우 짧기 때문에 다층박막을 형성하는 층들은 서로 계면 거칠기나 상호확산에 영향을 준다. 3.25nm의 두께주기를 갖는 C/W 다층박막 거울에서 1nm의 탄소 층의 특성을 살펴보았다. 탄소의 두께가 1nm로 매우 얇아도 텅스텐과 탄소의 층들은 매우 균일하게 증착되었으며, 탄소층은 미세구조가 없는 미정질 구조를 보였다. 투과전자현미경의 회절 영상을 통해서 텅스텐과 탄소의 상호확산이 발생했다는 것을 알수있었다.

원자력간 현미경을 이용한 TRIP강 저항 점용접부의 미세조직 분석에 관한 연구 (Analysis of Microstructure for Resistance Spot Welded TRIP Steels using Atomic Force Microscope)

  • 최철영;지창욱;남대근;장재호;김순국;박영도
    • Journal of Welding and Joining
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    • 제31권1호
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    • pp.43-50
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    • 2013
  • The spot welds of Transformation Induced Plasticity (TRIP) steels are prone to interfacial failure and narrow welding current range. Hard microstructures in weld metal and heat affected zone arenormally considered as one of the main reason to accelerate the interfacial failure mode. There fore, detailed observation of weld microstructure for TRIP steels should be made to ensure better weld quality. However, it is difficult to characterize the microstructure, which has similar color, size, and shape using the optical or electron microscopy. The atomic force microscope (AFM) can help to analyze microstructure by using different energy levels for different surface roughness. In this study, the microstructures of resistance spot welds for AHSS are analyzed by using AFM with measuring the differences in average surface roughness. It has been possible to identify the different phases and their topographic characteristics and to study their morphology using atomic force microscopy in resistance spot weld TRIP steels. The systematic topographic study for each region of weldments confirmed the presence of different microstructures with height of 350nm for martensite, 250nm for bainite, and 150nm for ferrite, respectively.

폴리케톤과 고무의 접착성에 미치는 산처리의 영향 (The Effect of Acid Treatment on the Adhesion Property of Polyketone with Rubber)

  • 최혜영;이태상;이종;이승구
    • 접착 및 계면
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    • 제12권1호
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    • pp.26-33
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    • 2011
  • 폴리케톤 필름의 산처리 조건에 따른 필름 표면의 화학적인 변화를 접촉각과 XPS를 이용하여 분석하고, 모폴로지의 변화를 SEM과 AFM을 통하여 살펴보고, 최종적으로 이러한 변화가 폴리케톤 필름과 고무와의 계면접착력에 어떠한 영향을 미치는지를 살펴보았다. 인산처리에 의하여 폴리케톤 필름의 표면에 젖음성이 증가하여 인산의 농도 및 처리시간에 따라서 접촉각이 감소하였으며, 표면에 산소함유기들이 증가하는 결과를 보였다. 인산농도와 처리시간이 증가함에 따라 표면에 crack과 etching이 증가하여 표면거칠기가 증가하였으나, 산처리 조건이 강화되면서 폴리케톤 필름의 표면에 degradation이 발생하여 roughness가 감소하는 결과를 보였다. 폴리케톤과 고무와의 계면접착력을 살펴본 결과, pH 0.74에서 120 min, pH 0.4에서 60 min 처리한 경우에 최대 계면접착력을 보였으며, 산처리 조건이 그 이상으로 증가하면서 degradation이 발생하면서 계면접착력이 감소하였다.

프라임, 테스트 등급 실리콘 웨이퍼의 표면 결함 특성 (Surface Defect Properties of Prime, Test-Grade Silicon Wafers)

  • 오승환;임현민;이동희;서동혁;김원진;김륜나;김우병
    • 한국재료학회지
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    • 제32권9호
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    • pp.396-402
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    • 2022
  • In this study, surface roughness and interfacial defect characteristics were analyzed after forming a high-k oxide film on the surface of a prime wafer and a test wafer, to study the possibility of improving the quality of the test wafer. As a result of checking the roughness, the deviation in the test after raising the oxide film was 0.1 nm, which was twice as large as that of the Prime. As a result of current-voltage analysis, Prime after PMA was 1.07 × 10 A/cm2 and Test was 5.61 × 10 A/cm2, which was about 5 times lower than Prime. As a result of analyzing the defects inside the oxide film using the capacitance-voltage characteristic, before PMA Prime showed a higher electrical defect of 0.85 × 1012 cm-2 in slow state density and 0.41 × 1013 cm-2 in fixed oxide charge. However, after PMA, it was confirmed that Prime had a lower defect of 4.79 × 1011 cm-2 in slow state density and 1.33 × 1012 cm-2 in fixed oxide charge. The above results confirm the difference in surface roughness and defects between the Test and Prime wafer.

Ba-페라이트/α-Al2O3/SiO2 자성박막에서 버퍼층의 역할 (Role of Buffer Layer in Ba-Ferrite/α-Al2O3/SiO2 Magnetic Thin Films)

  • 조태식
    • 한국자기학회지
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    • 제16권6호
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    • pp.283-286
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    • 2006
  • 고밀도 자기기록용 Ba-페라이트/$SiO_{2}$ 자성박막에서 계면확산 장벽으로써 ${\alpha}-Al_{2}O_{3}$ 버퍼층의 역할을 연구하였다. 열처리동안 $1900{\AA}$의 두께를 가진 비정질 Ba-페라이트/$SiO_{2}$ 박막에서 계면확산은 약 $700^{\circ}C$에서 일어나기 시작하였다. 열처리온도를 $800^{\circ}C$까지 증가시켰을 때, 계면확산은 자기특성을 저하시킬 정도로 급격히 진행되었다. 고온에서의 계면확산을 억제하기 위하여, $110{\AA}$ 두께의 ${\alpha}-Al_{2}O_{3}$ 버퍼층을 Ba-페라이트/$SiO_{2}$ 박막의 계면에 증착하여 사용하였다. Ba-페라이트/${\alpha}-Al_{2}O_{3}/SiO_{2}$ 박막에서는 $800^{\circ}C$의 고온까지 열처리하여도 계면확산이 심각하게 일어나지는 않았다. ${\alpha}-Al_{2}O_{3}$ 버퍼층에 의하여 계면확산이 억제되기 때문에 Ba-페라이트 자성박막의 포화자속밀도와 보자력이 향상되었다. 따라서 Ba-페라이트/$SiO_{2}$ 박막의 계면에서 ${\alpha}-Al_{2}O_{3}$ 버퍼층은 $SiO_{2}$ 기판 성분의 계면확산 장벽으로 사용될 수 있다.

표면 개질된 탄소나노튜브를 사용한 에폭시 복합재료의 마모특성에 관한 연구 (An investigation of tribology properties carbon nanotubes reinforced epoxy composites)

  • 아부바카 빈 술렁;곽정춘;박주혁
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.663-667
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    • 2005
  • Surface modified carbon nanotubes were applied into the epoxy composites to investigate its tribological property. Carbon nanotubes reinforced epoxy composites were fabricated by casting. Effects to the tribological property of loading concentrations and types of surface modification of carbon nanotubes were investigated under sliding condition using linear reciprocal sliding wear tester. The results show that the small amount of carbon nanotubes into the epoxy exhibited lower weight loss than the pure epoxy. It is concluded that the effect of an enormous aspect ratio of carbon nanotubes surface area which wider than conventional fillers that react as interface for stress transfer. As increased the contents of carbon nanotubes, the weight loss from the wear test was reduced. And the surface modified carbon nanotubes show better tribological property than as produced carbon nanotubes. It is due that a surface modification of carbon nanotubes increases the interfacial bonding between carbon nanotubes and epoxy matrix through chemical bonding. Changes in worn surface morphology are also observed by optical microscope and SEM for investigating wear behaviors. Carbon nanotubes in the epoxy matrix near the surface are exposed, because it becomes the lubricating working film on the worn surface. It reduces the friction and results in the lower surface roughness morphology in the epoxy matrix as increasing the contents of the carbon nanotubes.

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Co/IrMn 이층막의 자기적 특성과 Co 두께 및 어닐링의 영향 (Effects of Thickness of Ferromagnetic Co Layer and Annealing on the Magnetic Properties of Co/IrMn Bilayers.)

  • 정정규;이찬규;구본흔;이건환;야스노리하야시
    • 한국재료학회지
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    • 제13권7호
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    • pp.447-452
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    • 2003
  • Effects of annealing and thickness of Co layer in Co/IrMn bilayers on the magnetic properties have been investigated. The highest interfacial exchange coupling energy($J_{K}$ = 0.12 erg/$\textrm{cm}^2$) was obtained for 10 nm Co layer thickness. Exchange bias field is inversely proportional to the magnetization, the thickness of the pinned layer, and the grain size of antiferromagnetic layer. Also it is related to the interfacial exchange energy difference, which is expected to depend on the surface roughness. These results almost agree with the random-field model of exchange anisotropy proposed by Malozemoff. Exchange bias field decreased slowly with increasing annealing temperature up to X$300^{\circ}C$. However, exchange bias field increased above $300^{\circ}C$.