• Title/Summary/Keyword: Integrated monitoring and control system

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The Study for the CMP Automation wish Nova Measurement system (NOVA System을 이용한 CMP Automation에 관한 연구)

  • 김상용;정헌상;박민우;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.176-180
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    • 2001
  • There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

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The Development and Implementation of Ward Monitoring Service Using Bluetooth Low Energy Scanners for Infectious Disease Response (감염병 대응 비콘 스캐너 기반의 병실 모니터링 서비스 개발)

  • Lee, Kyu-Man;Park, Ju-young
    • Journal of Digital Convergence
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    • v.15 no.3
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    • pp.287-294
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    • 2017
  • This study attempted to develop a beacon scanner based ward monitoring service in order to respond to the new paradigm of medical environment which is trying to introduce ICT technology as medical service to track and manage the spread path of large infectious diseases such as MERS. The study also included beacon hardware development, firmware development for the beacon low-power bluetooth 4.0, and server and web-based dashboard UI development. Using these, we have developed a customized monitoring system that provides functions such as locating patients by location based service and monitoring based on web UI. It is possible to maximize the efficiency of offline hospital services and to value active infection control and patient safety by integrating online technology into the area where online technologies such as beacons are not properly integrated.

A Development of the On-line Maintenance and Management System for the HVAC system Using IT (IT를 활용한 공조설비의 온라인 유지관리시스템 개발)

  • Lee, Tae-Won;Kim, Yong-Ki;Kang, Sung-Ju;Woo, Nam-Sub
    • Proceedings of the SAREK Conference
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    • 2008.06a
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    • pp.48-53
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    • 2008
  • The performances of the building service equipment relay on the individual superintendent's share for the assessment of performance, fault detection, deterioration diagnosis of the building service equipment. A major use of building energy management system(BEMS) is for monitoring plant and building's energy consumption. National building management system (N-BMS) presented in this study links buildings into a network group in order to monitor and control the buildings. How to construct the N-BMS was considered to save energy resource and to conserve performance of building service equipment. The FEMIS, facility, energy/environmental management & information system, for building service offer management process integrated with BAS, FMS and EMS and so on.

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Ungrounded System Fault Section Detection Method by Comparison of Phase Angle of Zero-Sequence Current

  • Yang, Xia;Choi, Myeon-Song;Lee, Seung-Jae;Lim, Il-Hyung;Lim, Seong-Il
    • Journal of Electrical Engineering and Technology
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    • v.3 no.4
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    • pp.484-490
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    • 2008
  • In this paper, an integrated fault section detection and isolation strategy is proposed based on the application of the Distribution Automation System(DAS) utilizing advanced IT and communication technologies. The Feeder Remote Terminal Unit(FRTU) has been widely used to collect data in the Korean distribution system. The achieved data is adopted in this method for detecting multiple fault types. Especially in the case of single phase-to-ground fault, the fault section is detected by comparison of the zero-sequence current phase angle. The test results have verified the effectiveness of the proposed method in a radial distribution system through extensive simulations in Matlab/Simulink. Furthermore, a communication-based demo system identical to the simulation model has been developed, and it can be applied as an online monitoring and control program for fault section detection and isolation.

Development of Intelligent Green Fountain Culture System for Healthy Emotional Self-Concept (건강한 정서 자아를 위한 지능형 녹색경관 제어시스템 개발)

  • Park, Seung-Min;Lee, Young-Hwan;Kim, Jun-Yeup;Ko, Kwang-Eun;Sim, Kwee-Bo
    • Journal of the Korean Institute of Intelligent Systems
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    • v.22 no.3
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    • pp.281-286
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    • 2012
  • In the growing standard of people's lives, we want desire to create eco-friendly water space what is called the Green Technology that is in the limelight. These green space is introduced the cultural contents and we use the water, music, and nature as tool of emotional verbalism. Presently, when we want to make scenario, water landscape scenario is made by director. but these systems have some disadvantages as the cost and limitation of direction. There is a growing interest in the integrated control system based on PC and Internet. In this paper, it is about fountain control system. Previous research area was only one using programmable logic controller or industrial PC. we proposed the development of intelligent green fountain culture system for healthy emotional self-concept. And we made automatic weather sensing system that is designed by the intelligent green fountain culture system to estimate the time-variant system.

Implementation of a Buoy System Based on Multi-Hop Relay Networks for Ocean Observation (해양관측을 위한 다중 홉 릴레이 네트워크 기반의 부이 시스템 구현)

  • Lee, Woon-hyun;Kwon, Hyuk-Jin;Kim, Si-moon;Jeong, SeongHoon;Kim, Jeongchang
    • Journal of Advanced Navigation Technology
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    • v.20 no.3
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    • pp.182-189
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    • 2016
  • In this paper, we propose a buoy system based on multi-hop relay networks for ocean observation. The proposed system consists of various sensor modules, a gateway, wireless communication modules, and a remote monitoring site. The sensor modules are integrated with various communication interfaces and connected to the gateway of the proposed buoy system with an unified protocol based on controller area network (CAN)-bus. In order to communicate with the remote monitoring site and extend the coverage, the proposed system uses long-term evolution (LTE) router and XBee mesh network modules. The field test results show that the proposed system can extend the coverage using the proposed multi-hop relay network.

Development of a Prototype System for Active Emergency Call Services (능동적 응급 호출 서비스 시스템 프로토타입 개발)

  • Han, Won-Hee;Song, Eun-Ha;Han, Sung-Kook;Jeong, Young-Sik
    • Journal of Korea Multimedia Society
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    • v.11 no.7
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    • pp.1016-1024
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    • 2008
  • In this paper, we designed and implemented the ACE(ACtive Emergency call service system) system for emergency call service actively. ACE system has two physical components; E-Device(Emergency Mobile Device) and E-Server(Emergency Server). The role of E-Device is the mobile device in order to call emergency by using mild handi-capped, the elderly and children who are able to communicate theirs intention to another. E-Server is the server for management E-devices with realtime monitering. E-Device will be developed to the portable size for easily mild handi-capped, the elderly and children. When they need the service of emergency call, the button of E-device can be used and the call signal is transmitted to the emergency office and the guardian through Internet and CDMA. E-server should be developed the integrated control system for management of E-Devices basically. And it also supported to realtime monitoring of E-devices with respect to high quality of emergency call service for rise the efficiency.

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A Synchronized Job Assignment Model for Manual Assembly Lines Using Multi-Objective Simulation Integrated Hybrid Genetic Algorithm (MO-SHGA) (다목적 시뮬레이션 통합 하이브리드 유전자 알고리즘을 사용한 수동 조립라인의 동기 작업 모델)

  • Imran, Muhammad;Kang, Changwook
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.40 no.4
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    • pp.211-220
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    • 2017
  • The application of the theoretical model to real assembly lines has been one of the biggest challenges for researchers and industrial engineers. There should be some realistic approach to achieve the conflicting objectives on real systems. Therefore, in this paper, a model is developed to synchronize a real system (A discrete event simulation model) with a theoretical model (An optimization model). This synchronization will enable the realistic optimization of systems. A job assignment model of the assembly line is formulated for the evaluation of proposed realistic optimization to achieve multiple conflicting objectives. The objectives, fluctuation in cycle time, throughput, labor cost, energy cost, teamwork and deviation in the skill level of operators have been modeled mathematically. To solve the formulated mathematical model, a multi-objective simulation integrated hybrid genetic algorithm (MO-SHGA) is proposed. In MO-SHGA each individual in each population acts as an input scenario of simulation. Also, it is very difficult to assign weights to the objective function in the traditional multi-objective GA because of pareto fronts. Therefore, we have proposed a probabilistic based linearization and multi-objective to single objective conversion method at population evolution phase. The performance of MO-SHGA is evaluated with the standard multi-objective genetic algorithm (MO-GA) with both deterministic and stochastic data settings. A case study of the goalkeeping gloves assembly line is also presented as a numerical example which is solved using MO-SHGA and MO-GA. The proposed research is useful for the development of synchronized human based assembly lines for real time monitoring, optimization, and control.

Development of Integrated Multi-Trophic Aquaculture Technology and Future Direction (생태통합양식 기술 개발 및 미래 발전방향)

  • PARK, Miseon;YANG, Yongsu;Do, Yonghyun;LEE, Donggil
    • Journal of Fisheries and Marine Sciences Education
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    • v.28 no.5
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    • pp.1444-1458
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    • 2016
  • The expansion of high-density aquaculture in the limited waters has caused a wide variety of problems. The problems include environmental problems nearby aquaculture sites, growth rate of aquatic organisms, quality decline of farmed fish and price fall in the market. The phenomenon of aquaculture industry happens in not only inshore but also offshore. Therefore, the fisheries authorities have been changing their policy paradigms from mass production to sustainable production based on ecosystem. Other countries, however, focusing on relieving poverty and providing protein from fish production have not recognized the degree of seriousness. When it comes to enhancing the problems, National Institute of Fisheries Science has been developing the technology of Integrated Multi-Trophic Aquaculture (IMTA) to reduce and to prevent contaminants from fish and aquaculture sites, remained feed from fish farming process. In long-terms of view, the system is one of the most sustainable fishery production methods based on ecosystem. As integration of nutrient feed system from aquatic organisms is firmly established, the earlier mentioned problems will be diminished gradually. In term of the substantiality, this study was conducted. The research on management system for IMTA also has been incorporated. This study also investigated the features and current status of IMTA and demonstrated the developed management system and direction for the future advancement.

Fault Detection and Isolation of System Using Multiple Pi Observers (비례적분(PI) 관측기를 이용한 시스템의 고장진단)

  • Kim, H.S.;Kim, S.B.;Shigeyasu Kawaji
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.2
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    • pp.41-47
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    • 1997
  • Fault diagnosis problem is currently a subject of extensive research in the control field. Although there are several works on the fault detection and isolation observers and the residual generators, those are con- cerned with only the detection of actuator failures or sensor failures. So, the perfect detection and isolation for the actuator and sensor failures is strongly required in the field of the practical applications. In this paper, a strategy of fault diagnosis using multiple proportional integral (PI) observers including the magnitude of actuator failures is provided. It is shown that actuator failures are detected and isolated perfectly by monitoring the integrated error between actual output and estimated output by a PI observer. Also in presence of complex actuator and sensor failures, these failures are detected and isolated by multiple PI observers.

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