• Journal of the Semiconductor & Display Technology
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• v.4 no.3 s.12
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• pp.35-38
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• 2005

Due to high permeability of the ferrite cores, the characteristics of the inductively coupled plasma(ICP) are expected to be greatly improved. We investigated the effect of the ferrite cores on conventional inductively coupled plasma. It was observed that the current and voltage in the ICP antenna are slightly decreased and the power transfer efficiency is increased. However, due to eddy current and hysteresis loss, plasma density in the ICP with the ferrite cores is not increased. It seems that the ICP with the ferrite cores at low frequency ($\∼$100 kHz) will be greatly improved since the losses at the low frequency can be negligible.

• Journal of Power Electronics
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• v.16 no.1
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• pp.102-110
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• 2016

Contactless power transfer technology is gaining increasing attention in city transportation applications because of its high mobility and flexibility in charging and its commensurate power level with conductive power transfer method. In this study, an inductively coupled contactless charging system for a 48 V light electric vehicle is proposed. Although this study does not focus on system efficiency, the generic problems in an inductively coupled contactless power transfer system without ferromagnetic structure are discussed. An active load matching method is also proposed to control the power transfer on the receiving side through a load matching converter. Small signal modeling and linear control technology are applied to the load matching converter for port voltage regulation, which effectively controls the power flow into the load. A prototype is built, and experiments are conducted to reveal the intrinsic characteristics of a series-series resonant inductive power charger in terms of frequency, air gap length, power flow control, coil misalignment, and efficiency issues.

• Journal of Power Electronics
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• v.19 no.3
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• pp.655-664
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• 2019

In order to analyze the nonlinear phenomena of the bifurcation and chaos caused by the switching of nonlinear switching devices in inductively coupled power transfer (ICPT) systems, a Jacobian matrix model, based on discrete mapping numerical modeling, is established to judge the system stability of the periodic closed orbit and to study the nonlinear behavior of Hopf bifurcation in a system under full resonance. The general flow of the parameter design, based on the stability principle for ICPT systems, is proposed to avoid the chaos and bifurcation phenomena caused by unreasonable parameter selection. Firstly, based on the state equation of SS-type compensation, a three-dimensional bifurcation diagram with the coupling coefficient as the bifurcation parameter is established with a numerical simulation to observe the nonlinear phenomena in the system. Then Filippov's method based on a Jacobian matrix model is adopted to deduce the boundary of stable operation and to judge the type of the bifurcation in the system. Then the general flow of the parameter design based on the stability principle for ICPT systems is proposed through the above analysis to realize stable operation under the conditions of weak coupling. Finally, an experimental platform is built to confirm the correctness of the numerical simulation and modeling.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.197-202
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• 2005

Due to high permeability of the ferrite core, the characteristics of the ICP are expected to be greatly improved. We investigated the effect of the ferrite cores on conventional inductively coupled plasma. It was observed that the current and voltage in ike ICP antenna are slightly decreased and the power transfer efficiency is increased. However, due to eddy current and hysterisis loss, plasma density in the ICP with the ferrite cores is not increased. It seems that the ICP with the ferrite cores at low frequency (${\~}$100kHz) will be greatly improved since the losses at the low frequency can be negligible.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.183-183
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• 2016

Inductively coupled plasma having the high-density is often used for high productivity in the plasma processing. In large area processing, the plasma can be generated by using the multi-pole connected in parallel. However, in case of this, the power cannot transfer to plasma uniformly. To address the problem, we studied the mechanism of inductively coupled plasma connected in parallel by using transformer model. We also studied about the change of the plasma parameters over the time through the power balance equation and particle balance equation.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.246-252
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• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Journal of Power Electronics
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• v.19 no.5
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• pp.1087-1098
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• 2019

In this paper, a detuning factor (DeFac) method is proposed to design the key parameters for optimizing the transfer power and efficiency of an Inductively Coupled Power Transfer (ICPT) system with primary-secondary side compensation. Depending on the robustness of the system, the DeFac method can guarantee the stability of the transfer power and efficiency of an ICPT system within a certain range of resistive-capacitive or resistive-inductive loads. A MATLAB-Simulink model of a ICPT system was built to assess the system's main evaluation criteria, namely its maximum power ratio (PR) and efficiency, in terms of different approaches. In addition, a magnetic field simulation model was built using Ansoft to specify the leakage flux and current density. Simulation results show that both the maximum PR and efficiency of the ICPT system can reach almost 70% despite the severe detuning imposed by the DeFac method. The system also exhibited low levels of leakage flux and a high current density. Experimental results confirmed the validity and feasibility of an ICPT system using DeFac-designed parameters.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.251-256
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• 2004

A concept in which laser-sustained plasmas (LSPs) are combined with inductively coupled plasmas (ICPs) is proposed. The concept is aiming at extensions of operative conditions of a CW laser thruster due to the fact that the ICP has some characteristics which are in contrast to those of LSPs. An estimation confirmed that the concept would effectively work. And a fundamental experiment was conducted. The results showed that the radio frequency magnetic field induced by a alternate current of 13.56 MHz coupled inductively with LSPs, resulting in the enlargement of the plasma region and the attainment of the enthalpy. It is expected that some improvements will enable to transfer the RF power to the work gas more effectively and to demonstrate the synergy effect between the LSPs and the ICPs.

• Journal of the Korean Vacuum Society
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• v.8 no.3B
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• pp.368-375
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• 1999

The Maxwell equation and the transformer equivalent-circuit model are applied to a radio frequency planar inductively coupled plasma. The spatial distribution of the vector potential, the magnetic field, and the electric field are obtained analytically. As a result, the plasma current, the mutual inductance between the coil and the plasma, and the self inductance of plasma are found to increase with increasing skin depth. The spatial distribution of absorbed power has maximum where the antenna coil exists, and has a similar profile to that of the induced electric field. The power transfer efficiency is found to increase with increasing gas pressure before a saturation around p+ 20mTorr, while it shows an increase with the plasma density before a slight decrease around a density of $5\times10^{11}/\textrm{cm}^3$.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.438-440
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• 1995

The impedance characteristics and plasma parameters were experimentally studied in a weakly magnetized planar type, inductively coupled plasma (ICP) system. Compared with non-magnetized for system higher power transfer efficiency, stable impedance matching, enhancement of plasma density and higher electron temperature can be obtained. Such improvements are mainly due to the excitation of deeply penetrating electromagnetic wave and reduction of radial loss of electrons. In particulary, $SF_6$ (sulfur hexafluride) plasma shows unstable impedance matching in non-magnetized ICP because electronegativity of $SF_6$ effects on plasma characteristics. But, magnetized inductively coupled $SF_6$ plasma shows enough impedance matching stability to be applicable to the polysilicon etching in semiconductor process.