• Title/Summary/Keyword: Inductively Coupled Plasma Mass Spectrometry

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Measurement of heavy metals in antarctic soil at the king sejong station: application of isotope dilution inductively coupled plasma mass spectrometry (동위원소희석 ICP-MS분석법에 의한 남극 세종기지 주변 토양의 중금속 측정)

  • Suh, Jung-Ki;Hwang, Euijin;Min, Hyung Sik
    • Analytical Science and Technology
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    • v.21 no.5
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    • pp.364-374
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    • 2008
  • Antarctic Environmental Monitoring Handbook' was published by COMNAP/SCAR in 2000. The standardized method described in this handbook is recommended for monitoring of antarctic environment. High pressure bomb technique in this guide was used to decompose soil samples. In compliance with this guide book, high pressure bomb technique was applied to decompose the antarctic soil sampled at the King Sejong Station. An Isotope Dilution-Inductively Coupled Plasma-Mass Spectrometry (ID-ICP-MS) was applied to determine mass concentrations of Pb, Cu and Zn in the soil. The accuracy in this method was verified by the analysis of certified reference materials (CRM) of NIST 2702 (marine sediment). The analytical results agreed with certified value within the range from 99.5~100.8%. Matrix separation was necessitated for the determination of Cu and Zn by Chelex 100 ion exchange resin. As a result, the average mass concentrations of Pb, Cu and Zn which are suspected to be caused by anthropogenic pollution were 332.9 mg/kg, 95.6 mg/kg and 115.3 mg/kg, respectively. Those for the metals sampled in the soils of the remote regions from the station were 28.1 mg/kg, 101.8 mg/kg and 115.6 mg/kg, respectively.

Etching Characteristics of $SrBi_{2}Ta_{2}O_{9}$ Thin Film with Adding $Cl_2$ into $CF_4$/Ar Plasma ($CF_4$/Ar 플라즈마 내 $Cl_2$첨가에 의한 $SrBi_{2}Ta_{2}O_{9}$ 박막의 식각 특성)

  • 김동표;김창일;이원재;유병곤;김태형;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.714-719
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    • 2001
  • SrBi$_2$Ta$_2$$O_{9}$ thn films were etched in inductively coupled Cl$_2$/CF$_4$/Ar plasma. THe maximum etch rate was 1060 $\AA$/min at a Cl$_2$/(Cl$_2$+CF$_4$+Ar)=0.2. The 20% additive Cl$_2$ into CF$_4$/Ar plasma decreased carbon and fluorine radicals, but increased Cl radicals. Sr was effectively removed by reacting with Cl radical because the boiling point of SrCl$_2$(125$0^{\circ}C$) is lower than that of SrF$_2$(246$0^{\circ}C$). The chemical reactions on the etched surface were studied with x-ray photoelectron spectroscopy and secondary ion mass spectrometry. The etching profile was evaluated by using scanning electron microscopy.y.

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The Etching Properties of SBT Thin Films in Cl$_2$ Inductively Coupled Plasma (Cl$_2$ 유도결합 플라즈마를 이용한 SBT 박막의 식각특성)

  • Kim, Dong-Pyo;Kim, Chang-Il
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.5
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    • pp.211-215
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    • 2001
  • SBT thin films were etched at different content of $Cl_2$ in $Cl_2$/Ar or $Cl_2/N_2$(80%). As $Cl_2$ gas increased in $Cl_2$/Ar or $Cl_2/N_2$ gas plasma. the etch rate decreased. The result indicates that physical puttering of charged particles is dominant to chemical reaction in etching SBT thin films. To evaluate the etching mechanism of SBT thin films, x-ray photoelectron to chemical reaction in etching SBT thin films. To evaluate the etching mechanism of SBT thin films, x-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometry (SIMS) and atomic force microscopy (AFM) were carried out. From the result of AFM, the rms values of etched samples in Ar only or $Cl_2$ only plasma were higher than that of as-deposited, $Cl_2$/Ar and $Cl_2/N_2$ plasma. This can be illustrated by a decrease of Bi content of nonvolatile etching products (Sr-Cl and Ta-Cl), which are revealed by XPS and SIMS.

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A study on etching mechanism of SBT thin flim by using Ar/$CHF_3$plasma (Ar/$CHF_34$플라즈마를 이용한 SBT 박막에 대한 식각 메카니즘 연구)

  • 서정우;장의구;김창일;이원재;유병곤
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.3
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    • pp.183-187
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    • 2000
  • In this study the SrBi$_2$Ta$_2$$O_{9}$ (SBT) thin films were etched by using magnetically enhanced inductively coupled Ar/CHF$_3$plasma as function of CHF$_3$/(Ar+CHF$_3$)gas mixing ratio. Maximum etch rate of SBT thin films was 1650 $\AA$/min and the selectivities of SBT to Pt and photoresist(PR) were 1.35 and 0.94 respectively under CHF$_3$/(Ar+CHF$_3$) of 0.1 For study on etching mechanism of SBT thin film X-ray photoelectron spectroscopy (XPS) surface analyses and secondary ion mass spectrometry (SIMS) mass analysis of etched SBT surfaces were performed. Among the elements of SBT thin film. M(Sr, Bi, Ta)-O bonds are broken by Ar ion bombardment and form SrF and TaF$_2$by chemical reaction with F. SrF and TaF$_2$are removed more easily by Ar ion bombardment. Scanning electron microscopy(SEM) was used for the profile examination of etched SBT film and the cross-sectional SEM profile of etched SBT film under CHF$_3$(Ar+CHF$_3$) of 0.1 was about 85$^{\circ}$X>.

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Quantitative analysis of selenium species in sea food using solid phase extraction and HPLC-ICP/MS (해산물 시료에서 solid-phase extraction 및 HPLC-ICP/MS를 이용한 셀레늄 화학종의 정량분석)

  • Kim, Eunju;Joo, Minkyu;Kwon, Hyosik;Pak, Yongnam
    • Analytical Science and Technology
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    • v.26 no.5
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    • pp.307-314
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    • 2013
  • Selenium exists in various forms of chemical species. The activity and bioavailability is strongly dependent on its chemical form and concentration. Consequently the information on each selenium species and its concentration must be exactly determined for the food we take in. In this study, selenium species in seafood were separated and quantified by RP (reversed phase) HPLC (high performance liquid chromatography) coupled with ICP-MS (inductively coupled plasma mass spectrometry) using post-column isotope dilution. $^{79}Br$, which interferes on $^{80}Se$, has mostly been removed by solid phase extraction and then mathematical correction has been applied for the more accurate correction. The experimental result for CRM (certified reference material) DOLT-4 agreed well with the certified value but each selenium species could not be compared. SeCys (selenocysteine) and SeMet (selenomethionine) were the major species detected in seafood such as belt fish, spanish mackerel, and squid that have been serving as Korean diet. The concentrations found in Korean sea food for SeCys and SeMet were in the range of 0-661.6 mg/kg and 137.3-462.7 mg/kg, respectively.

A Study of Dry Etch Mechanism of the GaN using Plasma Mass Spectrometry

  • Kim, H.S.;Lee, W.J.;Jang, J.W.;Yeom, G.Y.;Lee, J.W.;Kim, T.I.
    • Journal of Surface Science and Engineering
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    • v.32 no.3
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    • pp.416-422
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    • 1999
  • The characteristics of inductively coupled Cl$_2$/BCl$_3$ plasmas during the GaN etching were studied using plasma mass spectrometry by measuring the relative amounts of reactive ions, neutrals, and etch products. GaN etch rates increased with the increase of pressure and showed a maximum near 25mTorr for the pure $Cl_2$ and near 30mTorr for $Cl_2$$BCl_3$. The addition of$ BCl_3$ to $Cl_2$ also was increased GaN etch rates until 50%BCl$_3$ was mixed to $Cl_2$. The GaN etching with pure $Cl Cl_2$ appears to be related to the combination of Cl$_2^{+}$ ion bombardment and the chemical reaction of Cl radicals. In the case of the GaN etching with Cl$_2$/BCl$_3$, in addition to the combined effect of$_2^{ +}$ ions and Cl radicals, $_BCl2^{+ }$ ions appear to be responsible for some of GaN etching even though they do not have significant effect on the GaN etching compared to $Cl_2^{+}$ and Cl. $Ga^{+ }$ , $GaCl^{+}$ , $GaCl_2^{+}$ , and $N_2^{+}$ were observed as the positive ions of etch products, and the intensities of these etch products showed the same trends as those of GaN etch rate. Among the etch products, Ga and $N_2$ appear to be the main etch products.

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Separation and identification of selenoproteins in selenium-enriched yeast (셀레늄이 강화된 이스트에서 셀레늄 단백질의 분리 및 확인)

  • Kim, Kyong-Mi;Pak, Yong-Nam
    • Analytical Science and Technology
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    • v.26 no.6
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    • pp.357-363
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    • 2013
  • Selenium-containing proteins were separated from selenium-enriched yeast (SEY) using Trizol$^{(R)}$ reagent followed by anion exchange (AE) chromatography. This method is simpler and less time consuming than electrophoresis. Five selenium containing proteins were identified by on-line AE HPLC-ICP/MS (high performance liquid chromatography-inductively coupled plasma/mass spectrometry). Each protein was enzymatically hydrolyzed to seleno-amino acids and separated with RP (reverse phase) HPLC for the identification of selenoproteins.

Determination of Toxic Elements in Blood by Inductively Coupled Plasma Mass Spectrometry

  • Park, Chang-Jun
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.3 no.1
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    • pp.99-99
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    • 1993
  • 혈액 및 생체시료 중 필수원소 혹은 독극성 원소의 극미량상분 정밀측정과 동위원소비율측정에 널리 사용되는 유도결합플라즈마 질량분석기(ICP-MS)의 기본원리를 소개하고 ICP-SM를 이용한 혈액중 낮은 ppb수준의 Cd, Hg 그리고 Pb의 정밀분석법을 소개한다. 혈액은 많은 양의 유기물을 포함하고 있으므로 digestion bomb에 질산과 과산화수소를 넣어 microwave oven에서 고온고압 상태로 분해시켜 많은 용액을 얻어 이 용액을 플라즈마에 주입시켜 분석한다. 그리고 수온은 tin(II) chloride 용액을 환원제로하여 생성시킨 수은원소증기를 membrane liquid-gas separator를 이용하여 뽑아내어 플라즈마에 주입시켜 낮은 ppt 수준의 검출한계를 얻는다. 또한 높은 정밀도와 정확도와 극미량 원소 측정에 사용되는 동위원소 회석법율 소개하고 실제 혈액분석에의 응용방법을 제시한다.

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Determination of Iron, Copper, and Zinc in Rainwater by Ion Chromatography (이온 크로마토그래피법에 의한 강수 중 철, 구리, 아연의 정량)

  • 이용근;이계형;이동수
    • Journal of Korean Society for Atmospheric Environment
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    • v.7 no.2
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    • pp.137-142
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    • 1991
  • A method is developed for the simultaneous determination of dissolved iron, copper, and zinc in rainwater. The method involves 25-fold evaporative concentration, ion chromatographic separation and subsequent spectrophotometric detection after post-column reaction with 4-(2-pyridylazo) resorcinol. Analytical sensitivities, being defined by the slopes of calibration curves, are 0.93, 0.54, and 0.11 Abs/ $\mu$g/ml for iron, copper, zinc, respectively. Detection limits render around a few tenth of one ng/ml. Precisions evaluated by replicate analysis of real sample are better than 10% RSD. Due to the lack of certified standards for rainwater, the accuracy of the method could not be assessed directly. However, the results of this method agree well with those by inductively coupled plasma mass spectrometry. Analytical results for a suite of Seoul rainwaters are presented herein.

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Effects of Aluminum and Silicon as Additive Materials for the Zinc Anode in Zn-Air Batteries

  • Lee, Yong-Seok;Ryu, Kwang-Sun
    • Journal of the Korean Electrochemical Society
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    • v.21 no.1
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    • pp.12-20
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    • 2018
  • To solve low cycle efficiency of the zinc anode in Zn-air batteries by corrosion, this study examined the effects of Al as a cathodic protection additive to Zn. The Al-mixed Zn anodes were produced by mixing Zn and Al powder (1, 2, and 3 wt. %). To compare the effects of the Al additive, Si was selected under the same conditions. The morphology and elemental composition of the additives in the Zn were characterized by scanning electron microscopy, energy dispersive X-ray spectroscopy, and inductively coupled plasma - mass spectrometry. The anti-corrosion effects of the Al and Si-mixed Zn anodes were examined by linear polarization. Cyclic voltammetry and charge-discharge tests were conducted to evaluate the electrochemical performance of the Al and Si-mixed Zn anodes. As a result, the Al-mixed Zn anodes showed highest corrosion resistance and cycling performance. Among these, the 2 wt.% Al-mixed Zn anodes exhibited best electrochemical performance.