• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.942-945
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• 1999

In this work, we proposed Proper etching algorithm for ultra-large scale integrated circuit device and simulated etching process using the proposed algorithm in the case of ICP (inductive coupled plasma) 〔1〕source. Until now, many algorithms for etching process simulation have been proposed such as Cell remove algorithm, String algorithm and Ray algorithm. These algorithms have several drawbacks due to analytic function; these algorithms are not appropriate for sub 0.1 ${\mu}{\textrm}{m}$ device technologies which should deal with each ion. These algorithms could not present exactly straggle and interaction between Projectile ions and could not consider reflection effects due to interactions among next projectile ions, reflected ions and sputtering ions, simultaneously In order to apply ULSI process simulation, algorithm considering above mentioned interactions at the same time is needed. Proposed algorithm calculates interactions both in plasma source region and in target material region, and uses BCA (binary collision approximation4〕method when ion impact on target material surface. Proposed algorithm considers the interaction between source ions in sheath region (from Quartz region to substrate region). After the collision between target and ion, reflected ion collides next projectile ion or sputtered atoms. In ICP etching, because the main mechanism is sputtering, both SiO$_2$ and Si can be etched. Therefore, to obtain etching profiles, mask thickness and mask composition must be considered. Since we consider both SiO$_2$ etching and Si etching, it is possible to predict the thickness of SiO$_2$ for etching of ULSI.

• Journal of the Korea Convergence Society
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• v.6 no.2
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• pp.57-64
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• 2015

Inductive Power Transfer (IPT) systems have successfully been developed and used to replace traditional conductive power transfer systems where physical connection is either inconvenient or impossible, such as biomedical implants, undersea vehicles, and contactless battery chargers of robots, for providing power to movable or detachable loads. Inductive Coupling uses magnetic fields to transfer power. There is a primary coil, which generates a magnetic field. Then there is another secondary coil which is composed of a capacitor and a coil, the capacitor creates a circuit with the primary and secondary coils. This paper discusses design method and several implementation alternatives for wireless energy transmission systems. It presents realization examples for these alternatives. Wireless energy transmission is investigated in numerous convergence applications due to its simplicity and advantages.

• The Transactions of the Korean Institute of Power Electronics
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• v.21 no.3
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• pp.275-281
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• 2016

A novel bidirectional magnetic wireless communication system is proposed in this study. This system provides the communication capability between the source and load sides by high-frequency signal while wireless power is transferred. Contrary to the conventional wireless communication systems using complex IC circuit and active components, the proposed system is simply composed of passive components. It is practical and beneficial for environmental robustness, cost effectiveness, and simple implementation. The detailed static analysis of the proposed system for power and communication lines is established. The proposed system is experimentally verified, and results show that a 0.1 voltage gain for communication line is obtained while a 2.0 voltage gain for the power line is achieved. The proposed system is adequate for practical applications as it allows the inductive power transfer system to wirelessly and easily communicate between the source and load sides.

• Journal of Power Electronics
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• v.17 no.6
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• pp.1391-1401
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• 2017

In this paper, a secondary resonance half-bridge dc-dc converter with an inductive output filter is presented. The primary side of such a converter utilizes asymmetric pulse width modulation (APWM) to achieve zero-voltage switching (ZVS) of the switches, and clamps the voltage of the switch to the input voltage. In addition, zero current switching (ZCS) of the output diode is achieved by a half-wave rectifier circuit with a filter inductor and a resonant branch in the secondary side of the proposed converter. Thus, the switching losses and diode reverse-recovery losses are eliminated, and the performance of the converter can be improved. Furthermore, an inductive output filter exists in the converter reduce the output current ripple. The operational principle, performance analysis and design equation of this converter are given in this paper. The analysis results show that the output diode voltage stress is independent of the duty cycle, and that the voltage gain is almost linear, similar to that of the isolation Buck-type converter. Finally, a 200V~380V input, 24V/2A output experimental prototype is built to verify the theoretical analysis.

• The Transactions of the Korean Institute of Power Electronics
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• v.27 no.6
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• pp.471-480
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• 2022

Inductive power transfer (IPT) is an attractive power transmission solution that is already used in many applications. In the IPT system, optimal coil design is essential to achieve high power efficiency, but the effective design method is yet to be investigated. The inductance formula and finite element method (FEM) are popular means to link the coil geometric parameters and circuit parameters; however, the former lacks generality and accuracy, and the latter consumes much computation time. This study proposes a novel coil design method to achieve speed and generality without much loss of accuracy. By introducing one-turn permeance simulation in each FEM phase combined with curve fitting and optimization by MATLAB in the efficiency calculation phase, the iteration number of FEM can be considerably reduced, and the generality can be retained. The proposed method is verified through a 100 W IPT system experiment.

• JSTS:Journal of Semiconductor Technology and Science
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• v.9 no.4
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• pp.198-204
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• 2009

Inductive peaking using T-coils has been widely used in broadband I/O interfaces. In this paper, we analyze technical effects and limitations of the T-coil, and discuss several methods that can overcome these restrictions and improve the practicality of the T-coil. In particular we also propose and verify a circuit topology which can further extend bandwidth beyond the limit that conventional T-coil can achieve, and transfer 20 Gb/s data without noticeable distortion.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.58 no.2
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• pp.221-226
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• 2009

In this paper, we analyzed form of flowing leakage current in electrical installation. Leakage current ($I_g$) is consisted of resistive leakage current($I_{gr}$), capacitive leakage current($I_{gc}$), and inductive leakage current($I_{gl}$). Resistive leakage current($I_{gr}$) is big occasion than capacitive leakage current($I_{gc}$) in system, Residual Current Protective Device(RCD) detects correctly leakage current. But,$I_{gc}$ is big occasion than $I_{gr}$, RCD is malfunctioned It is resistance to lead to electric fire in electrical device. We manufactured outlet that resistive leakage current detecting circuit is had. Manufactured outlet displayed performance exactly in leakage current of 5 mA Therefore, this product estimates that contribute on electric fire courtesy call.

• Progress in Superconductivity
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• v.3 no.2
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• pp.235-240
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• 2002

In this paper, we investigated the current limiting characteristic in the magnetic shielding type fault current limiter(MSFCL). The circuit analysis was executed by using finite differential method(FDM). This paper suggests that the current limiting performance can be achieved in two ways (resistive and inductive one), according to design parameter. By comparing current limiting characteristics in two ways and surveying the important parameters which determine the operational way after fault occurs in the design of MSFCL, it is shown that the magnetic shielding type fault current limiter can be operated in either resistive or inductive way.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.230-233
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• 2003

This paper deals with the fabrication of high temperature superconducting(HTS) solenoid for DC reactor of 6.6㎸/200A inductive superconducting fault current limiter(SFCL). The winding machine which is suitable to wind HTS wire was manufactured. The proper inductance was calculated by circuit simulation and G10-FRP bobbin was fabricated with this inductance, HTS solenoid was wound by using the winding machine. The V-I characteristic of completed DC reactor in sub-cooled nitrogen(65K) was measured. The full quench current of this magnet is about 490A.

• Proceedings of the KIEE Conference
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• 2003.11a
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• pp.154-157
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• 2003

The exicting short circuit analysis calculate the current with the balance system and unbalance fault impedance. That method deal with only bus fault with the consequence that line fault study is irrational. This paper propose the line fault, shunt unbalance and series unbalance analysis method using template concept that is one of advantages for OOP(Object-Oriented Programming). This method is possible to use for calculating inductive distrubance.