• 제목/요약/키워드: Incidence Angle

검색결과 579건 처리시간 0.027초

스퍼터 장비의 설계 룰을 찾기 위한 Si박막 특성 변화 연구 (A Study on the Change of Si Thin Film Characteristics to Find Design Rules for Sputtering Equipment)

  • 김보영;강서익
    • 반도체디스플레이기술학회지
    • /
    • 제19권3호
    • /
    • pp.100-105
    • /
    • 2020
  • Recently, as display and semiconductor devices have been miniaturized and highly integrated, there is a demand for optimization of the structural characteristics of the thin film accordingly. The sputtering device has the advantage of stably obtaining a desired thin film depending on the material selected for the target. However, due to the structural characteristics of the sputtering equipment, the structural characteristics of the film may be different depending on the incidence angle of the sputtering target material to the substrate. In this study, the characteristics of the thin film material according to the scattering angle of the target material and the incidence position of the substrate were studied to find the optimization design rule of the sputtering equipment. To this end, a Si thin film of 1 ㎛ or less was deposited on the Si(100) substrate, and then the microstructure, reflectance, surface roughness, and thin film crystallinity of the thin film formed for each substrate location were investigated. As a result of the study, it was found that as the sputter scattering angle increased and the substrate incident angle decreased, the gap energy along with the surface structure of the thin film increased from 1.47 eV to 1.63 eV, gradually changing to a non-conductive tendency.

하악 제3대구치와 하악 우각부 골절과의 상관관계에 대한 연구 (A STUDY OF CORRELATION BETWEEN MANDIBULAR ANGLE FRACTURE AND THE MANDIBULAR THIRD MOLAR)

  • 박선혜;최준영;김성일;유준열;임대호;신효근;고승오
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
    • /
    • 제35권6호
    • /
    • pp.420-425
    • /
    • 2009
  • Purpose: The aim of this study is to analyze the correlation between incidence of mandibular angle fracture and eruption state of mandibular third molar using clinical and radiographic findings. Materials and Methods: The data were obtained from the clinical and radiographic records of 205 patients who visited the Department of Oral and Maxillofacial Surgery, Chonbuk National University Hospital for treatment of the mandibular fracture. Panoramic radiographies were taken for radiographic examination and the mandibular third molars were classified according to age, gender, position and eruption state. Data were analyzed by a chi-square statistics. Results: In this study, the incidence of mandibular angle fracture had a tendency to be greater when a mandibular third molar was present(p>0.05), but there was not a statistically significant difference. Of the 255 cases with a mandibular third molar, 67 had an angle fractures. Of the 155 cases without a mandibular third molar, 138 had not angle fracture. And the incidence of mandibular angle fracture was high at class BII(by Pell & Gregory system)(p<0.05). Conclusion: Although there was not a statistically significant difference, mandibular third molar was more susceptible to mandibular angle fracture. When the reduction of mandibular angle fracture, it was recommended that mandibular third molar should be extracted especially in case of pericoronitis, periodontitis and other infections.

Ellipsometry에서의 Calibration 및 입사면 고정형 Ellipsometer (Calibration and a Plane of Incidence Fixed Ellipsometer)

  • 경재선;오혜근;안일신;김옥경
    • 반도체디스플레이기술학회지
    • /
    • 제2권4호
    • /
    • pp.23-26
    • /
    • 2003
  • The general users find difficulties in using ellipsometers. Thus, the object of this study is to construct an ellipsometer with simple operation principle. We developed an ellipsometer which does not require alignment and calibration before measuring sample. A basis structure model after rotating a compensator spectroscopic ellipsometry, the fixed incidence angle at $70^{\circ}$. This ellipsometer does not demand calibration, because the plane of incidence is not changed due to the novel sample holder structure. The results for various standard samples were compared with those from conventional RCSE to test the performance of this instrument. Also repeated measurements were performed to test the precision of the calibration coefficient in a plane of incidence fixed.

  • PDF

기울어진 정방형 실린더를 지나는 난류 유동 (TURBULENT FLOW AROUND AN INCLINED SQUARE CYLINDER)

  • 윤동혁;양경수
    • 한국전산유체공학회지
    • /
    • 제14권2호
    • /
    • pp.52-58
    • /
    • 2009
  • Turbulent flow past an inclined square cylinder immersed in a cross stream is numerically investigated. The angle of incidence of main flow is one of the key factors determining at which edges the flow separates. In the present study, based on comprehensive numerical simulations, effects of inclination angle on the flow characteristics are elucidated and the related physical explanation is presented.

가변 입사각 타원 해석법을 사용한 유리기판위의 이산화규소박막의 굴절율 및 두께 측정 (Measurement of a refractive index and thickness of silicon-dioxide thin film on LCD glass substrate using a variable angle ellipsometry)

  • 방현용;김현종;김상열;김병익
    • 한국광학회지
    • /
    • 제8권1호
    • /
    • pp.31-36
    • /
    • 1997
  • 나트륨 이온의 용출을 방지하기 위해 LCD용 유리기판위에 입혀진 SiO$_{2}$ 박막의 굴절율 및 두께를 측정하였다. 입사각을 고정하고 박막의 두께를 0 .angs.부터 주기 두께까지 20.angs.씩 증가시키며 계산한 타원해석상수와 두께를 고정하고 입사각을 45.deg에서 70.deg까지 1.deg.씩 증가시키며 계산한 타원해석상수를 이용하여 LCD용 유리기판위에 증착된 SiO$_{2}$ 박막의 굴절율 및 두께 측정에서의 최적 측정 조건을 구하였다. 최적 측정 조건에서 굴절율 및 두께의 변화에 따른 타원해석상수 .DELTA.와 .PSI.의 변화를 계산하여 .DELTA.와 .PSI.측정 상의 오차와 비교하여 굴절율 및 두께 결정 시의 오차를 추정하였다. 최적 측정 조건인 Brewster 각 근방에서의 여러 입사각에서 LCD용 유리기판위에 입혀진 SiO$_{2}$ 박막의 타원해석상수 .DELTA.와 .PSI.를 측정하고, 이 측정값에 최적 맞춤하는 SiO$_{2}$ 박막의 굴절율 및 두께를 회귀분석방법을 사용하여 전산 계산하고 분광타원해석법에 의한 박막의 두께 및 굴절율과 비교하였다.

  • PDF

Molecular dynamics study on initial growth behavior of amorphous carbon film under various incidence angles

  • Joe, Min-Woong;Moon, Myoung-Woon;Lee, Kwang-Ryeol
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
    • /
    • pp.310-310
    • /
    • 2011
  • Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences ($0^{\circ}{\sim}30^{\circ}$) atomically smooth surfaces are observed during their growth. However, rough surfaces emerge and develop into a ripple structure at grazing incidences ($60^{\circ}{\sim}70^{\circ}$). The different growth modes according to the incidence angles can be described by impact-induced displacements of atoms. Downhill transport along any sloped surfaces is predominant for the case of normal incidence. As the incidence angles become grazing, uphill transport is allowed along the surfaces, which have smaller slopes than incidence angle, so the surface features can be amplified. Impact-induced transport and self-shadowing effect can be responsible to the initial growth of seeding structures at a grazing incidence, which would be grown up as tilted columnar structures in further depositions.

  • PDF

PIV study of the flow around a 5:1 rectangular cylinder at moderate Reynolds numbers and small incidence angles

  • Guissart, Amandine;Elbaek, Erik;Hussong, Jeanette
    • Wind and Structures
    • /
    • 제34권1호
    • /
    • pp.15-27
    • /
    • 2022
  • This work comes within the framework of the "Benchmark on the Aerodynamics of a Rectangular Cylinder" that investigates a rectangular cylinder of length-to-depth ratio equal to 5. The present study reports and discusses velocity fields acquired using planar Particle Image Velocitmetry for several angles of attack and Reynolds numbers. In particular, for a cylinder depth-based Reynolds number of 2 × 104 and zero incidence angle, the flow features along the lateral (parallel to the freestream) upper and lower surfaces of the cylinder are reported. Using first and second order statistics of the velocity field, the main flow features are discussed, especially the size and location of the time-averaged flow structures and the distribution of the Reynolds stresses. The variation of the flow features with the incidence is also studied considering angles of attack up to 6°. It is shown that the time-averaged flow is fully detached for incidence higher than 2°. For an angle of attack of 0°, the effects of the Reynolds number varying between 5 × 103 and 2 × 104 are investigated looking at flow statistics. It is shown that the time-averaged location of the reattachment point and the shape and position of the time-averaged main vortex are mostly constant with the Reynolds number. However, the size of the inner region located below the time-averaged shear layer and just downstream the leading edge corner appears to be strongly dependent on the Reynolds number.

Numerical Analysis on the Turbulent Flow of Compressor Cascades at High Incidence Angle

  • Jeong, Soo-in;Jeong, Gi-ho;Kim, Kui-soon
    • 한국추진공학회:학술대회논문집
    • /
    • 한국추진공학회 2004년도 제22회 춘계학술대회논문집
    • /
    • pp.825-830
    • /
    • 2004
  • A numerical analysis based on two-dimensional and three-dimensional incompressible Navier-Stokes equations has been carried out for double-circular-arc (DCA) compressor cascades. Two types of double-circular-arc cascades were used in this analysis. The appropriate turbulence model for compressor analysis was selected among the conventional turbulence models such as Baldwin-Lomax, k-$\varepsilon$ and k-$\varepsilon$ models. The results of current study were compared with available experimental data at various incidence angles. The 2-D and 3-D computational codes based on SIMPLE/PWIM algorithm for collocated grid and hybrid scheme for the convective terms were the main features of numerical tools. As commonly known, turbulence modeling is very important for the prediction of cascade flows, which are extremely complex with separation and reattachment by adverse pressure gradient. For selection of turbulence model, 2-D analysis was performed. And then, k-$\varepsilon$ turbulence model with wall function chosen as the reasonable turbulence model for 3-D calculation was used to increase the efficiency of computation times. A reasonable result of 3-D flow pattern passing through the double-circular-arc cascade was obtained.

  • PDF

Design and Analysis of a Controlled Diffusion Aerofoil Section for an Axial Compressor Stator and Effect of Incidence Angle and Mach No. on Performance of CDA

  • Salunke, Nilesh P.;Channiwala, S.A.
    • International Journal of Fluid Machinery and Systems
    • /
    • 제3권1호
    • /
    • pp.20-28
    • /
    • 2010
  • This paper deals with the Design and Analysis of a Controlled Diffusion Aerofoil (CDA) Blade Section for an Axial Compressor Stator and Effect of incidence angle and Mach No. on Performance of CDA. CD blade section has been designed at Axial Flow Compressor Research Lab, Propulsion Division of National Aerospace Laboratories (NAL), Bangalore, as per geometric procedure specified in the U.S. patent (4). The CFD analysis has been performed by a 2-D Euler code (Denton's code), which gives surface Mach No. distribution on the profiles. Boundary layer computations were performed by a 2-D boundary layer code (NALSOF0801) available in the SOFFTS library of NAL. The effect of variation of Mach no. was performed using fluent. The surface Mach no. distribution on the CD profile clearly indicates lower peak Mach no. than MCA profile. Further, boundary layer parameters on CD aerofoil at respective incidences have lower values than corresponding MCA blade profile. Total pressure loss on CD aerofoil for the same incidence range is lower than MCA blade profile.

퇴행성 및 협부형 척추전방전위증 환자의 시상면상 형태의 임상례 보고 (The Saggital Alignment in Degenerative and Isthmic Spondylothesis Patients : A Clinical Survey)

  • 이진혁;강만호;설무창;조계창;진은석;이한
    • 척추신경추나의학회지
    • /
    • 제3권1호
    • /
    • pp.55-64
    • /
    • 2008
  • Objective : Spondylothesis is a disease which sagittal facet of vertebral body's invariable alignment is being broken and vertebral body being pushed forward. Main pattern of spondylothesis is isthmic spondylothesis by isthmus defect or fracture, degenerative spondylothesis occurred by desiccated change of intervertebral disc or vertebral condyle joint's ligament. The purpose of this study is to assess the difference of the Pelvic angles, Lumbosacral angles, Pelvic tilt, and Lumbar lordotic angles of the spondylothesis patients. Methods : We analyzed the lateral view of lumbar spine of 49 isthmic spondylothesis patients, 45 degenerative spondylothesis patients and 26 patients who haven't been diagnosed as vertebra disease. We investigated each patient's pelvic angle, lumbosacral angle, pelvic tilt and lumbar lordotic angle. Results and Conclusion : 1. Pelvic incidence, in cases of degenerate spondylothesis patients, is higher than spondylothesis patients but shows less significance. On the contrary significance is higher than the group haven't been diagnosed as vertebra disease. 2. Lumbosacral incidence, in cases of isthmic spondylothesis patients, shows higher significance than degenerative spondylothesis patients and the group haven't been diagnosed as vertebra disease. 3 Pelvic tilt, in cases of degenerative spondylothesis patients, shows higher significance than isthmic spondylothesis patients and the group haven't been diagnosed as vertebra disease. 4. Lumbar lordotic angle, in cases of isthmic spondylothesis patients, shows higher significance than degenerative spondylothesis patients and the group haven't been diagnosed as vertebra disease. 5. Degenerative spondylothesis patient shows specific impression, a forwardly moved high femoral axial and as a result of large lumbrosacral angle and lumbar lordotic angle shows specific impression, an increased weight pressure on sacrum.

  • PDF