• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.3
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• pp.141-145
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• 2018

Ni-InGaAs shows promise as a self-aligned S/D (source/drain) alloy for n-InGaAs MOSFETs (metal-oxide-semiconductor field-effect transistors). However, limited thermal stability and instability of the microstructural morphology of Ni-InGaAs could limit the device performance. The in situ deposition of a Pd interlayer beneath the Ni layer was proposed as a strategy to improve the thermal stability of Ni-InGaAs. The Ni-InGaAs alloy layer prepared with the Pd interlayer showed better surface roughness and thermal stability after furnace annealing at $570^{\circ}C$ for 30 min, while the Ni-InGaAs without the Pd interlayer showed degradation above $500^{\circ}C$. The Pd/Ni/TiN structure offers a promising route to thermally immune Ni-InGaAs with applications in future n-InGaAs MOSFET technologies.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.154-154
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• 2011

자발형성법(Self-assembled)을 이용한 InAs 양자점(Quantum dots)은 성장법의 고유한 물리적 한계로 길이방향에 대한 수직방향 비율(Aspect ratio, AR)이 상대적으로 작은 값을 갖는다. 기존에 보고된 바에 따르면 GaAs 기판에 형성한 InAs 양자점은 일반적으로 AR이 0.3 정도를 보인다. 이러한 높이가 상대적으로 낮은 InAs 양자점은 수직방향으로 운반자(Carrier)의 파동함수 (Wave-function) 구속이 작게 되어 나노 양자점 구조의 0차원적 특성이 저하되게 된다. 본 논문에서는 Arsenic 차단법(Interruption technique)을 이용한 수정자발형성법(Modified self-assembled method, MSAM)으로 InAs 양자점(MSAM-InAs 양자점)을 형성하고 성장 변수에 따라 광 및 구조적 특성을 평가하여 0차원 순도를 분석하였다. MSAM InAs 양자점을 성장하고 12 nm 두께의 GaAs spacer 층을 증착한 후 $600^{\circ}C$에서 30초 동안 Arsenic 분위기에서 열처리(Annealing)를 수행 한 후 다시 InAs을 증착 하였다. 이러한 과정을 5번 반복하여 높이 방향으로 형상을 개선시킨 InAs 양자점을(Vetically-controlled MSAM, VCMSAM) 성장하였다. 기존 자발형성법을 이용한 InAs 양자점과 MSAM-InAs 양자점 단일층 구조를 기준시료로 성장하였다. 상온 포토루미네슨스(Photoluminescence, PL) 실험에서 단일 MSAM InAs 양자점 및 VCMSAM 양자점 시료의 발광에너지는 각각 1.10 eV와 1.13 eV를 나타내었다. VCMSAM InAs 양자점 시료의 PL세기는 단일 MSAM 양자점보다 3.4배 증가되어, 확연히 높게 나타나는 결과를 보였다. 이러한 결과는 높이 방향으로 운반자의 파동함수 구속력이 증가하여 구속준위 (Localized states)의 전자-정공의 파동함수중첩(Overlap integral)이 개선된 것으로 설명할 수 있다. 투과전자현미경(Transmission electron microscopy) 및 원자력간 현미경(Atomic force microscopy)을 이용하여 구조적 특성을 평가하고 이를 비교 분석한 결과를 보고한다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.6 no.3
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• pp.351-359
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• 1996

We have investigated the effect of hydrogen plasma on the formation of InAs QDs (quantum dots) structure by using a CBE (chemical beam epitaxy)system equipped with ECR (electron cyclotron resonance) plasma source. It is confirmed that the formation of self-organized InAs-QDs on GaAs is started after the growth of InAs layer up to 2.6 ML (monolayer) with the irradiation of hydrogen plasma while it is started after 1.9 ML without hydrogen gas and hydrogen plasma through the observation of RHEED patterns. Density and size of the QDs formed at $T_{sub}=370^{\circ}C$ are $1.9{\times}10^{11}cm^{-2}$ and 17.7 nm without hydrogen plasma, and $1.3{\times}10^{11}cm^{-2}$ and 19.4 nm with hydrogen plasma, respectively. It is also observed from the PL(photoluminescence) measurement on InAs-QDs that red shift in PL peak energy and broadening in FWHM (full width at half maximum)of PL peak caused by the effects of hydrogen plasma on the increment of size and its distribution. These effects of hydrogen plasma are considered as a act of atomic hydrogen which enhances the layer-growth of InAs on GaAs resulted from the relief of misfit strain between GaAs substrate and InAs.

• Electronics and Telecommunications Trends
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• v.15 no.6 s.66
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• pp.113-117
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• 2000

본 고에서는 MHEMT(Metamorphic InAlAs/InGaAs HEMT) 구조의 특성, MHEMT 소자특성, MHEMT MMIC 결과와 향후의 기술동향을 논의한다.

• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.345-355
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• 2011

GaAs-based metamorphic high electron mobility transistors (MHEMTs) and InP-based high electron mobility transistors (HEMTs) have good microwave and millimeter-wave frequency performance with lower minimum noise figure. MHEMTs have some advantages, especially for cost, compared with InP-based ones. In this paper, InAlAs/InxGa1-xAs/GaAs MHEMTs are simulated for DC/RF small-signal analysis. The hydrodynamic simulation parameters are calibrated to a fabricated 0.1-${\mu}m$ ${\Gamma}$-gate MHEMT device having the modulation-doped $In_{0.52}Al_{0.48}As/In_{0.53}Ga_{0.47}As$ heterostructure on the GaAs substrate, and the simulations for RF small-signal characteristics are performed, compared with the measured data, and analyzed for the devices. In addition, the simulations for the DC/RF characteristics of the MHEMTs with different gate-recess structures are performed, compared and analyzed.

• Proceedings of the Korean Environmental Health Society Conference
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• 2004.12a
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• pp.51-62
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• 2004

Lime based stabilization/solidification (S/S) can be an effective remediation alternative for the immobilization of arsenic (As) in contaminated soils and sludges. However, the exact immobilization mechanism has not been well established, Based on previous research, As immobilization could be attributed to sorption and/or inclusion in pozzolanic reaction products and/or the formation of calcium-arsenic (Ca-As) precipitates. In this study, suspensions of lime-As were studied in an attempt to elucidate the controlling mechanism of As immobilization in lime treated soils. Aqueous lime-As suspensions (slurries) with varying Ca/As molar ratios (1:1, 1.5:1, 2:1, 2.5:1 and 4:1) were prepared and soluble As concentrations were determined. X-ray diffraction (XRD) analyses were used to establish the resulting mineralogy of crystalline precipitate formation. Depending on the redox state of the As source, different As precipitates were identified. When As (III) was used, the main precipitate formation was Ca-As-O. With As(V) as the source, Ca4(OH)2(AsO4)2${\cdot}$4H2O formed at Ca/As molar ratios greater than 1:1. A significant increase in As (III) immobilization was observed at Ca/As molar ratios greater than 1:1. Similarly, a substantial increase in As (V) immobilization was noted at Ca/As molar ratios greater than or equal to 2.5: 1. This observation was also confirmed by XRD. The effectiveness of both As (III) and As(V) immobilization in these slurries appeared to increase with increasing Ca/As molar ratios.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.257-261
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• 2001

InAs/GaAs quantum dots between InGaAs/GaAs superlattices were grown by MBE. The quantum dots size is shown to be very uniform by measuring photoluminescence spectra of quantum dots. Single photon structures based on self-consistent calculation were grown and single photon devices were fabricated by e-beam lithography. The electrical hystereses of I-V curves for single Photon devices would result from single electron-hole recombination, where the resonant-tunneling voltages of electron and hole are different.

• Applied Microscopy
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• v.26 no.4
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• pp.479-487
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• 1996

Thin epilayer structures of GaAs/AlAs/InGaAs, grown by Molecular Beam Epitaxy, were investigated by high resolution transmission electron microscopy, Image in the [110] zone axis was taken and compared with the calculated images. The supercell structure which contains GaAs, AlAs and InGaAs layers was designed and was employed in the image calculation with MacTempas computer program. Good agreement was shown between experimental image and a set of calculated images with varying defocus and sample thickness.

• Korean Journal of Soil Science and Fertilizer
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• v.50 no.2
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• pp.115-126
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• 2017

There is an increasing concern over arsenic (As) contamination in rice. This study was conducted to develope a prediction model for As uptake by rice based on the physico-chemical properties of soil. Soil and brown rice samples were collected from 46 sites in paddy fields near three different areas of closed mines and industrial complexes. Total As concentration, soil pH, Al oxide, available phosphorus (avail-P), organic matter (OM) content, and clay content in the soil samples were determined. Also, 1.0 N HCl, 1.0 M $NH_4NO_3$, 0.01 M $Ca(NO_3)_2$, and Mehlich 3 extractable-As in the soils were measured as phytoavailable As concentration in soil. Total As concentration in brown rice samples was also determined. Relationships among As concentrations in brown rice, total As concentrations in soils, and selected soil properties were as follows: As concentration in brown rice was negatively correlated with soil pH value, where as it was positively correlated with Al oxide concentration, avail-P concentration, and OM content in soil. In addition, the concentration of As in brown rice was statistically correlated only with 1.0 N HCl-extractable As in soil. Also, using multiple stepwise regression analysis, a modelling equation was created to predict As concentration in brown rice as affected by selected soil properties including soil As concentration. Prediction of As uptake by rice was delineated by the model [As in brown rice = 0.352 + $0.00109^*$ HCl extractable As in soil + $0.00002^*$ Al oxide + $0.0097^*$ OM + $0.00061^*$ avail-P - $0.0332^*$ soil pH] ($R=0.714^{***}$). The concentrations of As in brown rice estimated by the modelling equation were statistically acceptable because normalized mean error (NME) and normalized root mean square error (NRMSE) values were -0.055 and 0.2229, respectively, when compared with measured As concentration in the plant.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.7
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• pp.51-57
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• 1995

The theoretical analysis for AlInAs/GaInAs resonant tunneling diodes (RTDs), which have shown the improved negative differential resistance (NDR) characteristics, has scarcely been made in comparison with AlGaAS/GaAs RTDs. In this paper, the static current-voltage relation of Al$_{0.48}In_{0.52}As/Ga_{0.47}In_{0.53}$As RTDs were numerically estimated by using a self-consistent method. Assuming a simplified RTD with single quantum well structure and spacer layers, the peak current density (J$_{P}$) and the peak-to-valley current ratio (PVCR) were analysed as the function of the thickness of the well, the barrier and the spacer layer, and temperature. As the results, the peak current density and the peak-to-valley current ratio indicated a reciprocal relation roughly in respect to the thicknesses of the well and the barrier, and it was theoretically predicted that it be not attainable to provide a high peak current desity (J$_{P}$) over 1${\times}10^{5}A/cm^{2}$ as well as the large peak-to-valley current ratio (PVCR) over 10 that were the the critical conditions for the practical use.