• Transactions on Electrical and Electronic Materials
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• v.13 no.3
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• pp.139-143
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• 2012

Optical emission spectroscopy (OES) is often used for real-time analysis of the plasma processes. OES has been suggested as a primary plasma process monitoring tool. It has the advantage of non-invasive in-situ monitoring capability but selecting the proper wavelengths for the analysis of OES data generally relies on empirically established methods. In this paper, we propose a practical method for the selection of OES wavelength peaks for the analysis of plasma etch process and this is done by investigating reactants and by-product gas species that reside in the plasma etch chamber. Wavelength selection criteria are based on the standard deviation and correlation coefficients. Moreover, chemical actinometry is employed for the normalization of the selected wavelengths. We also present the importance of chemical actinometry of OES data for quantitative analysis of plasma. Then, the suggested OES peak selection method is employed.. This method is used to find out the reason behind abnormal etching of PR erosion during a series of $SiO_2$ etch processes using the same recipe. From the experimental verification, we convinced that OES is not only capable for real-time detection of abnormal plasma process but it is also useful for the analysis of suspicious plasma behavior.

• Journal of Korean Tunnelling and Underground Space Association
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• v.26 no.2
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• pp.153-167
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• 2024

Recently the ground settlement has been increasing in urban area according to development. And, this may attribute a groundwater level drawdown. This study presents an analysis of groundwater level drawdown for circular vertical shaft excavation of ｢◯◯◯◯ double track railway build transfer operate project｣. And, in-situ monitoring data and numerical analysis were compared. So, if we examine the groundwater level drawdown in design, ground conditions should be applied so that the site situation can be reflected. And, groundwater level should be considered a seasonal measurement in order to apply the appropriate groundwater level. It was confirmed a similar predicted value to groundwater level drawdown of in-situ monitoring data.

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.5
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• pp.409-417
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• 2003

Cure monitoring can be used to improve the quality and productivity of thermosetting resin matrix composite products during their manufacturing process. In this work, the sensitivity of dielectrometry was improved by adequate separation the efforts of sensor and externals on the measured signal. A new algorithm to obtain the degree of cure during dielectric cure monitoring of glass/polyester and glass/epoxy composites was developed by employing a function of both temperature and dissipation factor, in which five cure monitoring parameters were used to calculate the degree of cure. The decreasing pattern of dissipation factor was compared with the relationships between the degree of cure and the resin viscosity. The developed algorithm might be employed for the in situ cure monitoring of thermosetting resin composites.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.96-99
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• 2019

Atomic layer etching (ALE) is one of the most promising techniques in the semiconductor industry. Since ALE has to be precisely controlled on the angstrom scale to achieve ideal results, an in-situ analysis of the processes is highly required. In this regard, we found during ALE experiments with in-situ monitoring with an ellipsometer that changes in the substrate temperature affected the refractive index of a material, leading to changes in measured film thickness. In addition, more ideal ALE results could be achieved by keeping the substrate temperature constant.

• Corrosion Science and Technology
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• v.15 no.6
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• pp.271-280
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• 2016

An approach to achieving the ambitious goal of cost effectively extending the safe operation life of energy pipeline to 100 years is the application of health monitoring and life prediction tools that are able to provide both long-term remnant pipeline life prediction and in-situ pipeline condition monitoring. A critical step is the enhancement of technological capabilities that are required for understanding and quantifying the effects of key factors influencing buried steel pipeline corrosion and environmentally assisted materials degradation, and the development of condition monitoring technologies that are able to provide in-situ monitoring and site-specific warning of pipeline damage. This paper provides an overview of our current research aimed at developing new sensors and electrochemical cells for monitoring, categorising and quantifying the level and nature of external pipeline and coating damages under the combined effects of various inter-related variables and processes such as localised corrosion, coating cracking and disbondment, cathodic shielding, transit loss of cathodic protection.

• Smart Structures and Systems
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• v.13 no.1
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• pp.155-171
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• 2014

Various monitoring techniques are now available for structural health monitoring and Acoustic Emission (AE) is one of them. One of the major advantages of the AE technique is its capability to locate active cracks in structural members. AE crack locating approaches are affected by the signal attenuation and dispersion of elastic waves due to inhomogeneity and geometry of reinforced concrete (RC) members. In this paper, a novel technique is described based on signal processing and sensor arrangement to process multisensory AE data generated by the onset and propagation of cracks and is validated with experimental results from an in-situ load test. Considering the sources of uncertainty in the AE crack location process, a methodology is proposed to capture and locate events generated by cracks. In particular, the relationship between AE events and load is analyzed, and the feasibility of using the AE technique to evaluate the cracking behavior of two RC slab strips during loading to failure is studied.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.87-91
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• 2021

Various Cu ions are discharged into water from various industries, which results in a severe trouble for groundwater, soil, air, and eventually animals and humans. In this work, graphene oxide (GO) is introduced as a Cu removal absorber and the real-time monitoring method is demonstrated. The results show that GO is a very effective material to absorb Cu ions in the solution. In addition, the residual Cu ions in the solution is monitored via optical transmittance method, which well match with Inductively Coupled Plasma Mass Spectrometer (ICP-MS) analysis.

• Nuclear Engineering and Technology
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• v.54 no.1
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• pp.186-192
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• 2022

Flow accelerated corrosion (FAC) is a type of pipe corrosion in which the pipe thickness decreases depending on the fluid flow conditions. In nuclear power plants, FAC mainly occurs in the carbon steel pipes of a secondary system. However, because the temperature of a secondary system pipe is over 150 ℃, in situ monitoring using a conventional ultrasonic non-destructive testing method is difficult. In our previous study, we developed a waveguide ultrasonic thickness measurement system. In this study, we applied a waveguide ultrasonic thickness measurement system to monitor the thinning of the pipe according to the change in pH. The Korea Atomic Energy Research Institute installed FAC-proof facilities, enabling the monitoring of internal fluid flow conditions, which were fixed for ~1000 h to analyze the effect of the pH. The measurement system operated without failure for ~3000 h and the pipe thickness was found to be reduced by ~10% at pH 9 compared to that at pH 7. The thickness of the pipe was measured using a microscope after the experiment, and the reliability of the system was confirmed with less than 1% error. This technology is expected to also be applicable to the thickness-reduction monitoring of other high-temperature materials.

• Proceedings of the Korea Society of Environmental Toocicology Conference
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• 2004.05a
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• pp.47-60
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• 2004

Higher plants can be valuable genetic assay systems for monitoring environmental pollutants and evaluating their biological toxicity. Two assays are considered ideal for in situ monitoring and testing of soil, airborne and aqueous mutagenic agents; the Tradescantia stamen hair assay for somatic cell mutations and the Tradescantia micronucleus assay for chromosome aberrations. Both assays can be used for in vivo and in vitro testing of mutagens. Since higher plant systems are now recognized as excellent indicators and have unique advantages over in situ monitoring and screening, higher plant systems could be accepted by regulatory authorities as an alternative first-tier assay system for the detection of possible genetic damages resulting from the pollutants or chemicals used and produced by industrial sectors. It has been concluded that potential mutagen and carcinogen such as the heavy metals among indoor air particulates, volatile compounds in the working places, soil, and water pollutants contribute to the overall health risk. This contribution can be considerable under certain circumstances. It is therefore important to identify the level of genotoxic activity in the environment and to relate it to the biomarkers of a health risk in humans. The results from the higher plant bioassays could make a significant contribution to assessing the risks of pollutants and protecting the public from agents that can cause mutation and/or cancer. The plant bioassays, which are relatively inexpensive and easy to handle, are recommended for the scientists who are interested in monitoring pollutants and evaluating their environmental toxicity to living organisms.

• Proceedings of the Korea Society of Environmental Biology Conference
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• 2004.05a
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• pp.1-15
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• 2004

Higher plants can be valuable genetic assay systems for monitoring environmental pollutants and evaluating their biological toxicity. Two assays are considered ideal for in situ monitoring and testing of soil, airborne and aqueous mutagenic agents; the Tradescantia stamen hair assay for somatic cell mutations and the Tradescantia micronucleus assay for chromosome aberrations. Both assays can be used for in vivo and in vitro testing of mutagens. Since higher plant systems are now recognized as excellent indicators and have unique advantages over in situ monitoring and screening, higher plant systems could be accepted by regulatory authorities as an alternative first-tier assay system for the detection of possible genetic damages resulting from the pollutants or chemicals used and produced by industrial sectors. It has been concluded that potential mutagen and carcinogen such as the heavy metals among indoor air particulates, volatile compounds in the working places, soil, and water pollutants contribute to the overall health risk. This contribution can be considerable under certain circumstances. It is therefore important to identify the level of genotoxic activity in the environment and to relate it to the biomarkers of a health risk in humans. The results from the higher plant bioassays could make a significant contribution to assessing the risks of pollutants and protecting the public firom agents that can cause mutation anuor cancer. The plant bioassays, which are relatively inexpensive and easy to handle, are recommended for the scientists who are interested in monitoring pollutants and evaluating their environmental toxicity to living organisms.