• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.216.2-216.2
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• 2013

Nano-indenter는 팁을 박막 표면으로부터 일정 깊이까지 일정한 비율로 힘을 팁에 인가하여 그에 따른 박막의 반응을 in-situ로 확인하기 위하여 고안된 장치이며, 박막은 물론 나노 구조물까지 다양한 범위에서 기계적 특성을 분석하기 위하여 사용되고 있다. 이 연구에서는 유전체 및 확산방지막으로 사용되는 Hf을 rf magnetron sputter로 증착하였으며 이때 Ar 가스와 함께 $N_2$ 가스의 혼합 비율을 다르게 하여 HfN을 증착하였다. 질소 분압에 따라 증착된 HfN 박막은 고온중에서 질소의 영향을 확인하기 위하여 $800^{\circ}C$로 질소 분위기에서 20분간 열처리하여 이후 박막의 nano-mechanical 특성을 nanoindenter를 사용하여 확인하였고 최대 압입력을 250 ${\mu}N$으로 고정하였다. 측정결과 고온 열처리후 HfN 박막은 증착시 질소 분압이 0%에서 5%로 증가함에 따라 surface hardness는 8.6 GPa에서 8.1 GPa로 elastic modulus는 123.7 GPa에서 134 GPa로 각각 변화되는 것을 확인할 수 있었다. 특히, 질소 분압이 2.5%로 증착된 HfN 박막은 열처리후 박막 표면의 물리적 특성이 깊이 방향으로 층을 이루고 있어 nano-indenter 압입시 다수의 pop-in이 나타남을 확인하였다.

• Journal of Advanced Marine Engineering and Technology
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• v.23 no.3
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• pp.300-310
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• 1999

A constant-volume combustion chamber is developed to measure the burnt gas temperature over the wide ranges of equivalence ratio from 1.5 to 2.7 and pressure from 0.1 to 2.7 and pressure from 0.1 to 6 MPa by two-color method. The combustion temperature is also calculated by the conventional two-region model. The premixed fuel rich propane-oxygen-inert gas mixtures under high pressures are simultaneously ignited by eight spark plugs located on the circumference of combustion chamber with 45 degree intervals. The eight converging flames compress the end gases to high pressures. The transmissiv-ity in the chamber center during the final stage of combustion at the highest pressure is measured by in situ laser extinction method. Comparisons are made with the combustion temperatures between two-color method and two-region model. It is found that the burnt gas temperature mea-sured by two-color method is higher than that calculated by two-region model because of being the negative temperature gradient on the calculation and the temperature distribution of light path-length on the measurement and the burnt gas temperature for the turbulent combustion is higher than that of the laminar combustion under the same conditions because the heat loss for turbulent combustion is lower due to the shorter combustion period.

• KSBB Journal
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• v.21 no.5
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• pp.401-404
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• 2006

Macroporous Poly(Methacrylic acid-co-Ethylene Glycol Dimethacrylate) Rods were in situ thermal initialized within a empty column($3.9{\times}150mm$) by free radical polymerization. The polymerization mixture was consisted of monomer, cross-linking monomer, porogenic solvent, initiator and control the ratio of these materials, column efficiency could be developed. Caffeine and tryptophan as separation substances and the retention mechanism of this kind of monolithic column was mainly hydrogen bond function.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.71-71
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• 2015

반도체 및 디스플레이 소자 제조를 위한 진공 플라즈마는 다양한 공정 조건하에서 다양한 공정 가스의 물리화학적 반응에 의한 박막의 형석 및 식각 반응을 유도한다. 실 공정 하에서 기체 성분의 환경 조건에 의하여 박막층 및 식각 구조 형성에 심각한 영향이 발생할 수 있으며, 공정 조건에서 기체 압력을 완벽하게 컨트롤 하는 것은 현실상 불가능하므로 기체 부분압력이 실시간으로 반드시 모니터링 되고 이를 피드백으로 하여 압력 변수가 조정되어야 완벽하게 공정을 제어할 수 있다. 이를 위하여 현장에서 플라즈마 공정을 실시간 in-situ 모니터링 할 수 있는 다양한 진단 방법이 도입되고 있으며 접촉신 진단 방법은 플라즈마와 섭동으로 인한 교란을 유발하고, 이온에너지 측정의 한계가 존재하며 비접촉식 방법 중의 하나인 유도형광법(LIF)은 측정 물질의 제한으로 인하여 플라즈마 내에 존재하는 다양한 가스 종의 거동을 살필 수 없는 등 현실 적용 측면에서 실 공정에 적용하는데 단점이 존재한다. 공정 상태 및 RF에 의한 영향을 주고받지 않고, 민감한 공정 변화의 감지 및 혼합가스를 사용하는 실시간 공정 진단을 위하여 비접촉 광학 측정 방식인 발광 분광 분석법(optical emission spectroscopy, OES)이 각광받고 있으며, 본 강습에서는 분광학의 기본 개념 및 OES를 이용한 진공 플라즈마 진단 방법에 관한 전반적인 개요를 설명하도록 한다

• Transactions of the Korean Society of Mechanical Engineers
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• v.13 no.4
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• pp.717-725
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• 1989

An experimental investigation on the combustion behavior of pulverized coal particles was performed using the cross-section micrography techniques while sample coal particles were collected in-situ from the flow reactor. The coal particles were representative of pulverized bituminous coal undergoing a raped pyrolysis and combustion, however, quenched at the time when the particles were deposited onto a sample plate. The internal structure of coal was observed to change as deposited. Upon injection into a flow reactor, bituminous coal particles showed many holes which represented internal pore formation during the pyrolysis. The relative portion of the remaining matrix of coal was decreasing as the residence time progressed. This direct observation of cross-section of burning particles enabled better understanding of the coal combustion behavior.

• Journal of the Korean Vacuum Society
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• v.9 no.2
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• pp.155-161
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• 2000

BN films composed of c-BN(70%) and h-BN(30%) phases have been synthesized by the ion beam assisted deposition (IBAD) process and stabilized by post-annealing. Boron was e-beam evaporated at 1.2 $\AA$/sec and nitrogen was ionized and accelerated at about 100 eV by the end-hall type ion gun. Substrates were negatively biased by DC 400 and 500 V, respectively, and heated at $700^{\circ}C$. Synthesized BN films were in-situ post-annealed at 700 or $800^{\circ}C$, respectively, for 1 hr without breaking vacuum. BN films without post-annealing were peeled off from substrates immediately when they were exposed to the air while those with post-annealing at $800^{\circ}C$ were stabilized. Post annealing reduced the film stress from 4.9 GPa to 3.4 GPa, but no considerable stress release in the c-BN phase was observed, contrary to previous reports that the stress relaxation in the c-BN phase is the main mechanism for the stabilization. Structural and chemical relaxation of non c-BN phase is supposed to be responsible for the film stress reduction and, in turn, stabilization, especially when the c-Bn content of the film is not high.

• Journal of the Korean GEO-environmental Society
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• v.12 no.12
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• pp.71-78
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• 2011

This paper aims to present the evaluation of engineering characteristics and reusing possibility of waste powders produced in dolomite and limestone nonmetal mining by physical and mechanical experiments on compaction, uniaxial compressive strength, permeability, chemical composition, and so on. Granite soil, 2 types of limestone waste powder, and 1 type of dolomite waste powder were used for main materials, and cement and bentonite were used for admixed materials in this experiments. The findings based on the experimental results are the severe difference of chemical composition of the dolomite & limestone waste powder and the crushed rock waste powder, and the outstanding of engineering characteristics of the dolomite waste powder with high content of MgO compared with the limestone waste powder. The engineering properties on compaction, uniaxial compressive strength, and permeability are enhanced with increase of admixed ratio of waste powder on granite soil. From the experimental results, it can be suggested that the dolomite waste powder admixed with in-situ granite soil is useful as geo-materials with considering of distribution costs.

• Clean Technology
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• v.23 no.3
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• pp.302-307
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• 2017

This study was conducted to evaluate the feasibility of in situ soil flushing for TPH-contaminated soil remediation with column test. The soil texture of the soil was sand and the initial TPH concentration was $9,369mg\; kg^{-1}$. 0.1% Tween-80 was selected as surfactant solution. And the acrylic and the glass syringe columns were used as reactors. In the acrylic column test, 35% of the initial TPH was removed in 1 PV of flushing and approximately 40% in 5 PV and finally 7 PV showed about 60%. The glass column test showed 3 ~ 12% higher removal efficiency than that of acrylic test until 5 PV of flushing. However, there was no difference in TPH removal efficiency when 7 PV of surfactant was finally flushed. Both of alum only and alum+polymer mixed surfactants showed also the best coagulation efficiency in $150mg\;L^{-1}$ of concentraion. When Tween 80 was newly dissolved in 0.1% to the recovered solution after the coagulation treatment, the removal efficiency was increased from 32.0% to 41.0% in comparison to the new 0.1% Tween 80 solution without reuse by coagulation treatment.

• Journal of Navigation and Port Research
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• v.38 no.3
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• pp.239-246
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• 2014

A study on the elution characteristics of biostimulating agents (sulfate and nitrate) from biostimulants which are used for in-situ bioremediation for the coastal sediment contaminated with organic matter was performed. The biostimulating agents were mixed with the coastal sediment, and then massed the mixture into ball. Two kinds of ball type biostimulant were prepared by coating the ball surface with two different polymers, cellulose acetate and polysulfone. A granular type biostimulant (GTB) was also prepared by impregnating a granular activated carbon in the biostimulating agent solution. The image of scanning electron microscopy for the biostimulant coated with cellulose acetate (CAB) showed that the inner side of the coating layer consisted of irregular and bigger size of pores, and the surface layer had tight structure like beehive. For the biostimulant coated with polyfulfone (PSB), the whole coating layer had a fine structure without pore. The elution rate of the biostimulating agents for the CAB was higher than that for the PSB, and the elution rate for the GTB was considerably higher than that for the PSB in distilled water as well as in sea water. The elution rate of the biostimulating agents in turbulent water flow was about 3 times higher than that in standing water, and the elution rate of nitrate was higher than that of sulfate from the stimulating agents.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.7 no.6
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• pp.1313-1318
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• 2006

The mechanism fur the surface film formation was studied by in situ Atomic Force Microscopy (AFM) observation of a highly oriented pyrolytic graphite (HOPG) basal plane surface during cyclic voltammetry at a slow scan-rate of 0.5 mV $s^{-1}$ in 1 moi $dm^{-3}$ (M) $LiPF_6$ dissolved in a mixture of ethylene carbonate (EC) and diethyl carbonate (DEC). Decomposition of the electrolyte solution began at a potential around 2.15 V vs. $Li^+$/Li on step edges. In the potential range 0.95-0.8 V vs. $Li^+$/Li, flat areas (hill-like structures) and large swelling appeared on the surface. It is considered that these two features were formed by the intercalation of solvated lithium ions and their decomposition beneath the surface, respectively. At potentials more negative than 0.80 V vs. $Li^+$/Li, particle-like precipitates appeared on the basal plane surface. After the first cycle, the thickness of the precipitate layer was 30 nm. The precipitates were considered to be decomposition of the lithium salt ($LiPF_6$) and solvent molecules (EC and DEC), and to have an important role in suppressing further solvent decomposition on the basal plane.