• Title/Summary/Keyword: In-Process Profile Measurement

Search Result 113, Processing Time 0.028 seconds

A Study on a Hartmann Test of Optical Mirror for On-Machine Measurement of Polishing machine (광학면 연마기의 OMM을 위한 Hartmann Test 방법 연구)

  • 김옥현;이응석;오창진;김용관
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.21 no.1
    • /
    • pp.40-45
    • /
    • 2004
  • Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

Development of Elimination Method of Measurement noise to Improve accuracy for White Light Interferometry (백색광 간섭계의 정밀도 향상을 위한 노이즈 제거 방법)

  • Ko, Kuk-Won;Cho, Soo-Yong;Kim, Min-Young
    • Journal of Institute of Control, Robotics and Systems
    • /
    • v.14 no.6
    • /
    • pp.519-522
    • /
    • 2008
  • As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

The inference and estimation for latent discrete outcomes with a small sample

  • Choi, Hyung;Chung, Hwan
    • Communications for Statistical Applications and Methods
    • /
    • v.23 no.2
    • /
    • pp.131-146
    • /
    • 2016
  • In research on behavioral studies, significant attention has been paid to the stage-sequential process for longitudinal data. Latent class profile analysis (LCPA) is an useful method to study sequential patterns of the behavioral development by the two-step identification process: identifying a small number of latent classes at each measurement occasion and two or more homogeneous subgroups in which individuals exhibit a similar sequence of latent class membership over time. Maximum likelihood (ML) estimates for LCPA are easily obtained by expectation-maximization (EM) algorithm, and Bayesian inference can be implemented via Markov chain Monte Carlo (MCMC). However, unusual properties in the likelihood of LCPA can cause difficulties in ML and Bayesian inference as well as estimation in small samples. This article describes and addresses erratic problems that involve conventional ML and Bayesian estimates for LCPA with small samples. We argue that these problems can be alleviated with a small amount of prior input. This study evaluates the performance of likelihood and MCMC-based estimates with the proposed prior in drawing inference over repeated sampling. Our simulation shows that estimates from the proposed methods perform better than those from the conventional ML and Bayesian method.

Development of the Railway Abrasion Measurement System using Camera Model and Perspective Transformation (카메라 모델과 투시 변환에 의한 레일 마모도 측정 시스템 개발)

  • Ahn, Sung-Hyuk;Kang, Dong-Eun;Moon, Hyoung-Deuk;Park, So-Yeon;Kim, Man-Cheol
    • Proceedings of the KSR Conference
    • /
    • 2008.11b
    • /
    • pp.1069-1077
    • /
    • 2008
  • The railway abrasion measurement system have to satisfy two conditions to increase the measurement accuracy as follows. The laser region which is projected on the rail have to be extracted without the geometrical distortion. The mapping of the acquired laser region data on the rail profile have to be processed exactly. But, the conventional railway abrasion measurement system is deeply effected by the foreign substance( dust, rainwater, and so on ) on the railway or the sensitive response characteristic of the laser to the external measurement circumstance, and then the measurement errors arise from above factors. When the laser region is projected on the rail extracts from the acquired image, the interference of the light with the same frequency as the laser system occurs the serious problems. In the process of the mapping between the railway profile and the extracted laser region, the measurement accuracy is very highly effected by the geometrical distortion and the abnormal variation. In this Paper, we propose the novel method to increase the accuracy of the railway abrasion measurement dramatically. we designed and manufactured the high precision and fast image processing board with DSP Core and FPGA to measure the railway abrasion. The image processing board has the capability that the image of 1024X1280 from camera can be processed with the speed of 480 frame/sec. And, we apply the image processing algorithm base on the wavelet to extract the laser region is projected on the rail exactly. Finally, we developed high precision railway abrasion measurement system with the error range less than +/-0.5mm by which 2D image data is covered 3D data and mapped on the rail profile using the camera model and the perspective transform.

  • PDF

Comparative Study on the Configuration Factors and Measurement Method of Yangsaeng Gigong and Psychological Skills Training (양생기공과 심리기술훈련의 구성요인과 측정평가방법의 비교 연구)

  • Jung, Mi-Young;Han, Chang-Hyun;Park, Soo-Jin;Lee, Sang-Nam;Kwon, Young-Kyu
    • Journal of Physiology & Pathology in Korean Medicine
    • /
    • v.22 no.5
    • /
    • pp.1047-1056
    • /
    • 2008
  • If we can evaluate the training results more appropriately and analyze the psychological changes in more objectively, the training can be more efficient and it can help to solve the problems during the training. This research analyzed the similarity and differences of Yangseng Qigong and psychological skill training's components and measurement methods. Also, the research further studied psychological skill training's measurement method. Results : The measurement type of Yangseng Qigong are Sagong, a record of Sagong, Damgong, IIgi, and Sogyeol. Similarly, the measurement type of psychological skills training are questionnaire, interview, personal profile, and observation of a single subject. Despite the similarities between the measurement type of Yangsaeng Qigong and psychological skills training, unfortunately there are differences in the contents. Thus, If we introduce strengths of each method to the other, we may have better measurement methods. The questionnaire method of psychological skills training is the most commonly used method, because it gives concrete, objective, reliable and highly reproducible results. If we refer to the questionnaire development process in psychological skills training, we can have objective and concrete measurement tool for Yangsaeng Qigong training. In the psychological skills training measurement tool development process, there are 5 stages; test conception, test preparation, test execution, question analysis, and test modification. Furthermore, the requirements for the good survey are reliability, validity, practicality, and cultural appropriateness. Through this study, we reached the conclusion that we need to combine two methods together to develop a better method because Yangsaeng Qigong places importance on comprehensive method and realization while psychological skills training places importance on analytical method and objective evaluation. And It seems that a practical study is needed to resolve the concerete problems of Yansaeng Qigong through these concrete cases.

A Study on 3-Dimensional Profilometry of Steam Generator Tube Using a New Eddy Current Probe

  • Kim, Young-Kyu;Song, Myung-Ho;Choi, Myung-Sik
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.30 no.3
    • /
    • pp.225-235
    • /
    • 2010
  • There are many types of the geometric transitions such as dent, bulge, protrusion, expansion, etc, on the inner and outer surfaces of heat exchanger tubes, steam generator tubes, and condenser tubes of nuclear power plants. Such geometric transition causes a local residual stress in heat exchanger tubes and acts as a structural factor accelerating the evolution of defects, in particular stress corrosion cracks. In the conventional eddy current test methods, the bobbin coil profilometry can provide 2-dimensional geometric information on the variation of the average inner diameter along the tube length, but the 3-dimensional distribution and the quantitative size of a local geometric transition existing in the tube cannot be measured. In this paper, a new eddy current probe, developed for the 3-dimensional profile measurement, is introduced and its superior performance is compared with that from the conventional bobbin coil profilometry for the various types of geometric transition. Also, the accuracy of the probe for the quantitative profile measurement is verified by comparing the results with that from the laser profilometry. It is expected that the new eddy current probe and techniques can be effectively used for an optimization of the tube expansion process, and the management of tubes with geometric transitions in service.

Field measurement study on snow accumulation process around a cube during snowdrift

  • Wenyong Ma;Sai Li;Xuanyi Zhou;Yuanchun Sun;Zihan Cui;Ziqi Tang
    • Wind and Structures
    • /
    • v.37 no.1
    • /
    • pp.25-38
    • /
    • 2023
  • Due to the complexity and difficulty in meeting the multiphase flow complexity, similarity, and multiscale characteristics, the mechanism of snow drift is so complicated that the snow deposition prediction is still inaccurate and needs to be far improved. Meanwhile, the validation of prediction methods is also limited due to a lack of field-measured data about snow deposition. To this end, a field measurement activity about snow deposition around a cube with time was carried out, and the snow accumulation process was measured under blowing snow conditions in northwest China. The maximum snow depth, snow profile, and variation in snow depth around the cube were discussed and analyzed. The measured results indicated three stages of snow accumulation around the cube. First, snow is deposited in windward, lateral and leeward regions, and then the snow depth in windward and lateral regions increases. Secondly, when the snow in the windward region reaches its maximum, the downwash flow erodes the snow against the front wall. Meanwhile, snow range and depth in lateral regions have a significant increase. Thirdly, a narrow road in the leeward region is formed with the increase in snow range and depth, which results in higher wind speed and reforming snow deposition there. The field measurement study in this paper not only furthers understanding of the snow accumulation process instead of final deposition under complex conditions but also provides an important benchmark for validating prediction methods.

미세금형 가공을 위한 전기화학식각공정의 유한요소 해석 및 실험 결과 비교

  • Ryu, Heon-Yeol;Im, Hyeon-Seung;Jo, Si-Hyeong;Hwang, Byeong-Jun;Lee, Seong-Ho;Park, Jin-Gu
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2012.05a
    • /
    • pp.81.2-81.2
    • /
    • 2012
  • To fabricate a metal mold for injection molding, hot-embossing and imprinting process, mechanical machining, electro discharge machining (EDM), electrochemical machining (ECM), laser process and wet etching ($FeCl_3$ process) have been widely used. However it is hard to get precise structure with these processes. Electrochemical etching has been also employed to fabricate a micro structure in metal mold. A through mask electrochemical micro machining (TMEMM) is one of the electrochemical etching processes which can obtain finely precise structure. In this process, many parameters such as current density, process time, temperature of electrolyte and distance between electrodes should be controlled. Therefore, it is difficult to predict the result because it has low reliability and reproducibility. To improve it, we investigated this process numerically and experimentally. To search the relation between processing parameters and the results, we used finite element simulation and the commercial finite element method (FEM) software ANSYS was used to analyze the electric field. In this study, it was supposed that the anodic dissolution process is predicted depending on the current density which is one of major parameters with finite element method. In experiment, we used stainless steel (SS304) substrate with various sized square and circular array patterns as an anode and copper (Cu) plate as a cathode. A mixture of $H_2SO_4$, $H_3PO_4$ and DIW was used as an electrolyte. After electrochemical etching process, we compared the results of experiment and simulation. As a result, we got the current distribution in the electrolyte and line profile of current density of the patterns from simulation. And etching profile and surface morphologies were characterized by 3D-profiler(${\mu}$-surf, Nanofocus, Germany) and FE-SEM(S-4800, Hitachi, Japan) measurement. From comparison of these data, it was confirmed that current distribution and line profile of the patterns from simulation are similar to surface morphology and etching profile of the sample from the process, respectively. Then we concluded that current density is more concentrated at the edge of pattern and the depth of etched area is proportional to current density.

  • PDF

Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles

  • Hwang, Joo-Ho;Park, Chun-Hong;Kim, Seung-Woo
    • International Journal of Precision Engineering and Manufacturing
    • /
    • v.8 no.2
    • /
    • pp.64-69
    • /
    • 2007
  • Aerostatic planar XY stages are frequently used as the main frames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper, a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within $1{\mu}m$ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.

Analysis of Tumble Decay Mechanism through LDV Measurement in an Engine (LDV측정을 통한 엔진내 텀블감쇄 메카니즘 해석)

  • 강건용;이진욱;백제현
    • Transactions of the Korean Society of Mechanical Engineers
    • /
    • v.18 no.10
    • /
    • pp.2773-2778
    • /
    • 1994
  • Tumbling motion is very effective for turbulence enhancement during compression process in the cylinder of 4-valve engines. In this paper the tumble decay mechanism for different intake port configuration were measured using laser Doppler velocimetry. Analysis of the tumble decay mechanism was achieved by means of two non-dimensional parameters, defined as tumble eccentricity and shape factor in tumble velocity profile, in addition to the tumble moment.