• Title/Summary/Keyword: In situ method

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In-Situ Optical Monitoring of Electrochemical Copper Deposition Process for Semiconductor Interconnection Technology

  • Hong, Sang-Jeen;Wang, Li;Seo, Dong-Sun;Yoon, Tae-Sik
    • Transactions on Electrical and Electronic Materials
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    • v.13 no.2
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    • pp.78-84
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    • 2012
  • An in-situ optical monitoring method for real-time process monitoring of electrochemical copper deposition (CED) is presented. Process variables to be controlled in achieving desired process results are numerous in the CED process, and the importance of the chemical bath conditions cannot be overemphasized for a successful process. Conventional monitoring of the chemical solution for CED relies on the pH value of the solution, electrical voltage level for the reduction of metal cations, and gravity measurement by immersing sensors into a plating bath. We propose a nonintrusive optical monitoring technique using three types of optical sensors such as chromatic sensors and UV/VIS spectroscopy sensors as potential candidates as a feasible optical monitoring method. By monitoring the color of the plating solution in the bath, we revealed that optically acquired information is strongly related to the thickness of the deposited copper on the wafers, and that the chromatic information is inversely proportional to the ratio of $Cu$ (111) and {$Cu$ (111)+$Cu$ (200)}, which can used to measure the quality of the chemical solution for electrochemical copper deposition in advanced interconnection technology.

Experimental study on the shear thinning effects of viscosity index improver added lubricant by in-situ optical viscometer

  • Jang, Siyonl
    • Korea-Australia Rheology Journal
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    • v.15 no.3
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    • pp.117-124
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    • 2003
  • Elastohydrodynamic lubrication (EHL) film is measured under the condition of viscosity index improver added to base oil. In-situ optical contact method using the interference principle make the measuring resolution of ~5 nm possible and enables the measuring range all over the contact area of up to ~300 $\mu\textrm{m}$ diameter. What is more important to the developed method by the author is that the measurement of EHL film thickness is possible in the range from 100 nm to 2 $\mu\textrm{m}$, which is the regime of worst contact failures in precision machinery. Viscosity index improver (VII) is one of the major additives to the modem multigrade lubricants for the viscosity stability against temperature rise. However, it causes shear thinning effects which make the film thickness lessened very delicately at high shear rate (over $10^5 s^{-1}$) of general EHL contact regime. In order to exactly verify the VIIs performance of viscosity stability at such high shear rate, it is necessary to make the measurement of EHL film thickness down to ~100 nm with fine resolution for the preliminary study of viscosity control. In this work, EHL film thickness of VII added lubricant is measured with the resolution of ~5 nm, which will give very informative design tool for the synthesis of lubricants regarding the matter of load carrying capacity at high shear rate condition.

A new culture system for in situ observation of the growth and development of Eucyclops serrulatus (Copepoda: Cyclopoida)

  • PARK Sung-Hee;CHANG Cheon-Young;SHIN Sung-Shik
    • Parasites, Hosts and Diseases
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    • v.43 no.4 s.136
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    • pp.141-147
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    • 2005
  • A practical and convenient method of rearing Eucyclops serrulatus in a microculture environment is described. A complete life cycle of E. serrulatus was maintained in a narrow space on a microscope slide glass on which a cover glass of $22{\times}40mm$ in size was mounted at a height of 0.8mm. The culture medium was constituted by bottled mineral water boiled with grains of Glycine max (soybean). Chilomonas paramecium, a free-living protozoan organism, was provided as live food. Growth of nauplii hatched from eggs to the first stage of copepodite took an average of 7.7 days, and the growth of copepodite 1 to the egg-bearing adult female took an average of 20.1 days in the microculture cell with an average life time of 44.7 days. Continuous passage of cope pods was successfully maintained as long as sufficient medium and food were provided. The microculture method enables an in situ microscopic observation on the growth and developmental process of helminth larvae experimentally infected to copepods as well as of copepod itself. Furthermore, it does not require anesthetization and, therefore, minimize the amount of stress exposed to cope pods during the handling process.

The growth of in-situ $MgB_2$ thin film by ESSD method (복합동시증착 방법을 이용한 In-situ $MgB_2$ 박막제조)

  • Song K.J.;Kim H.S.;Kim T.H.;Lee Y.S.;Ko R.K.;Ha H.S.;Ha D.W.;Oh S.S.;Moon S.H.;Park C.;Yoo S.I.
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.3
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    • pp.18-22
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    • 2006
  • We obtained in-situ $MgB_2$ thin films in an one-step process using ESSD (Evaporation Sputtering Simultaneous Deposition) method. In our approach. the Ma evaporator is designed specially Mg and B are simultaneously evaporated and sputtered, respectively, in the specially designed ESSD chamber. The background pressure was less than $1{\times}10^{-6}$ Torr. The substrate temperature was kept at 623 K. The film properties were investigated by both electrical resistivity and PPMS. As a result, typical $T_c$ of films was 11 K.

Evaluation of Traffic Load and Moisture-Induced Nonlinear In-Situ Stress on Pavement Foundation Layers (도로기초에서 교통 및 환경하중에 의한 비선형 현장 응력 거동 평가)

  • Park, Seong-Wan;Hwang, Kyu-Young;An, Dong-Seok;Jeong, Mun-Kyoung;Seo, Young-Guk
    • Proceedings of the Korean Geotechical Society Conference
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    • 2009.03a
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    • pp.11-16
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    • 2009
  • Better understanding of in-situ mechanical behavior of pavement foundations is very important to predict long-term effects on the system performance of transport infrastructure. In order to do that, resilient stiffness characterization of geomaterals is needed to properly adopt such mechanistic analysis under both traffic and environmental loadings. In this paper, in situ monitoring data from KHC test road was used to analyze the non-linearity of stress conditions under traffic and moisture loadings. Then, the predicted non-linear response using finite element method with a selected constitutive model of foundation geomaterials are verified with the field data.

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Reduction Effect of liquefaction by Vibro-Replacement Stone Columns (진동치환 스톤칼럼공법에 의한 액상화 저감 효과)

  • Lee, Song;Chae, Jum-Sik;Park, Sang-Kuk
    • Proceedings of the KSR Conference
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    • 2001.05a
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    • pp.443-450
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    • 2001
  • This paper shows the reduction effect of tile earthquake-induced liquefaction potential of soils that improved by Vibro-Replacement Stone Columns. The Vibro-Replacement Stone Columns method transforms soft cohesive soils into a composite mass of compacted granular or crushed stone columns by using vibrating equipment and water jets. This study investigated and analyzed the behavior of the stone columns and composite ground using the results of in situ test and measurement at the job-site. This paper shows the evaluation of the earthquake-induced liquefaction potential of soils using in situ test. There are different types of in situ test used in the evaluation the liquefaction potential. In the particular study the Standard penetration test, and Cone penetration test were used. The N value of Standard Penetration test has been used all over for a very long time. The evaluation of the liquefaction of soil was performed using the worldwide renewed Cone penetration test

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Fabrication and Characterization of Porous Nickel Membrane for High Precision Gas Filter by In-situ Reduction/Sintering Process (In-situ 환원/소결법을 이용한 다공성 니켈 멤브레인 가스필터의 제조 및 평가)

  • Kim, Nam-Hoon;Song, Han-Bok;Choi, Sung-Churl;Choa, Yong-Ho
    • Journal of Powder Materials
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    • v.16 no.4
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    • pp.262-267
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    • 2009
  • Disk type porous nickel membrane was fabricated by in-situ reduction/sintering process using compacted NiO/PMMA (PMMA; Polymethyl methacrylate) mixture at $800^{\circ}C$ in hydrogen atmosphere. The porosity (49$\sim$58%) of these membrane was investigated as an amount of PMMA additive. The thermal decomposition and reduction behavior of NiO/PMMA were analyzed by TG/DTA in hydrogen atmosphere and the activation energy for the hydrogen reduction of NiO and thermal degradation of PMMA was calculated as 61.1 kJ/mol, evaluated by Kissinger method. Finally, the filtering performance and pressure drop were measured by particle counting system.

Carbonation depth prediction of concrete bridges based on long short-term memory

  • Youn Sang Cho;Man Sung Kang;Hyun Jun Jung;Yun-Kyu An
    • Smart Structures and Systems
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    • v.33 no.5
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    • pp.325-332
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    • 2024
  • This study proposes a novel long short-term memory (LSTM)-based approach for predicting carbonation depth, with the aim of enhancing the durability evaluation of concrete structures. Conventional carbonation depth prediction relies on statistical methodologies using carbonation influencing factors and in-situ carbonation depth data. However, applying in-situ data for predictive modeling faces challenges due to the lack of time-series data. To address this limitation, an LSTM-based carbonation depth prediction technique is proposed. First, training data are generated through random sampling from the distribution of carbonation velocity coefficients, which are calculated from in-situ carbonation depth data. Subsequently, a Bayesian theorem is applied to tailor the training data for each target bridge, which are depending on surrounding environmental conditions. Ultimately, the LSTM model predicts the time-dependent carbonation depth data for the target bridge. To examine the feasibility of this technique, a carbonation depth dataset from 3,960 in-situ bridges was used for training, and untrained time-series data from the Miho River bridge in the Republic of Korea were used for experimental validation. The results of the experimental validation demonstrate a significant reduction in prediction error from 8.19% to 1.75% compared with the conventional statistical method. Furthermore, the LSTM prediction result can be enhanced by sequentially updating the LSTM model using actual time-series measurement data.

The Investigation of the In-Situ state to Determine the paved Track Structure (포장궤도 구조결정을 위한 현장상태 조사)

  • Lee Il-Wha;Hwang Seon-Keun;Park Tae-Soon;Lee Bo-Hyoung;Ko Hak-Song
    • Proceedings of the KSR Conference
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    • 2004.06a
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    • pp.974-979
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    • 2004
  • Recently, the development of paved track is required as a Low-maintenance of conventional line. The most important factor of paved track is stability and applicability. In this method, the ballast is grouted with mortar so that the ballast can turn into a structure like slab. This method can be subdivided into the followings. One is the method with switching the ballast, and the other is without switching the ballast. The ordinary and actual states of the ballast and roadbed were investigated to evaluate the applicability of the paved track structure in this study, and various In-situ tests were applied. Non-destructive tests such as GPR, SASW, FWD were used, and bearing capacity of roadbed, depth of the ballast, and deterioration, penetration, and contamination of the ballast were focused. The result of this investigation was utilized in the selection of optimal paved track structure and data for preliminary design.

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Development of an Efficiency Calibration Model Optimization Method for Improving In-Situ Gamma-Ray Measurement for Non-Standard NORM Residues (비정형 공정부산물 In-Situ 감마선 측정 정확도 향상을 위한 효율교정 모델 최적화 방법 개발)

  • WooCheol Choi;Tae-Hoon Jeon;Jung-Ho Song;KwangPyo Kim
    • Journal of Radiation Industry
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    • v.17 no.4
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    • pp.471-479
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    • 2023
  • In In-situ radioactivity measurement techniques, efficiency calibration models use predefined models to simulate a sample's geometry and radioactivity distribution. However, simplified efficiency calibration models lead to uncertainties in the efficiency curves, which in turn affect the radioactivity concentration results. This study aims to develop an efficiency calibration optimization methodology to improve the accuracy of in-situ gamma radiation measurements for byproducts from industrial facilities. To accomplish the objective, a drive mechanism for rotational measurement of an byproduct simulator and a sample was constructed. Using ISOCS, an efficiency calibration model of the designed object was generated. Then, the sensitivity analysis of the efficiency calibration model was performed, and the efficiency curve of the efficiency calibration model was optimized using the sensitivity analysis results. Finally, the radiation concentration of the simulated subject was estimated, compared, and evaluated with the designed certification value. For the sensitivity assessment of the influencing factors of the efficiency calibration model, the ISOCS Uncertainty Estimator was used for the horizontal and vertical size and density of the measured object. The standard deviation of the measurement efficiency as a function of the longitudinal size and density of the efficiency calibration model decreased with increasing energy region. When using the optimized efficiency calibration model, the measurement efficiency using IUE was improved compared to the measurement efficiency using ISOCS at the energy of 228Ac (911 keV) for the nuclide under analysis. Using the ISOCS efficiency calibration method, the difference between the measured radiation concentration and the design value for each simulated subject measurement direction was 4.1% (1% to 10%) on average. The difference between the estimated radioactivity concentration and the design value was 3.6% (1~8%) on average when using the ISOCS IUE efficiency calibration method, which was closer to the design value than the efficiency calibration method using ISOCS. In other words, the estimated radioactivity concentration using the optimized efficiency curve was similar to the designed radioactivity concentration. The results of this study can be utilized as the main basis for the development of regulatory technologies for the treatment and disposal of waste generated during the operation, maintenance, and facility replacement of domestic byproduct generation facilities.