• 한국재료학회지
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• 제24권10호
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• pp.532-537
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• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• 한국표면공학회지
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• 제43권6호
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• pp.272-277
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• 2010

We investigated the life time characteristics of OLED device with aluminium oxide ($AlO_x$) passivation film on glass substrate and polyethylene terephthalate (PET) substrate by RF magnetron sputtering for the transparent barrier film applied to flexible OLED device. Basic buffer layer was determined as $Alq_3$(500 nm)-LiF(300 nm)-Al(1200 nm), and the most suitable aluminium oxide ($AlO_x$) film have been formed when the partial volume ratio of oxygen was 20% and the sputtering power was 100 watt and the minimum thickness of buffer was $2\;{\mu}m$. $AlO_x$/epoxy hybrid film was also used as a effective passivation layer for the purpose of improving life time characteristics of OLED devices with the glass substrate and the plastic substrate. Besides, the simultaneous deposition of $AlO_x$/epoxy film on back side of PET could result in better improvement of life time.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2011년도 춘계학술대회 및 Fine pattern PCB 표면 처리 기술 워크샵
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• pp.196-197
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• 2011

Rudder, one of the most important component in the marine vessel, is now being decreased life time to serve due to cavitation erosion, vortex current, high flow speed suffer from ship speed going up dramatically. In this study, 10 kinds of thermal spray coating materials(2 of Zn alloy series, 3 of Al alloy series, 3 of Cu alloy series, 2 of STS alloy series) are chosen to apply on specimens and analyze micro structure, metallic composition, properties(porosity, oxidation) by using visual observation, XRD, EDX etc.. Additionally, to refine the characteristic of corrosion endurance for thermal spray coating layer, compared with thermal spray process and 5 kinds of heavy duty painting and AC paint (Anti-Corrosion Paint). Based on above mentioned experimental results, a priority of all coated specimens on corrosion-erosion endurances finalized and summarized there by desirable composition and process of thermal sprayed material properly.

• 한국표면공학회지
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• 제30권2호
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• pp.93-103
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• 1997

High temperature materials used in the elevated temperature and corrosive atmosphere must have the good oxidation resistance and preserve their own mechanical properties simultaneously. For the oxidation resistance, it is very important to form a protective oxide scale such as $Al_2O_3$ or $Cr_2O_3$ on the substrate. However, the additions of protective oxide forming elements such as Cr and Al in the alloy to enhance its oxidation resistance are limited due to the deleterious effects on their mechanical properties. PECVD(P1asma Enhanced Chemical Vapor Deposition) coating processes were employed to improve the oxidation resistance at high temperature. Cr and/or A1 were coated on the substrates of Ni and Inconel 600 at various temperatures of 400, 500, $600^{\circ}C$ and at different conditions of specimen surfaces. Then, coated specimens were exposed to isothermal and cyclic oxidation conditions in air at 1000 and $1100^{\circ}C$. In order to enhance the adhesion between the substrate and coated layer, heat treatments of the coated specimens were conducted in a vacuum. At isothermal oxidation experiments, Al-coated Ni specimen showed better oxidation resistance than pure Ni. At cyclic oxidation experiments at $1000^{\circ}C$. Cr and Al-coated specimen showed better oxidation resistance. Cr-coated Inconel 600 had also showed better oxidation resistance due to Cr in the substrate. By PECVD coating process, oxidation resistance could be improved, but it was not improved as expected due to the weakness of the adhesion between the substrate and the coated layer.

• 소음진동
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• 제6권5호
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• pp.661-669
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• 1996

Proposed is an aero-acoustic performance prediction method of axial fan. The fan aerodynamic performance is predicted by combining pitch-averaged quasi 3-D flow analysis with pressure loss models for blade boundary layer and wake, secondary flow, endwall boundary layer and tip leakage flows. Fan noise is assumed to be radiated as dipole distribution type, and its generation is assumed to be mainly due to the vortex street shed from blade trailing edge. The fluctuating pressure and lift on the blade surface are analyzed by incorporating the wake vortex stree shed from blade trailing edge. The fluctuating pressure and lift on the blade surface are analyzed by incorporating the wake vortex street model with thin airfoil theory. The aero-acoustic performance prediction results by the present method are in good agreement with the measured results of several axial fans. With the present prediction method, parametric studies are carried out to investigate the effects of blade chord length and spacing on the efficiency and the noise level of fan. In the case of lightly loaded fan, both efficiency improvement and noise reduction can be achieved by decreasing chord length or by increasing blade specing. However, when fan is designed at highly loaded condition, the noise reduction by increasing blade spacing penalizes the attaninable efficiency of fan.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.87-95
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• 2023

TiO₂ thin films were grown using the Atomic Layer Deposition (ALD) and their structural and electrical properties were investigated. The crystal structure, dielectric constant, and surface roughness of the TiO₂ thin films grown by the ALD deposition method were studied. The grown TiO₂ thin films showed an anatase crystal structure, and their properties varied with temperature. In particular, the properties of the TiO₂ thin films were confirmed by changing the process temperature. The electrical properties of Metal-Insulator-Silicon (MIS) capacitor structures were analyzed using a probe station. The performance improvement of capacitors using TiO₂ as a dielectric was confirmed by measuring capacitance through Capacitance-Voltage (C-V) curves.

• 한국전기전자재료학회논문지
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• 제23권11호
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• pp.837-842
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• 2010

This paper describes the crystallinity, growth rate, and surface morphology of single crystalline 3C-SiC (cubic silicon carbide) thin films grown with several carbonization conditions such as temperature, $C_3H_8$ flow rate, time. In case of carbonization, an increase in the carbonization temperature caused a increase in the size and numbers of unsealed void (big black spot) which decrease the crystallinity. In addition, optimal $C_3H_8$ flow rate made carbonization layer form well and prevented the formation of voids. Also, after a period of time, the growth of carbonization layer did not increase no more. The single crystalline 3C-SiC thin films on optimal carbonized Si substrate showed an improvement on the crystallinity, the growth rate, the roughness, and the carrier concentration.

• 한국해양공학회지
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• 제11권4호
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• pp.49-60
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• 1997

This paper deals with the effect of coating layer on the fatigue strength of TiN coated 1Cr-1Mo-0.25V steel prepared by using the arc ion plating (AIP) process, in which it was characterized by the presence of extractor grid (ion filter). The rotary bending fatigue tests were carried out under room air conditions, and the fatigue crack initiation and growth bwhavior were observed by using plastic replica method. As experimental results, it was found that the obvious improvement of fatigue life at lower stress region was confirmed in TiN coated specimen processed with ion filter. It was also exlained that the increase of fatigue life in the case of an improved AIP process with ion filter was attributed to the retardation of crack initiation of the substrate surface due to hard coating layer, more densly formed with the reduced size and density of droplets.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.533-535
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• 2004

We suggest the use of a self-assembled ultra thin organic film that can suppress the hydration of MgO protective layer in AC-PDP. We analyzed the degree of hydration of MgO layer in AC-PDP by XPS when exposed to air after vacuum deposition which proved the effectiveness of the hydration prevention. We also made PDP test panels to demonstrate the improvement in the luminance and luminous efficiency when the hydration of MgO surface is suppressed by the use of self-assembled ultra thin organic film.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.322-323
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• 2005

We deposited Zinc oxide (ZnO) thin films on Ru buffer layer in order to protect the amorphous layer between ZnO and Al interface. In X-ray diffraction (XRD) pattern, it was observed that increase of (002)-orientation by the variation of annealing treatment temperature. Also, surface roughness and specific resistance were increased by annealing treatment but full width at half maximum (FWHM) was decreased. In film bulk acoustic resonators (FBARs) fabricated from these results, we finally confirmed that the resonant frequency of 0.89 GHz without its shift was measured.