Sensitivity improvement of $CeO_2$ oxygen sensor by betterment of surface characteristics through chemical mechanical polishing process
(CMP 공정을 통한 표면 특성 개선에 의한 $CeO_2$ 산소 센서 감도 향상 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.65-65
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- 2007