• Progress in Superconductivity
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• 제10권2호
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• pp.99-102
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• 2009

We report our development of the fabrication process of sub-micron scale $Al-AlO_x-Al$ tunnel junction by using electron-beam lithography and double-angle shadow evaporation technique. We used double-layer resist to construct a suspended bridge structure, and double-angle electron-beam evaporation to form a sub-micron scale overlapped junction. We adopted an e-beam insensitive resist as a bottom sacrificing layer. Tunnel barrier was formed by oxidation of the bottom aluminum layer between the bottom and top electrode deposition, which was done in a separate load-lock chamber. The junction resistance is designed and controlled to be 50 $\Omega$ to match the impedance of the transmission line. The junctions will be used in the broadband shot noise thermometry experiment, which will serve as a link between the electrical unit and the thermodynamic unit.

• Transactions on Control, Automation and Systems Engineering
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• 제4권1호
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• pp.49-55
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• 2002

A decrease in the birthrate and aging are progressing in Japan and several countries. In that society, it is important that physically weak persons such as elderly persons are able to take care of themselves. We have been developing exoskeletal robots for human (especially for physically weak persons) motion support. In this study, the controller controls the angular position and impedance of the exoskeltal robot system using multiple fuzzy-neuro controllers based on biological signals that reflect the human subject's intention. Skin surface electromyogram (EMG) signals and the generated wrist force by the human subject during the elbow motion have been used as input information of the controller. Since the activation level of working muscles tends to vary in accordance with the flexion angle of elbow, multiple fuzzy-neuro controllers are applied in the proposed method. The multiple fuzzy-neuro controllers are moderately switched in accordance with the elbow flexion angle. Because of the adaptation ability of the fuzzy-neuro controllers, the exoskeletal robot is flexible enough to deal with biological signal such as EMG. The experimental results show the effectiveness of the proposed controller.

• 전기학회논문지
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• 제57권6호
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• pp.938-943
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• 2008

Coupling capacitor voltage transformers(CCVTs) have been used in extra or ultra high voltage systems to obtain the standard low voltage signal for protection and measurement. For fast suppression of the phenomenon of ferroresonance, three winding CCVTs are used instead of two winding CCVTs. A tuning reactor is connected between a capacitor voltage divider and a voltage transformer to reduce the phase angle difference between the primary and secondary voltages in the steady state. Slight distortion of the secondary voltage is generated when no fault occurs. However, when a fault occurs, the secondary voltage of the CCVT has significant errors due to the transient components such as dc offset component and/or high frequency components resulting from the fault. This paper proposes an algorithm for compensating the secondary voltage of a three winding CCVT in the time domain. With the values of the measured secondary voltage of the three winding CCVT, the secondary, tertiary and primary currents and voltages are estimated; then the voltages across the capacitor and the tuning reactor are calculated and then added to the measured voltage. Test results indicate that the algorithm can successfully compensate the distorted secondary voltage of the three winding CCVT irrespective of the fault distance, the fault impedance and the fault inception angle as well as in the steady state.

• 대한전기학회논문지:전력기술부문A
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• 제54권7호
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• pp.345-351
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• 2005

An out-of-step condition results from the loss of the synchronism of the generators. A disturbance in a power system causes the generator angle to oscillate. When there is a severe disturbance such as a heavy current fault loss of major generation or loss of a large block of load, the oscillation can be severe and even increase largely and finally the out-of-step condition may un. During the power swing and out-of-step conditions, the apparent impedance at a relay location changes, and the power flow also changes as the angle difference is varied. This paper presents a method to analyze the trajectory of complex power during a power swing and out-of-step condition. The trajectory of the complex power is analyzed when a power swings and a fault occurs. Moreover, the complex power is analyzed when the ratios between the voltages at both sides and the line impedances are changed. These methods are verified through simulation using the ATP/EMTP MODELS.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 A
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• pp.310-312
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• 2005

An out-of-step condition results from the loss of the synchronism of the generators. A disturbance in a power system causes the generator angle to oscillate. When there is a severe disturbance such as a heavy current fault loss of major generation or loss of a large block of load the oscillation can be severe and even increase largely and finally the out-of-step condition may occur During the power swing and out-of-step conditions, the a apparent impedance at a relay location changes, and the power flow also changes as the angle difference is varied. This paper presents a method to analyze the trajectory of complex power during a power swing and out-of-step condition. The trajectory of the complex power is analyzed when a power swings and a fault occurs. Moreover, the complex power is analyzed when the ratios between the voltages at both sides and the line impedances are changed. These methods are verified through simulation using the ATP/EMTP MODELS.

• 비파괴검사학회지
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• 제25권1호
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• pp.9-14
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• 2005

표면 거칠기가 다른 유리시편에 대해 후방 복사된 초음파 세기의 입사각 의존성(프로파일)이 측정되었다. 후방복사 세기와 레일리(Rayleigh) 표면파 속도는 표면 거칠기에 비례하였고 이 경향은 각기 초음파의 산란규칙과 경화현상으로 설명되었다. 후방복사 프로파일의 면적 역시 표면 거칠기에 민감함을 보여 표면상태에 대한 새로운 비파괴적 평가 변수의 가능성을 보였다. 레일리 각 C-스캔 기법은 화상 명도의 반전과 높은 신호대 잡음비(S/N)를 보여주었다.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.61-66
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• 2012

반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 화학적-기계적 연마(CMP: Chemical-Mechanical Planarization) 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 화학적-기계적 연마 공정의 중요성은 더욱 강조되고 있다. 화학적-기계적 연마공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 화학적-기계적 연마 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리(Slurry), 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. 패드 컨디셔닝이란 컨디셔너가 화학적-기계적 연마 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 화학적-기계적 연마 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 스크래치(Scratch) 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 유기박막을 표면에 증착하여 부식을 방지하고자 하였다. 컨디셔너 제작에 사용되는 금속인 니켈과 니켈 합금을 기판으로 하고, 증착된 유기박막으로는 자기조립단분자막(SAM: Self-Assembled Monolayer)과 불화탄소(FC: FluoroCarbon) 박막을 증착하였다. 자기조립단분자막은 2가지 전구체(Perfluoroctyltrichloro silane(FOTS), Dodecanethiol(DT))를 사용하여 기상 자기조립 단분자막 증착(Vapor SAM) 방법으로 증착하였고, 불화탄소막은 10 nm, 50 nm, 100 nm 두께로 PE-CVD(Plasma Enhanced-Chemical Vapor Deposition, SRN-504, Sorona, Korea) 방법으로 증착하여 표면의 부식특성을 평가하였다. 표면 부식 특성은 동전위분극법(Potentiodynamic Polarization)과 전기화학적 임피던스 측정법(Electrochemical Impedance Spectroscopy(EIS)) 등의 전기화학 분석법을 사용하여 평가되었다. 또한 측정된 임피던스 데이터를 전기적 등가회로(Electrical Equivalent Circuit) 모델에 적용하여 부식 방지 효율을 계산하였다. 동전위분극법과 EIS의 결과 분석으로부터 유기박막이 증착된 표면의 부식전류밀도가 감소하고, 임피던스가 증가하는 것을 확인하였다.

• 한국전자파학회논문지
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• 제14권7호
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• pp.769-776
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• 2003

본 논문은 경계적분법과 세그멘테이션 기법을 이용하여 광대역 주파수 및 광 조향각 범위에서 빔조향이 가능한 마이크로스트립 로트만 렌즈의 해석 및 설계를 제안하고 있다. 렌즈 각 포트간의 모든 상호결합과 다중반사 및 선로간 불연속 특성이 해석에 포함되었다. 등간격 포트 설계를 통해 광조향각 범위에서 배열포트의 출력 리플을 억제하는 구조를 구현하였다. 12 입력 12 출력의 각 포트에 지수함수 테이퍼를 적용하여 임피던스 정합 및 포트간 상호결합을 해석하고 최적화하였다. 제작된 렌즈는 측정결과 6~18 GHz의 광대역 주파수 범위와 $\pm$53$^{\circ}$의 조향각 범위에 대해 $\pm$1.8 dB 이하의 삽입손실 편차와 1$^{\circ}$이하의 조향 정확도를 가지며, 해석결과 와도 잘 일치함을 확인하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3021-3026
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• 2007

In this paper, experimental data on flow pattern transition of inclination angles from 0-90 are presented. A test section is constructed 2 mm long and I.D 1inch using transparent material. The test section is supported by aluminum frame that can be placed with any arbitrary inclined angles. The air-water two-phase flow is observed at room temperature and atmospheric condition using both high speed camera and void impedance meter. The signal is sampled with sampling rate 1kHz and is analyzed under fully-developed condition. Based on experimental data, flow pattern maps are made for various inclination angles. As increasing the inclination angels from 0 to 90, the flow pattern transitions on the plane jg-jf are changed, such as stratified flow to plug flow or slug flow or plug flow to bubbly flow. The transition lines between pattern regimes are moved or sometimes disappeared due to its inclined angle.

• Journal of Advanced Marine Engineering and Technology
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• 제35권7호
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• pp.966-973
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• 2011

Power distribution onboard vessel is typically configured as ungrounded system due to the ability to continuously supply electric power even when an earth fault occurs. The impedance connections between 3 phase power lines and hull cause the line-to-hull voltages to become unstable and increased in case the impedances are unbalanced, bringing the situation susceptible to electric shock and deterioration of insulation material. Also the line-to-hull voltage can reach to a certain maximum value in the steady state depending on the distributed capacitances and grounding resistances between lines and hull. This study suggests how to find and calculate the maximum line-to-hull voltage in view of magnitude and phase angle based on the vector diagram.