• Progress in Superconductivity
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• v.10 no.2
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• pp.99-102
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• 2009

We report our development of the fabrication process of sub-micron scale $Al-AlO_x-Al$ tunnel junction by using electron-beam lithography and double-angle shadow evaporation technique. We used double-layer resist to construct a suspended bridge structure, and double-angle electron-beam evaporation to form a sub-micron scale overlapped junction. We adopted an e-beam insensitive resist as a bottom sacrificing layer. Tunnel barrier was formed by oxidation of the bottom aluminum layer between the bottom and top electrode deposition, which was done in a separate load-lock chamber. The junction resistance is designed and controlled to be 50 $\Omega$ to match the impedance of the transmission line. The junctions will be used in the broadband shot noise thermometry experiment, which will serve as a link between the electrical unit and the thermodynamic unit.

• Transactions on Control, Automation and Systems Engineering
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• v.4 no.1
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• pp.49-55
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• 2002

A decrease in the birthrate and aging are progressing in Japan and several countries. In that society, it is important that physically weak persons such as elderly persons are able to take care of themselves. We have been developing exoskeletal robots for human (especially for physically weak persons) motion support. In this study, the controller controls the angular position and impedance of the exoskeltal robot system using multiple fuzzy-neuro controllers based on biological signals that reflect the human subject's intention. Skin surface electromyogram (EMG) signals and the generated wrist force by the human subject during the elbow motion have been used as input information of the controller. Since the activation level of working muscles tends to vary in accordance with the flexion angle of elbow, multiple fuzzy-neuro controllers are applied in the proposed method. The multiple fuzzy-neuro controllers are moderately switched in accordance with the elbow flexion angle. Because of the adaptation ability of the fuzzy-neuro controllers, the exoskeletal robot is flexible enough to deal with biological signal such as EMG. The experimental results show the effectiveness of the proposed controller.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.6
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• pp.938-943
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• 2008

Coupling capacitor voltage transformers(CCVTs) have been used in extra or ultra high voltage systems to obtain the standard low voltage signal for protection and measurement. For fast suppression of the phenomenon of ferroresonance, three winding CCVTs are used instead of two winding CCVTs. A tuning reactor is connected between a capacitor voltage divider and a voltage transformer to reduce the phase angle difference between the primary and secondary voltages in the steady state. Slight distortion of the secondary voltage is generated when no fault occurs. However, when a fault occurs, the secondary voltage of the CCVT has significant errors due to the transient components such as dc offset component and/or high frequency components resulting from the fault. This paper proposes an algorithm for compensating the secondary voltage of a three winding CCVT in the time domain. With the values of the measured secondary voltage of the three winding CCVT, the secondary, tertiary and primary currents and voltages are estimated; then the voltages across the capacitor and the tuning reactor are calculated and then added to the measured voltage. Test results indicate that the algorithm can successfully compensate the distorted secondary voltage of the three winding CCVT irrespective of the fault distance, the fault impedance and the fault inception angle as well as in the steady state.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.54 no.7
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• pp.345-351
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• 2005

An out-of-step condition results from the loss of the synchronism of the generators. A disturbance in a power system causes the generator angle to oscillate. When there is a severe disturbance such as a heavy current fault loss of major generation or loss of a large block of load, the oscillation can be severe and even increase largely and finally the out-of-step condition may un. During the power swing and out-of-step conditions, the apparent impedance at a relay location changes, and the power flow also changes as the angle difference is varied. This paper presents a method to analyze the trajectory of complex power during a power swing and out-of-step condition. The trajectory of the complex power is analyzed when a power swings and a fault occurs. Moreover, the complex power is analyzed when the ratios between the voltages at both sides and the line impedances are changed. These methods are verified through simulation using the ATP/EMTP MODELS.

• Proceedings of the KIEE Conference
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• 2005.07a
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• pp.310-312
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• 2005

An out-of-step condition results from the loss of the synchronism of the generators. A disturbance in a power system causes the generator angle to oscillate. When there is a severe disturbance such as a heavy current fault loss of major generation or loss of a large block of load the oscillation can be severe and even increase largely and finally the out-of-step condition may occur During the power swing and out-of-step conditions, the a apparent impedance at a relay location changes, and the power flow also changes as the angle difference is varied. This paper presents a method to analyze the trajectory of complex power during a power swing and out-of-step condition. The trajectory of the complex power is analyzed when a power swings and a fault occurs. Moreover, the complex power is analyzed when the ratios between the voltages at both sides and the line impedances are changed. These methods are verified through simulation using the ATP/EMTP MODELS.

• Journal of the Korean Society for Nondestructive Testing
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• v.25 no.1
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• pp.9-14
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• 2005

The angular dependence(profile) of backward radiated ultrasound was measured for glass specimens with random surface roughness using ultrasonic goniometer that ran changes the incident angle continuously. It was concluded that the roughened region had greater acoustic impedance than the unperturbed region. The comparison of backward radiations showed that the amplitude of peak and the area of radiation profile were increased with surface roughness. It was suggested from the sensitive dependence of the profile area that the profile of backward radiation could be applied to in the nondestructive evaluation of sulfate region. Inclined C-scan technique with the transducer inclined at Rayleigh angle showed the reverse of luminosity and the high signal to noise ratio so that it provided high resolution.

• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.7
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• pp.769-776
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• 2003

This paper presents analysis and design of microstrip Rotman lens operating over wide band and wide steering angle by the contour integral method along with the segmentation method. All mutual coupling, internal reflections between ports and the discontinuity at every junction are taken into account. Equally spaced ports are designed and realized, which make suppress output ripple through the array ports. Impedance matching and mutual coupling between ports are analyzed and optimized using 12 input and 12 output exponential tapers. The measured results of fabricated lens show ${\pm}$ 1.8 dB insertion loss deviation over 6∼18 GHz wide frequency range and beam steering accuracy less than 1$^{\circ}$over ${\pm}$53$^{\circ}$angle and agrees well with the analysis results.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3021-3026
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• 2007

In this paper, experimental data on flow pattern transition of inclination angles from 0-90 are presented. A test section is constructed 2 mm long and I.D 1inch using transparent material. The test section is supported by aluminum frame that can be placed with any arbitrary inclined angles. The air-water two-phase flow is observed at room temperature and atmospheric condition using both high speed camera and void impedance meter. The signal is sampled with sampling rate 1kHz and is analyzed under fully-developed condition. Based on experimental data, flow pattern maps are made for various inclination angles. As increasing the inclination angels from 0 to 90, the flow pattern transitions on the plane jg-jf are changed, such as stratified flow to plug flow or slug flow or plug flow to bubbly flow. The transition lines between pattern regimes are moved or sometimes disappeared due to its inclined angle.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.7
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• pp.966-973
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• 2011

Power distribution onboard vessel is typically configured as ungrounded system due to the ability to continuously supply electric power even when an earth fault occurs. The impedance connections between 3 phase power lines and hull cause the line-to-hull voltages to become unstable and increased in case the impedances are unbalanced, bringing the situation susceptible to electric shock and deterioration of insulation material. Also the line-to-hull voltage can reach to a certain maximum value in the steady state depending on the distributed capacitances and grounding resistances between lines and hull. This study suggests how to find and calculate the maximum line-to-hull voltage in view of magnitude and phase angle based on the vector diagram.