• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.43-48
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• 2020

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.

• The Transactions of the Korean Institute of Power Electronics
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• v.23 no.5
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• pp.321-327
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• 2018

DC microgrid system composed of multiple converters has a tendency to make the system unstable due to the interaction of converters. To solve this problem, in this paper, the interaction between cascaded converters with LC input filter is analyzed with impedance modeling using g-parameter. The input impedance and the output impedance of the system can be obtained through this technique. The stability of the system can be determined by applying Middlebrook's stability criterion to the impedance. Virtual impedance is added to the controller to enhance stability. The validity of the analysis is verified by the result of several simulations and experiments.

• Journal of the Korea Society for Simulation
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• v.14 no.2
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• pp.45-55
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• 2005

There are electric double layer capacitance, polarization resistance and solution resistance in the interface between electrode and solution. Electrode process could be evaluated by the electrical impedance analysis. The necessities of the electrochemical cell analysis with high speed impedance analyzer are followings: minimization of the effects of electric stimulation on electrochemical cell and the concentration of reactive materials, and optimization of impedance signal resolution. This paper represents the design criteria for the selection and stimulation to develop fast impedance analyzer prototype for a electrochemical cell. It was suggested that the design of 470k sample/s sampling rate, 13 bit ABC resolution, and 140ms recording time is required for high speed impedance analysis system in frequency range between dc and 10kHz.

• Proceedings of the KIEE Conference
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• 2003.07a
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• pp.205-207
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• 2003

The line impedance is important data that is applied in all analysis fields of electric power system like power flow, fault current, stability and relay calculation etc. Usually, impedance can be accurately calculated in case of overhead line. However, in case of power cables or combined transmission lines, impedance can not be accurately calculated because cable systems have the sheath, grounding wires, and earth resistance. Therefore, if there is a fault in cable system, these terms will severely be caused much error to calculation of impedance. Therefore, the line impedance were measured for this study in an actual power system of underground cables, and were analyzed by a generalized circuit analysis program EMTP for comparison with the measured value. These analysis result is considered to become foundation of impedance calculation for underground cable.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.50 no.9
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• pp.423-429
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• 2001

This paper proposes adaptive impedance control algorithm using fuzzy inference when robot contacts with its environments. The characteristics of the adaptive impedance controller is to adapt with parametric uncertainty and nonlinear conditions. The control algorithm is to join impedance controller with fuzzy inference engine. The proposed control method overcomes the problem of impedance controller using gain-tuning algorithm of fuzzy inference engine. We implemented an experimental set-up consisting of environment-generated one-link robot system and DSP system for controller development. We apply the adaptive fuzzy impedance controller to one-link root system, and it shows the good performance on regulating the interactive force in case of contacting with arbitrary environment.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.612-613
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• 2007

The line impedance is important data that are applied in all analysis fields of electric power system such as power flow, fault current, stability and relay calculation etc. Usually, the impedance can be accurately calculated in case of overhead line. However, in case of power cables or combined transmission lines, the impedance can not be accurately calculated because cable systems have the sheath, grounding wires, and earth resistances. Therefore, if there is a fault in cable system, these terms will severely be caused many errors for calculating impedance. In this paper, the line impedance is measured in a power system of underground cables, and is analyzed by a generalized circuit analysis program, EMTP(Electromagnetic Transient Program), for comparison with the measured value. These analysis results are considered to become foundation of impedance calculation for underground cables.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.05a
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• pp.88-91
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• 2009

For lightning currents, a grounding system shows the transient grounding impedance characteristics. A grounding system for protection against lightning should be evaluated by the transient grounding impedance, not it's ground resistance. The transient grounding impedance varies with the shape of ground electrode and earth characteristics as well as the waveform of lightning surge current. For the analysis and practical use of transient grounding impedance, the characteristics of transient grounding impedance should be analyzed theoretically and this paper suggests the theoretical analysis for the transient grounding impedance of counterpoise by using the distributed parameter circuit model. EMTP and Matlab are used to simulate the distributed parameter circuit model of counterpoise and the adequacy of the distributed parameter model of counterpoise is examined by comparing the simulated results with the measured results.

• Journal of Power Electronics
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• v.18 no.6
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• pp.1751-1759
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• 2018

This paper presents parallel-connected inverters to achieve accurate proportional power sharing. Due to line impedance mismatch, reactive power cannot be distributed proportionally when using the conventional $P-{\omega}$ and $\mathcal{Q}-E$ droop. In order to realize reactive proportional power sharing, the ratio of the droop coefficients should be inversely proportional to their power-sharing ratios. Meanwhile, the ratio of the line impedance should be inversely proportional to the desired power-sharing ratio, which is very difficult to be met in practice. In order to deal with this issue, a practical control strategy is presented. By measuring the PCC voltage and using the virtual impedance, the output impedance of individual inverters is reconstructed to counteract the line impedance effect. In order to guarantee system stability, a low pass filter is designed to suppress the bandwidth of the line compensation. Finally, the simulation and experimental results are given to verify the effectiveness of the proposed control strategy.

• Journal of Power Electronics
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• v.19 no.6
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• pp.1575-1581
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• 2019

Due to the mismatched line impedance among distributed generation units (DGs) and uncontrolled harmonic current, the droop controller has a number of problems such as inaccurate reactive power sharing and voltage distortion at the point of common coupling (PCC). To solve these problems, this paper proposes a resistive-capacitive virtual impedance control method. The proposed control method modifies the DG output impedance at the fundamental and harmonic frequencies to compensate the mismatched line impedance among DGs and to regulate the harmonic current. Finally, reactive power sharing is accurately achieved, and the PCC voltage distortion is compensated. In addition, adaptively controlling the virtual impedance guarantees compensation performance in spite of load changes. The effectiveness of the proposed control method was verified by experimental results.

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.32-37
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• 2022

As semiconductors become finer, equipment must perform precise and accurate processes to achieve the desired wafer fabrication requirement. Radio frequency power delivery system in plasma system plays a critical role to generate the plasma, and the role of impedance matching unit is critical to terminate the reflected radio frequency power by modifying the impedance of the matching network in the plasma equipment. Impedance matching unit contains one fixed inductor and two variable vacuum capacitors whose positions are controlled two step motors. Controlling the amount of vacuum variable capacitor should be made as soon as possible when the mismatched impedance is detected. In this paper, we present the impedance matching algorithm using the phase sensor.