• Analytical Science and Technology
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• v.5 no.1
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• pp.135-142
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• 1992

Indium tin oxide(ITO) films coated on the window glass selectively transmit the solar energy and infrared. We call this system passive solar collectors. Selectively absorbing properties of sol gel dip coated ITO films were characterized by UV-VIS-NIR spectroscopy. The effects of heat treating temperature, time, atmosphere, substrate and barrier layers are concerned. Indium tin oxide films heat-treated at $500^{\circ}C$ in a reducing atmosphere show intrinsic properties. Efficiency of solar energy transmittance was enhanced by coating of $SiO_2-ZrO_2$ as an alkali ion barrier layer. Energy was saved by the double layers of $SiO_2-ZrO_2$ and ITO since solar energy is transmitted and heat generated inside(${\lambda}$ > 2700nm) is reflected.

• Applied Chemistry for Engineering
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• v.25 no.3
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• pp.242-248
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• 2014

Flexibility of a transparent device has been required in accordance with miniaturization and mobilization needs in recent industry. The most representative material used as a transparent electrode is indium tin oxide (ITO). However, a couple of disadvantages of ITO are the exhaustion of natural resource of indium and its inflexibility due to inorganic substance. To overcome the limit of ITO, a variety of alternative materials have been researched on development of transparent electrodes and its properties through composite materials. In this review, we classify some of emerged materials with their general studies.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.11
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• pp.8-12
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• 2008

For the reduction of fabrication cost and process time of AC plasma display panel (PDP), indium tin oxide (ITO) layer was patterned as bus electrode using Nd:$YVO_4$ laser. In comparison with the chemically wet etched ITO patterns, laser ablated ITO patterns showed the formation of shoulders and ripple-like structures at the edge of the ITO lines. For the reduction of shoulders and ripple-like structures, pulse repetition rate and scan velocity of laser was changed. In addition, we analyzed a discharge characteristic of PDP test panel to observe how the shoulders and ripple-like structures influence on the PDP. Based on experimental results, the pattern etched at the 500 mm/s and 40 kHz was better than any other condition. From this experiment we could see the possibility of the laser direct patterning for the application to the patterning of ITO in AC-PDP.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.99.2-99.2
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• 2015

현재 투명전극(Transparent Conductive Oxide: TCO)은 평판 디스플레이, 태양전지, 터치패널, 투명 트렌지스터의 전극 등 여러 분야에서 연구되어지고 있으며, 주로 IT 산업의 핵심재료로 ITO (Indium Tin Oxide)가 사용되고 있다. ITO 박막은 주로 스퍼터 공정을 통해 제작이 되며, 전기전도도가 우수하며 높은 Optical Band Gap을 가지고 있어 투명전극으로 많이 사용되고 연구되어지고 있다. 산화물 박막을 증착할 때 산소유량에 따라 박막의 물성이 변하거나 박막의 특성이 저하되는 현상 등을 가지고 있어 공정시 산소유량이 중요한 변수로 작용하게 된다. 본 연구에서는 증착 공정 중 발생하는 플라즈마의 방출광을 가지고 산소의 대표적인 파장의 방출광을 관찰하여 방출광이 변화함에 따라 실시간으로 산소가스유량이 제어됨을 확인하였으며, 또한 산소유량제어를 통해 생성된 박막의 전기적 특성 및 광학적 특성 등 박막의 물성을 비교하였다.

• Journal of the Korean Ceramic Society
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• v.29 no.1
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• pp.48-52
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• 1992

Indium tin oxide (ITO) layers are of considerable interest on account of the combination of properties they provide high electrical conductivity, high infrared reflection with high solar energy transmission, high transmission in the visible range. We are concerned about the variation of the spectral transmittances and sheet resistances as the thickness of SiO2-ZrO2 barrier layer and ITO layers and heat treating conditions are changed. Transmittances and reflectivities were studied by measuring UV-VIS-NIR-, FT-IR spectroscopy. ITO films are crack free, homogeneous and of polycrystalline cubic structure. The microstructure of good ITO films shows a narrow grain size distribution and mean value of 100 nm. The selectivity of absorbing properties is improved by increasing the thickness of ITO films. The increase of sheet resistance of ITO films are due to the increase in the reaction between films and glass substrate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.522-525
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• 2004

ITO thin films $({\sim}150\;nm)$ are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AFM). The sheet resistance of ITO thin films compared $s_{11}$ values by using a near field scanning microwave microscope.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05a
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• pp.137-141
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• 2004

저항특성이 다른 ITO박막의 구조특성과 표면특성을 XRD와 AFM(atomic force microscopy), SEM(scanning electron microscopy)을 이용하여 관측하였다. 접촉방식인 4단자 법을 사용하여 ITO박막의 표면전기저항을 측정하였다. 관측된 구조 및 표면특성을 바탕으로 비파괴 비접촉방식을 이용한 근접장 마이크로파 현미경을 이용하여 얻은 ITO박막의 표면저항특성과 비교 연구하였다.

• Laser Solutions
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• v.17 no.1
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• pp.13-16
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• 2014

Indium Tin Oxide (ITO) has been used widely for transparent conducting thin films. In this work, the feasibility of a laser sintering process to fabricate ITO thin films on flexible substrates is examined. Nanoparticles of ~10 nm were spin coated on a Si wafer and then sintered by a KrF excimer laser. The sintered structure was characterized by scanning electron microscopy. Polycrystalline structures were fabricated by the process without thermally damaging the substrate. The electrical resistivity of the film was reduced to ~ 1/1000 of the initial value. This work demonstrates that nanosecond laser sintering of ITO particles can be a useful tool to fabricate ITO films on various flexible substrates.

• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.77-80
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• 2010

Indium tin oxide (ITO) films with a 5 nm thick Au interlayer were prepared on glass substrates. The effects of the Au interlayer on the gas sensitivity for detecting methanol vapors were investigated at room temperature. The conductivity of the film sensor increased upon exposure to methanol vapor and the sensitivity also increased proportionally with the methanol vapor concentration. In terms of the sensitivity measurements, the ITO film sensor with an Au interlayer shows a higher sensitivity than that of the conventional ITO film sensor. This approach is promising in gaining improvement in the performance of ITO gas sensors used for the detection of methanol vapor at room temperature.

• Electrical & Electronic Materials
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• v.10 no.7
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• pp.700-705
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• 1997

Transparent conducting indium tin oxide (TC-ITO) thin films are deposited on soda lime glass by a dc magnetron sputtering technique having the unbalanced-magnet structure in order to improve the electrical/material characteristics and to avoid the surface damages. The material properties are measured by the x-ray diffractometer (XRD) and atomic force microscope (AFM). The (400) peak as the preferred orientation of <100> direction for ITO thin films is stabilized with the increase of substrate temperature. The surface roughness estimated by AFM 3D image at the substrate temperature of 40$0^{\circ}C$ is extremely uniform. The best resistivity of ITO films (5500 $\AA$ thick) at 40$0^{\circ}C$ is about 1.3$\times$10$^{-4}$ $\Omega$cm on the position of 4 cm from substrate center.