• 한국재료학회지
• /
• 제18권1호
• /
• pp.32-37
• /
• 2008

The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2007년도 추계학술대회 논문집
• /
• pp.380-381
• /
• 2007

This paper reports on the deposition conditions and properties of ITO films used as electrode layer in a organic light emitting diodes on a PET substrate. The deposition technique employed was specially designed roll-to-roll sputtering. The oxide was deposited at room temperature in an argon and oxygen plasma on a transparent conducting ITO layer on a PET film. The influence of deposition parameters such as DC power, working pressure and oxygen partial pressure has been investigated, in order to obtain the best compromise between a high deposition rate and adequate electro-optical properties. Electrical and optical properties of ITO films were analyzed by Hall measurement examinations with van der pauw geometry at room temperature and UV/Vis spectrometer analysis, respectively. In addition, the structural properties and surface smoothness were measured by x-ray diffraction and scaning electron microscopy, respectively. From optimized ITO films grown by roll-to-roll sputter system, good electrical$(6.44{\times}10^{-4}\;{\Omega}-cm)$ and optical(above 86 % at 550 nm) properties were obtained. Also, the ITO films exhibited amorphous structure and very flat surface beacause of low deposition temperature.

• 한국신뢰성학회지:신뢰성응용연구
• /
• 제17권1호
• /
• pp.72-77
• /
• 2017

Purpose: The electrochemical corrosion behavior of tin oxide film coated on PET substrates has been studied under varying concentrations of acrylic acid to investigate possible corrosion in contact with the acidic environment. Method: Potentiodynamic test was performed for a commercial ITO/PET film in 0.1, 0.3, and 0.5 M of acrylic acid. The surface morphology was analyzed by scanning electron microscope (SEM) and energy dispersive spectroscopy (EDS). Results: Potentiodynamic test results showed an increase in Icorr and decrease in Ecorr value with increasing concentration of acid. Microscopic evaluation suggested the presence of certain deep cracks on the surface of the film in addition with a severe acidic attack. Conclusion: Exposure of ITO to acrylic acid resulted in the stress corrosion cracking of ITO film due to the mechanical mismatch between brittle inorganic ITO fim and a compliant organic PET substrate leading to the subsequent failure of the film.

• Transactions on Electrical and Electronic Materials
• /
• 제1권2호
• /
• pp.23-27
• /
• 2000

Indium in oxide(ITO) films have been deposited on PET and glass substrates by DC reactive magnetron sputtering without post-deposition thermal treatment, The high quality for microstructure, electrical and optical properties of the as-deposited ITO films on unheated substrates is dominated by the sputtering parameters, The influence of the working gas pressure, DC power and oxygen partial pressure has been systematically investigated, The lowest DC power, and oxygen partial pressure has been systematically investigated, The lowest resistivity of ITO films deposited on PET substrates was 6$\times$10$^{-4}$ $\Omega$cm. It has been obtained at a working pressure of 3 mTorr and DC power of 30 W. The sheet resistance and optical transmittance of these film were 22 $\Omega$/square and 84% respectively. The best values of figures of merit for the electrical and optical characteristics such as T/ $R_{sh}$ and $T^{10}$ / $R_{sh}$ are approximately 38.1 and 7.95($\times$10$^{-3}$ $\Omega$$^{-1}$ ), respectively.

• 한국표면공학회지
• /
• 제41권5호
• /
• pp.214-219
• /
• 2008

Indium tin oxide (ITO) films were deposited on PET substrate by RF superimposed DC magnetron sputtering using ITO (doped with 10 wt% $SnO_2$) target. Substrate temperature was maintained below $750^{\circ}C$ without intentionally substrate heating during the deposition. The discharge voltage of DC power supply was decreased from 280 V to 100 V when superimposed RF power was increased from 0 W to 150 W. The electrical properties of the ITO films were improved with increasing of superimposed RF power. In the result of cyclic bending test, relatively high mechanical property was obtained for the ITO film deposited with RF power of 75 W under DC current of 0.75 A which could be attributed to the decrease of internal stress caused by decrease in both deposition rate and plasma impedance.

• 대한금속재료학회지
• /
• 제49권2호
• /
• pp.192-196
• /
• 2011

The multi-layered thin film with an ITO/Ag/ITO structure was produced on PET by using magnetron reactive sputtering method. First, 30 nm of ITO thin film was coated on PET by using normal temperature process. Then 20-52 nm of the Ag thin film was coated. Lastly, 30 nm of ITO thin film was coated on Ag layer. The sample of the 20 nm Ag thin film showed more than 70% transmission and a $2.7{\Omega}/{\Box}$ sheet resistance. When compared to the existing single-layered transparent conducting thin film, multi-layered film was found to be superior with about $5{\Omega}/{\Box}$ less sheet resistance. However, since the Ag layer became thinner, the band gap energy needs to be increased to more than 3.5 eV.

• 한국진공학회지
• /
• 제8권4A호
• /
• pp.438-444
• /
• 1999

The characterization of the reactively sputtered ITO layer on the PET film has been studied. The PEM device has been used to determine the optimum stoichimetry through control of the amount of oxygen incorporated into the alloy target and the optimum operation conditions to produce films with the highest electrical conductivity and visible transparency. The PEP film was pre-treated under the plasma discharge condition to remove the adsorbed gases and to modify the surface morphology. The results revealed that by adjusting the flow rate of oxygen with the spectral intensity of indium target, the composition of plasma gas can be kept constant during the entire deposition period. The resistivity of ITO film obtained was fond to be about 37$\Omega\Box$, and the transmittance of visual range was about 86%.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2009년도 춘계학술대회 논문집
• /
• pp.186-186
• /
• 2009

RF 부가형 DC 마그네트론 스퍼터링 공정을 이용하여 상온에서 Indium tin oxide (ITO) 박막을 PET (polyethylene terephthalate) 기판 위에 증착하였다. 전체 파워는 70W로 유지하고 RF/ (DC+RF) 파워율은 0 %에서 100 %까지 20% 비율로 증가시켰다. 50 %의 RF/(RF+DC) 파워율에 의해 증착된 ITO 박막에서 상대적으로 낮은 비저항을 얻을 수 있었으며, bending test에 의한 기계적 내구성 또한 가장 우수하였다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
• /
• pp.132.1-132.1
• /
• 2005

• Composites Research
• /
• 제24권1호
• /
• pp.45-50
• /
• 2011

자체-감지능 있는 다기능성 나노복합소재를 위해, 투명하고 전도성 있는 카본나노튜브 (CNT)로 코팅된 폴리에틸렌 테레프탈레이트(PET)를 함침 방법으로 제조하였다. CNT 코팅의 전기적 광학적 특정의 변화는 함침 횟수와 CNT용액의 농도에 주로 의존하였다. 결과적으로, CNT 코팅의 표면저항과 투과도는 제조공정의 변수들에 따라 예민하게 조절되었다. CNT 코팅의 표면저항은 4점법과 이중 배열법에 의해 측정되었으며, 광학적 투과도는 UV 스펙트럼을 사용하여 평가하였다. CNT 코팅의 표면특성을 측정한 정적 및 동적 접촉각은 상호 일치함을 보여주었다. 함침 코팅수가 증가함에 따라, CNT코팅한 PET의 표면저항은 현저하게 저하했으나, 투명도는 CNT 네트워크의 특성으로 거의 감소하지 않았다. CNT와 인듐틴옥사이드 (ITO)의 계면 및 전기적 특성들은 피로 시험을 통하여 비교하였다. CNT는 2000회 반복 후에도 표면저항의 변화가 없는 반면에, ITO는 1000회 반복까지 표면저항의 급격한 증가를 보여주었다가 안정화하였다. 이는 형상비가 큰 CNT는 전기 접촉점을 계속 유지하는 반면에, 취성이 있는 ITO는 미세 균열이 발생하여 전지 접촉점을 많이 상실하기 때문이다.