• Korean Journal of Metals and Materials
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• v.46 no.11
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• pp.755-761
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• 2008

We fabricated thermally evaporated 10 nm-Ni/1 nm-Ir/(poly)Si films to investigate the energy saving property of silicides formed by rapid thermal annealing (RTA) at the temperature range of $300{\sim}1200^{\circ}C$ for 40 seconds. Moreover, we fabricated 100 nm-thick ITO/(poly)Si films with an rf-sputter as references. A transmission electron microscope (TEM) and an X-ray diffractometer were used to determine cross-sectional microstructure and phase changes. A UV-VIS-NIR and FT-IR (Fourier transform infrared spectroscopy) were employed for near-IR and middle-IR absorbance. Through TEM analysis, we confirmed 20~65 nm-thick silicide layers formed on the single and polycrystalline silicon substrates. Ir-inserted nickel silicide on single crystalline substrate showed almost the same absorbance in near IR region as well as ITO, but Ir-inserted nickel silicide on polycrystalline substrate, which had the uniform absorbance in specific region, showed better absorbance in near IR region than ITO. The Ir-inserted nickel silicide on polycrystalline substrate particularly showed better absorbance in middle IR region than ITO. The results imply that nano-thick Ir-inserted nickel silicides may have excellent absorbing capacity in near-IR and middle-IR region.

• Journal of Sensor Science and Technology
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• v.30 no.1
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• pp.36-41
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• 2021

The motivation of this paper is to easily analyze the properties of nondispersive infrared gas sensor that has more than two different optical path length and to suggest the criterion and definition of infrared light absorbance in order to minimize the measurement errors. With the output voltage ratios and the normalized derivatives of infrared ray (IR) absorbance, when the normalized derivatives of IR absorbance decreases from 0.28 to 0.10, the lower and higher limits of errors were decreased from -5.62% and 2.39% to -4.27% and 2.78%. When the normalized derivatives of IR absorbance were 0.10, the output voltage could be partitioned into two regions with one exponential equation and the temperature compensation error was less than 5%.

• Korean Journal of Materials Research
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• v.17 no.6
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• pp.323-330
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• 2007

We fabricated thermaly evaporated 10 nmNi/(poly)Si films to investigate the energy saving property of silicides formed by rapid thermal annealing (RTA) at the temperature of $300{\sim}1200^{\circ}C$ for 40 seconds. Moreover, we fabricated $10{\sim}50$ nm-thick ITO/Si films with a rf-sputter as reference films. A four-point tester was used to investigate the sheet resistance. A transmission electron microscope (TEM) and an X-ray diffractometer were used for the determination of cross sectional microstructure and phase changes. A UV-VISNIR and FT-IR (Fourier transform infrared rays spectroscopy) were employed for near-IR and middle-IR absorbance. Through TEM analysis, we confirmed $20{\sim}70nm-thick$ silicide layers formed on the single and polycrystalline silicon substrates. Nickel silicides and ITO films on the single silicon substrates showed almost similar absorbance in near-IR region, while nickel silicides on polycrystalline silicon substrate showed superior absorbance above 850 nm near-IR region to ITO films. Nickel silicide on polycrystalline substrate also showed better absorbance in middle IR region than ITO. Our result implies that nano-thick nickel silicides may have exellent absorbing capacity in near-IR and middle-IR region.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.303-311
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• 2020

Nondispersive infrared CO₂ gas sensor was developed after the simulation of optical cavity structure and assembling the optical components: IR source, concave reflectors, Fresnel lens, a hollow disk, and IR detectors. By placing a hollow disk in front of reference IR detector, the output voltages are almost constant value, near to 70.2 mV. The absorbance of IR light, F_a, shows the second order of polynomial according to ambient temperatures at 1,500 ppm. The differential output voltages and the absorbance of IR light give a higher accuracy in estimations of CO₂ concentrations with less than ± 1.5 % errors. After implementing the parameters that are dependent upon the ambient temperatures in microcontroller unit (MCU), the measured CO₂ concentrations show high accuracies (less than ± 1.0 %) from 281 K to 308 K and the time constant of developed sensor is about 58 sec at 301 K. Even though the estimation errors are relatively high at low concentration, the developed sensor is competitive to the commercial product with a high accuracy and the stability.

• Korean Journal of Metals and Materials
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• v.46 no.2
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• pp.88-96
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• 2008

Thermal evaporated 10 nm-$Ni_{50}Co_{50}$/(70 nm-poly)Si films were deposited to examine the energy saving properties of silicides formed by rapid thermal annealing at temperature ranging from 500 to $1,100^{\circ}C$ for 40 seconds. Thermal evaporated 10 nm-Ni/(70 nm-poly)Si films were also deposited as a reference using the same method for depositing the 10 nm-$Ni_{50}Co_{50}$/(70 nm-poly)Si films. A four-point probe was used to examine the sheet resistance. Transmission electron microscopy (TEM) and X-ray diffraction XRD were used to determine cross sectional microstructure and phase changes, respectively. UV-VIS-NIR and FT-IR (Fourier transform infrared spectroscopy) were used to examine the near-infrared (NIR) and middle-infrared (MIR) absorbance. TEM analysis confirmed that the uniform nickel-cobalt composite silicide layers approximately 21 to 55 nm in thickness had formed on the single and polycrystalline silicon substrates as well as on the 25 to 100 nm thick nickel silicide layers. In particular, nickel-cobalt composite silicides showed a low sheet resistance, even after rapid annealing at $1,100^{\circ}C$. Nickel-cobalt composite silicide and nickel silicide films on the single silicon substrates showed similar absorbance in the near-IR region, while those on the polycrystalline silicon substrates showed excellent absorbance until the 1,750 nm region. Silicides on polycrystalline substrates showed high absorbance in the middle IR region. Nickel-cobalt composite silicides on the poly-Si substrates annealed at $1,000^{\circ}C$ superior IR absorption on both NIR and MIR region. These results suggest that the newly proposed $Ni_{50}Co_{50}$ composite silicides may be suitable for applications of IR absorption coatings.

• Korean Journal of Materials Research
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• v.19 no.4
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• pp.179-185
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• 2009

We fabricated thermally evaporated 30 nm-Ni/(20 nm or 60 nm)a-Si:H/Si films to investigate the energy-saving property of silicides formed by rapid thermal annealing (RTA) at temperatures of $350^{\circ}C$, $450^{\circ}C$, $550^{\circ}C$, and $600^{\circ}C$ for 40 seconds. A transmission electron microscope (TEM) and a high resolution X-ray diffractometer (HRXRD) were used to determine the cross-sectional microstructure and phase changes. A UVVIS-NIR and FT-IR (Fourier transform infrared spectroscopy) were employed for near-IR and middle-IR absorbance. Through TEM and HRXRD analysis, for the nickel silicide formed at low temperatures below $450^{\circ}C$, we confirmed columnar-shaped structures with thicknesses of $20{\sim}30\;nm$ that had ${\delta}-Ni^2Si$ phases. Regarding the nickel silicide formed at high temperatures above $550^{\circ}C$, we confirmed that the nickel silicide had more than 50 nm-thick columnar-shaped structures with a $Ni_{31}Si_{12}$ phase. Through UV-VIS-NIR analysis, nickel silicide showed almost the same absorbance in the near IR region as well as ITO. However, in the middle IR region, the nickel silicides with low temperature showed similar absorbance to those from high temperature silicidation.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.45-51
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• 2005

We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single $SiO_{2}$ layer works as an IR absorbing plate and $Pb(Zr_{0.3}Ti_{0.7})O_{2}$ thin film served as a thermally sensitive material. There are some advantages of applying $SiO_{2}$ layer as an IR absorbing layer. First of all, the $SiO_{2}$ has good IR absorbance within $8{\sim}12{\mu}m$ spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. $SiO_{2}$ layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness Ito the structure.

• Journal of Conservation Science
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• v.37 no.6
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• pp.648-658
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• 2021

In this study, we aimed to analyze the chemical changes that occur in Korean paper in an accelerated deterioration environment of 105℃. We selected the Korean paper produced with different types of cooking agents (plant lye, Na₂CO₃) and during different manufacturing seasons (winter, summer). The degree of deterioration of the Korean paper was confirmed by measuring the brightness, yellowness, and pH level, and the degree of change in each vibrational region of cellulose as deterioration progressed through infrared (FT-IR) spectroscopy. The FT-IR analysis showed that, as deterioration progressed, the absorbance of the amorphous region in cellulose decreased, whereas the absorbance of the crystalline region slightly increased. X-Ray diffraction (XRD) analysis and Raman spectroscopy were performed to verify the changes in the crystalline and amorphous regions in cellulose indicated by the FT-IR results. Furthermore, the crystallinity index (CI) was calculated; it showed a slight increase after deterioration; therefore, CI was confirmed to follow the same trend as that observed for absorbance in the FT-IR results. In addition, as a result of Raman spectroscopic analysis, the degree of decomposition of the amorphous region in the cellulose under the manufacturing conditions was confirmed by the fluorescence measured after the deterioration.

• Applied Chemistry for Engineering
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• v.9 no.2
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• pp.249-254
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• 1998

To synthesize cation exchange resin which has thermal stability, the sulfonated poly(ether ether sulfone) (SPEES) was obtained by sulfonation after synthesis of poly(ether ether sulfone) (PEES). It was prepared from hydroquinone and dichlorophenyl sulfone. From FT-IR results, the sulfonation was confirmed by the bands of asymmetric O=S=O stretching of $SO_3Na$ Na group at $1140cm^{-1}$ and S-C stretching at $621cm^{-1}$. The optimum condition of the sulfonation of PEES, based on IR absorbance, was 3 hr of reaction time, $30^{\circ}C$ of reaction temperature, and chlorosulfonic acid of 150 mol%. Ion exchange capacities calculated by the IR absorbance of PEES sulfonated in optimum condition was 6.2 meq/g, which was nearly similar to the ion exchange capacity calculated by titration. When the metal ion was adsorved, small brain, lump, hulled millet shape and compact surface, were observed in the morphology of SPEES.

• Journal of the Korean Society of Food Science and Nutrition
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• v.23 no.4
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• pp.604-613
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• 1994

Hydrophilic brown pigments(HBPs) produced during fermentation and aging the domestic Meju and Doenjang were separated by dialysis and chromatography , and their antioxidant activity were measured . The chemical properties of HBP were determined by UV and IR spectrophotometry. HBPs contents were found to be 93.1 mg/g and 183.2mg/g in Meju fermentated for 30 days and 80 days , respectively. The ratio of dialysate to diffusate of the HBPs were appeared to be 70 : 30 and 87 :13 in the Meju fermented for 30 days and 80 days, respectively. and the rtio in the Doenjang aged for 60 days was 91 :9 , indicating that dialysate slowly days, respectively, and the ratio in the Doenjang aged for 60 days was 91 : 9, incidatin that dialysate slowly increased by the fermentation . Both portion exhibited strong antioxidant activity, but more stronger antioxidant activity was found in the dialysate. DEAE-celluose column chromatography showed that dialysate contained more materials eluted by 0.01-0.03M HCI solution than 0.01M acetate buffer, but diffusate showed opposite results. The degree of browning reaction and antioxdiant activity found in the fraction eluted by HCI solution was stronger than that of the fraction eluted by acetate buffer. The fraction eluted from DEAE-cellulose column chormatogrphy was further fractionaged by TLC and found that strong antioxidant activity was present in the fractions which did not possess fluorescenece and showed a negative ninhydrin reaction. TLC fractions of HCI eluant in Meju exhibited a strong absorbance at 260-280nm, but most of other fractions did not show any absorbance at UV region. TLC fractions from dialysate and diffusate showed fairly identical IR spectrum with absorbance at 3400cm-1, 2800cm-3000cm -1, 1600cm, -1 1400cm-1 and 1100 cm-1 , however, in addition to these absorbances, the spectrum from HCI eluant of Meju exhibited a strong absorbance at 1750cm , indicating the carbonic acid or carbonate ester.