• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.7
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• pp.288-292
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• 2003

AlM thin film has been deposited on A1$_2$O$_3$ substrate by reactive radio frequency(RF) magnetron sputtering method under various operating conditions such as working pressure, fraction of nitrogen partial pressure, and substrate temperature. Scanning Electron Microscope(SEM), X-ray Diffraction(XRD), and Atomic Force Microscope(AFM) have been measured to find out structural properties and preferred orientation of AlN thin films. SAW velocity of IDTs/AlN/Si structure was about 5038［㎧］ at the center frequency of 251.9［MHz］ and insertion loss was measured to be relatively low value of 35.6［dB］. SAW velocity of IDTs/AlN/A1$_2$O$_3$ structure was improved to be about 5960［㎧］ at the center frequency of 296.7［MHz］.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.1898-1899
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• 2005

반도체 집적회로 공정에서 사용되는 폴리이미드 포토레지스트(P12723, Dupont)를 감습막으로 사용하는 마이크로 습도센서 소자를 제작하였다. 마이크로 습도센서는 실리콘 웨이퍼 기판 위에 $SiO_2$ 박막을 건식열산화 공정으로 제작하고, Al 박막을 포토리소그라피 공정으로 패터닝 한 IDT (Interdigital Transducer)를 전극 위에 폴리이미드 포토레지스트를 공정변수를 다양하게 조절하면서 감습막으로 제작하였다. 폴리이미드 감습막은 스핀코팅법으로 제작하였으며, 회전수를 조절하여 두께를 변화시켰다. 완성된 마이크로 습도센서 소자의 상대습도 변화$(10{\sim}90% RH)$에 따른 정전용량 값 변화를 항온항습조 내에서 다양한 온도에서 HP4192A Impedance Analyzer를 사용하여 조사함으로써, 폴리이미드 포토레지스트를 사용하는 마이크로 정전용량형 습도센서의 제작 가능성을 검토하였다. 폴리이미드 정전용량형 마이크로 습도센서는 다양한 인가 전원 주파수에서 기준 센서로 사용된 상용 Vaisala Hygrometer와 유사한 감습특성 및 응답특성을 보였다.

• Korean Journal of Materials Research
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• v.12 no.7
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• pp.522-527
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• 2002

To investigate the SAW properties of GaN films on c-plane sapphire substrates, we carried out both the experimental measuring and theoretical calculation. The experimental characterization of SAW propagation properties was performed with a linear array of interdigital transducer (IDT) structures, while SAW velocities were calculated by matrix methods. HVPSAW mode with the propagation velocity over 10,000m/s and PSAW mode as well as GSAW could be observed in experimental determination. These results were verified by matching with the theoretical calculation.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.2 s.43
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• pp.59-63
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• 2007

This paper presented a low-cost thick film gas sensor module, which was based on simple PCB (Printed Circuit Board) process. The proposed sensor module included a $NO_2/H_2$ gas sensor, a relative humidity sensor, and a heating element. The $NO_2/H_2$ gas and relative humidity sensors were realized by screen-printing $SnO_2,\;BaTiO_3$ nano-powders on IDTS (Interdigital Transducer) of a PCB substrate, respectively. At first 1% $H_2$ gas flowed into the sensor chamber. After 4 min, air filled the chamber while $H_2$ gas flow stopped. This experiment was performed repeatedly. The Identical procedure was used for the $NO_2$ detection. The result for sensing $H_2$ gas showed the increase of voltage from 0.8V to 3.5V due to the conductance increase and its reaction response time by hydrogen flow was 65 sec. $NO_2$ sensing results showed 2.7 V voltage drop due to the conductance decrease and its response time was 3 sec through a voltage monitoring.

• Journal of the Korean Society of Visualization
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• v.14 no.1
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• pp.57-61
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• 2016

We report a finding of fast(exceeding 2,000 K/s) heating of polydimethylsiloxane(PDMS), one of the most commonly-used microchannel materials, under cyclic loadings at high(~MHz) frequencies. A microheater was created based on the finding. The heating mechanism utilized vibration damping of sound waves, which were generated and precisely manipulated using a conventional surface acoustic wave(SAW) microfluidic system, in PDMS. The penetration depths were measured to range from $210{\mu}m$ to $1290{\mu}m$, enough to cover most microchannel heights in microfluidic systems. The energy conversion efficiency was SAW frequency-dependent and measured to be the highest at around 30 MHz. Independent actuation of each interdigital transducer(IDT) enabled independent manipulation of SAWs, permitting spatiotemporal control of temperature on the microchip. All the advantages of this microheater facilitated a two-step continuous flow polymerase chain reaction(CFPCR) to achieve the billion-fold amplification of a 134 bp DNA amplicon in less than 3 min. In addition, a technique was developed for establishing dynamic free-form temperature gradients(TGs) in PDMS as well as in gases in contact with the PDMS.