• 한국표면공학회지
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• 제45권5호
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• pp.206-211
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• 2012

Process analysis was carried out during deposition of MgO by inductively coupled plasma assisted reactive magnetron sputtering in Ar and $O_2$ ambient. At the initiation of Mg sputtering with bipolar pulsed dc power in Ar ambient, total pressure showed sharp increase and then slow fall. To analyse partial pressure change, QMS was used in downstream region, where the total pressure was maintained as low as $10^{-5}$ Torr during plasma processing, good for ion source and quadrupole operation. At base pressure, the major impurity was $H_2O$ and the second major impurity was $CO/N_2$ about 10%. During sputtering of Mg in Ar, $H_2$ soared up to 10.7% of Ar and remained as the major impurity during all the later process time. When $O_2$ was mixed with Ar, the partial pressure of Ar decreased in proportion to $O_2$ flow rate and that of $H_2$ dropped down to 2%. It was understood as Mg target surface was oxidized to stop $H_2$ emission by Ar ion sputtering. With ICP turned on, the major impurity $H_2$ was converted into $H_2O$ consuming $O_2$ and C was also oxidized to evolve CO and $CO_2$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2004년도 제27회 학술발표회 초록집
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• pp.76-76
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• 2004

• 한국측량학회지
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• 제38권1호
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• pp.35-41
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• 2020

3D 레이저 스캐너는 대상물에 대한 많은 양의 데이터를 빠른 시간 내에 취득할 수 있는 효과적인 방법으로 최근 측량, 변위측정, 대상물의 3차원 데이터 생성, 실내공간정보 구축, BIM (Building Information Model) 등 다양한 분야에 활용되고 있다. 3D 레이저 스캐너를 통해 취득되는 점군데이터의 활용을 위해서는 정합과정을 거쳐 많은 측점에서 취득한 데이터를 통일된 좌표체계를 가진 하나의 데이터로 만드는 과정이 필요하다. 따라서 정합 방법에 따른 점군데이터의 정확도에 대한 분석적 연구가 필요하다 이에 본 연구에서는 3D 레이저 스캐너를 통해 취득되는 점군데이터의 정합방법에 따른 정확도를 분석하고자 하였다. 3D 레이저 스캐너를 통해 연구대상지의 점군데이터를 취득하고, 자료처리를 통해 ICP (Iterative Closest Point) 와 형상정합 방법에 의해 점군데이터를 정합하였으며, 토털스테이션 측량성과와 비교하여 정확도를 분석하였다. 정확도 평가 결과 ICP와 형상정합 방법은 각각 토털스테이션 성과와 0.002~0.005m, 0.002~0.009m의 차이를 나타내었다. 각각의 정합 방법은 실험결과 모두 0.01m 미만의 편차를 나타내어 1:1,000 수치지형도의 허용정확도를 만족하였으며, ICP 및 형상정합을 이용한 점군데이터의 정합이 공간정보 구축에 충분히 활용 가능함을 제시하였다. 향후 형상정합 방법에 의한 점군데이터의 정합은 3D 레이저 스캐너를 활용한 공간정보 구축 과정에서 타겟의 설치를 줄임으로써 생산성 향상에 기여할 것이다.

• 정보처리학회논문지C
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• 제13C권6호
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• pp.785-794
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• 2006

인터넷 이용의 확산으로 네트웍 사용량은 급격하게 증가하였다. 최근에는 인터넷 트래픽의 많은 부분을 웹 트래픽이 차지하게 된다. 본 논문에서는 둘 이상의 프락시서버가 서로 유기적으로 협동하여 캐슁을 하는, 새로운 공유 웹 캐슁 (Shared Web Caching)기법을 제안한다 제안된 기법은 DCOORD (Directory-based COORDinated Caching) 라고 이름짓는다. DCOORD는 여러 개의 캐쉬서버가 각자 자기에게 캐슁되어 있는 오브젝트들을 유기적으로 조정하여 전체의 캐슁 비용을 줄인다. 실제 사용된 트레이스에 기반한 시뮬레이션으로 DCOORD를 다른 두 개의 대표적인 공유 웹 캐슁 기법인 ICP와 CARP와 비교한다. 실험에서는 기존에 많이 사용되는 메트릭인 히트율 대신, 오브젝트를 가져오기 위한 비용을 고려한 메트릭인 CSR을 주로 사용한다. 캐쉬 수의 증가 등의 실험을 통하여 DCOORD가 기존의 ICP나 CARP 보다 일관되게 많은 비용 절감 효과가 있음을 보여준다 또한 DCOORD는 캐쉬 상호간의 메시지 수도 많지 않고, 캐쉬간의 트래픽도 상대적으로 적다. 본 논문에서 제안한 DCOORD는 협동적 웹캐슁에서 성능 향상 뿐 아니라 비용 절감에 효과적이다

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.179-179
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• 2012

Low pressure radio-frequency glow discharges are investigated using theoretical modeling and various experimental diagnostic methods. In the calculations, global models and transformer models are developed to understand the chemical kinetics as well as the electrical properties such as the effective collision frequency, the heating mechanism and the power transferred to the plasma electrons. In addition, Boltzmann equation solver is used to compensate the effect of the electron energy distribution function (EEDF) shape in the global model, and the general expression of energy balance for non-Maxwellian electrons is developed. In the experiments, a number of traditional plasma diagnostic methods are used to compare with calculated results such as Langmuir probe, optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and two-photon absorption laser-induced fluorescence (TALIF). These theoretical and experimental methods are applied to understand several interesting phenomena in low pressure ICP discharges. The chemical and physical properties of low pressure ICP discharges are described and the applications of these methods are discussed.

• 반도체디스플레이기술학회지
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• 제6권2호
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• pp.29-33
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• 2007

Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching.

• 한국표면공학회지
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• 제43권3호
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• pp.154-158
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• 2010

Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.244-245
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• 2007

The RF inductive discharge of inductively couples plasma (ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology. Although most practical ICPs operate at 13.56 [MHz] and 2.65 [MHz], the trend to reduce the operating frequency is clearly recognizable from recent ICP developments. in and electrodeless fluorescent lamp, the use of a lower operating frequency simplifies and reduces cost of RF matching systems and RF generators and can eliminate capacitive coupling between the inductor coil and plasma, which could be a strong factor in wall erosion and plasma contamination. In this study, electric and optical characteristics of electrodeless fluorescent lamp by changing ferrite position is discussed.

• 한국결정성장학회지
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• 제32권2호
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• pp.61-67
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• 2022

폐리튬이차전지 스크랩으로부터 회수한 유가금속인 니켈, 코발트, 망간을 정제하여 제조한 리튬이차전지 전구체 금속염 용액으로 테일러반응을 통해 NCM 811 전구체를 제조하였다. 반응 시간에 따른 전구체 형태 변화를 SEM, PSA, ICP 분석 결과를 기반으로 합성 조건을 확립하였다. 이에 상업용 전구체와 재활용하여 합성한 전구체의 전기 화학적 특성인 충·방전 특성, 율특성, 수명특성 등을 평가하여 비교 연구하였으며, 상업용 전구체와 비교 시 큰 차이가 없거나 일부 특성에서는 우수한 특성을 확인할 수 있었다.

• Journal of Computational Design and Engineering
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• 제1권3호
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• pp.202-212
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• 2014

To survive in the current shipbuilding industry, it is of vital importance for shipyards to have the ship components' accuracy evaluated efficiently during most of the manufacturing steps. Evaluating components' accuracy by comparing each component's point cloud data scanned by laser scanners and the ship's design data formatted in CAD cannot be processed efficiently when (1) extract components from point cloud data include irregular obstacles endogenously, or when (2) registration of the two data sets have no clear direction setting. This paper presents reformative point cloud data processing methods to solve these problems. K-d tree construction of the point cloud data fastens a neighbor searching of each point. Region growing method performed on the neighbor points of the seed point extracts the continuous part of the component, while curved surface fitting and B-spline curved line fitting at the edge of the continuous part recognize the neighbor domains of the same component divided by obstacles' shadows. The ICP (Iterative Closest Point) algorithm conducts a registration of the two sets of data after the proper registration's direction is decided by principal component analysis. By experiments conducted at the shipyard, 200 curved shell plates are extracted from the scanned point cloud data, and registrations are conducted between them and the designed CAD data using the proposed methods for an accuracy evaluation. Results show that the methods proposed in this paper support the accuracy evaluation targeted point cloud data processing efficiently in practice.