• 한국진공학회지
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• 제13권3호
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• pp.120-126
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• 2004

트렌치 소자 제조시 게이트 산화막 성장과 내압 강하의 원인이 되는 식각손상 회복과 코너 영역의 구조를 개선하기 위해 수소 분위기 열처리를 하였다. 열처리시 수소 원자에 의한 환원 반응을 이용하여 표면 에너지가 높은 코너 영역에서는 원자들의 이동에 의한 결정면 재배열, 산화막 측벽에서의 실리콘 원자 적층, 표면 거칠기의 개선 효과 등을 전자현미경 관찰을 통해 확인하였다. 실리콘 원자의 이동을 방해하는 식각 후 잔류 산화막을 수소 가스의 환원성 분위기에서 열처리함으로써 표면 에너지를 낮추는 방향으로 원자의 이동이 일어나 concave 영역, 즉 트렌치 bottom corner에서는 (111), (311) 결정면 재분포 현상이 일어남을 확인할 수 있었다. 또한 convex comer에서의 원자 이동으로 인해 corner 영역에서는 (1111) 면의 step 들이 존재하게 되고 원자 이동에 의해 산화막 측벽에 이르러 이동된 원자의 적층이 일어나며, 이는 열처리시 표면 손상 회복이 원자이동에 의함을 나타낸다. 이러한 적층은 표면 상태가 깨끗할수록 정합성을 띄어 기판과 일치하는 에피 특성을 나타내고 열처리 온도가 높을수록 표면 세정 효과가 커져 식각손상 회복효과가 커지며, 이를 이용하여 이후의 산화막 성장시 균일한 두께를 코너영역에서 얻을 수 있었다

• 한국수소및신에너지학회논문집
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• 제25권2호
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• pp.161-172
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• 2014

Hydrogen, which can be produced from abundant and widely distributed renewable energy resources, seems to be a promising candidate for solving the concerns for improving energy security, urban air pollution, and reducing greenhouse gas emissions. The two primary motivating factors for hydrogen economy are fossil fuel supply limitations and concerns about global warming. But the safety issues associated with hydrogen economy need to be investigated and fully understood before being considered as a future energy source. Limited operating experience with hydrogen energy systems in consumer environments is recognised as a significant barrier to the implementation of hydrogen economy. To prevent unnecessary restrictions on emerging codes, standards and local regulations, safety policies based on real hazards should be developed. This article studies briefly the direct impact-distances from hazard events such as hydrogen release and jet fire, and damage levels from hydrogen gas explosion in a confined space. Based on the direct impact-distances indicated in the accident scenarios and consumer environments in Korea, the safety policies, which are related to hydrogen filling station, hydrogen fuel cell car, portable fuel cell, domestic fuel cells, and hydrogen town, are suggested to implement hydrogen economy. To apply the safety policies and overcome the disadvantages of prescriptive risk management, which is setting guidance in great detail to management well known risk but is not covering unidentified risk, hybrid risk management model is also proposed.

• 전력전자학회논문지
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• 제27권2호
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• pp.150-156
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• 2022

This study proposes a design method of fuel cell DC/DC converter using in 5-ton forklift. For efficient hydrogen usage, targeted fuel cell system recirculates discarded hydrogen after fuel cell reaction. Recirculating hydrogen contains much impurities that reduces output power, increasing pressure that can damage the internal fuel cell reaction system. The proposed DC/DC converter effectively converts fuel cell power considering the voltage drop rate to reflect the recirculating hydrogen. Then, frequency control method is used to regulate the current ripple amount for battery and fuel cell hybrid configuration. Proposed power converter system design and control methods are verified in a practical fuel cell system that implements recirculating hydrogen.

• 동력기계공학회지
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• 제20권6호
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• pp.58-63
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• 2016

A stainless steel has high corrosion resistance because of nickel in material, so it is used as materials for transportation and storage of hydrogen. In this study, TIG(tungsten ingot gas) welding was carried out on the stainless steel using the storage vessel of hydrogen. The microscopic structures at each region of TIG welded material such as HAZ, weld and base metals using optical microscope were observed. And the damage behavior of stainless steel that underwent the hydrogen charging using nondestructive evaluation was also studied. Ultrasonic test, which is the most generalized nondestructive technique, was applied to evaluate the relationship between the ultrasonic wave and mechanical properties at each zone of TIG welded stainless steel. The velocity and attenuation coefficients of ultrasonic wave didn't show a remarkable difference at each region of welded stainless steel. However, the attenuation coefficient was the highest at the weld zone when hydrogen charged stainless steel. In addition, acoustic emission test was also used to study the dynamic behavior of stainless steel experienced both hydrogen charging and weld. Lots of AE event at elastic region of stress-strain curve were occurred both the hydrogen charged specimen and the free specimen.

• 한국재료학회지
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• 제12권4호
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• pp.235-239
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• 2002

In this study mesh-type PECVD system was suggested to minimize the hydrogen concentration. The main structural difference between the triode system and a conventional system is that, a third electrode, a mesh, is inserted between the powered and the ground electrode. We investigated several conditions to compare with conventional PECVD. The main effect of mesh was to minimize the substrate damage by ion bombardment and to enhance the surface reaction to induce hydrogen desorption. It was also found that hydrogen concentration decreased but deposition rate increased as increasing applied bias. Applied DC-bia s enhanced sputtering process. Intense ion bombardment causes the weakly bonded hydrogen or hydrogen-containing species to leave the growing film and increased adatom mobility. Furthermore, addition of hydrogen gas enhance the surface diffusion of adatom.

• 한국수소및신에너지학회논문집
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• 제30권6호
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• pp.499-504
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• 2019

Due to the rapid spread and low minimum ignition energy of hydrogen, rupture is highly likely to cause fire, explosion and major accidents. The self-ignition of high-pressure hydrogen is highly likely to ignite immediately when it leaks from an open space, resulting in jet fire. Results of the diffusion and leakage simulation show that jet effect occurs from the leakage source to a certain distance. And at the end of location, the vapor cloud explosion can be occurred due to the formation of hydrogen vapor clouds by built-up. In the result, it is important that depending on the time of ignition, a jet fire or a vapor cloud explosion may occur. Therefore, it is necessary to take into account jet effect by location of leakage source and establish a damage minimizing plan for the possible jet fire or vapor cloud explosion. And it is required to any kind of measurements such as an interlock system to prevent hydrogen leakage or minimize the amount of leakage when detecting leakage of gas.

• 동력기계공학회지
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• 제19권5호
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• pp.60-66
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• 2015

Embrittlement of material by hydrogen charging should be cleared for safety of storage vessel of hydrogen and components deal with hydrogen. A stainless steel is generally used as materials for hydrogen transportation and storage, and it has a big advantage of corrosion resistance due to nickel component in material. In this study, microscopic damage behavior of stainless steel according to the hydrogen charging time using nondestructive evaluation was studied. The surface of stainless steel became more brittle as the hydrogen charging time increased. The parameters of nondestructive evaluation were also changed with the embrittlement of stainless steel surface by hydrogen charging. Ultrasonic test, which is the most generalized nondestructive technique, was applied to evaluate the relationship between the ultrasonic wave and mechanical properties of stainless steel by hydrogen charging. The attenuation coefficient of ultrasonic wave was increased with hydrogen charging time because of surface embrittlement of stainless steel. In addition, acoustic emission test was also used to study the dynamic behavior of stainless steel experienced hydrogen charging. AE event at the hydrogen charged specimen was obviously decreased at the plastic zone of stress-strain curves, while the number of event for the specimen of hydrogen free was dramatically generated when compared with the specimens underwent hydrogen charging.

• 한국재료학회지
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• 제12권1호
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• pp.75-81
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• 2002

The ferroelectric properties of Pb(Zr,Ti)O$_3$[PZT] films degrade when the films with Pt top electrodes are annealed in hydrogen containing environment. This is due to the reduction activity of atomic hydrogen that is generated by the catalytic activity of the Pt top electrode. At the initial stage of hydrogen annealing, oxygen vacancies are formed by the reduction activity of hydrogen mainly at the vicinity of top Pt/PZT interface, resulting in a shift of P-E (polarization-electric field) hysteresis curve toward the negative electric field direction. As the hydrogen annealing time increases, oxygen vacancies are formed inside the PZT film by the inward diffusion of hydrogen ions, as a result, the polarization degrades significantly and the degree of P-E curve shift decreases gradually. The direction and the magnitude of the remnant polarization in the PZT film affect the motion of hydrogen ions which determines the degradation of polarization characteristics and the shift in the P-E hysteresis curve of the PZT capacitor during hydrogen annealing. When the remnant polarization is formed in the PZT film by applying a pre-poling voltage prior to hydrogen annealing, the direction of the P-E curve shift induced by hydrogen annealing is opposite to the polarity of the pre-poling voltage. The hydrogen-induced degradation behavior of the PZT capacitor is also affected by the internal field that has been generated in the PZT film by the charges located at the top interface prior to hydrogen annealing.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2014년도 제49회 KOSCO SYMPOSIUM 초록집
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• pp.113-113
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• 2014

This study has been conducted for evaluation of qualitative/quantitative risk of HCNG filling station. In case of fire explosion occurred because of hydrogen, CNG, and HCNG leaking on same conditions, maximum overpressure was measured as 30kPa for hydrogen, 3.5kPa for HCNG, and 0.4kPa for CNG. The overpressure of HCNG was measured 7.75 times higher than that of CNG, but it was only 11.7% compared with hydrogen. When the explosion was occurred, in case of hydrogen, the measured influential distance of overpressure was 59m and radiant heat was 75m. In case of CNG, influential distance of overpressure was 89m and radiant heat was 144m would be estimated. In case of 30% HCNG that was blended with hydrogen and CNG, influential distance of overpressure was 81m and radiant heat was 130m were measured. As the explosion occurred with the same sized container that had 350bar for hydrogen and 250bar of CNG and HCNG, the damage distance that explosive overpressure and radiant heat influenced CNG was seen as the highest. HCNG that was placed between CNG and hydrogen tended to be seen as more similar with CNG.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.251.2-251.2
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• 2013

Natural photosynthesis utilizes two proteins, photosystem I and photosystem II, to efficiently oxidize water and reduce NADP+ to NADPH. Artificial photosynthesis which mimics this process achieve water splitting through a two-step Z-schematic water splitting process using man-made synthetic materials for hydrogen fuel production. In this study, Z-scheme system was achieved from the hybrid materials which composed of hydrogen production part as photosystem I protein and water oxidizing part as semiconductor BiVO4. Utilizing photosystem I as the hydrogen evolving part overcomes the problems of existing hydrogen evolving p-type semiconductors such as water instability, expensive cost, few available choices and poor red light (>600 nm) absorbance. Some problems of photosystem II, oxygen evolving part of natural photosynthesis, such as demanding isolation process and D1 photo-damage can also be solved by utilizing BiVO4 as the oxygen evolving part. Preceding research has not suggested any protein-inorganic-hybrid Z-scheme composed of both materials from natural photosynthesis and artificial photosynthesis. In this study, to realize this Z-schematic electron transfer, diffusion step of electron carrier, which usually degrades natural photosynthesis efficiency, was eliminated. Instead, BiVO4 and Pt-photosystem I were all linked together by the mediator gold. Synthesized all-solid-state hybrid materials show enhanced hydrogen evolution ability directly from water when illuminated with visible light.